1-2
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
October, 2017
simplified customer ordering and factory configuration, enabling Brooks to
more easily meet the ever changing needs of our global customers.
Brooks' production flexibility translates into reduced lead times for our
customers. This flexibility allows products using both traditional analog
connections or leading edge network communications protocols.
The SLA5800 series of controllers can directly replace existing analog
products bringing with them greatly improved accuracy. Analog and digital
applications will see settling time improvements with an insensitivity to
varying process conditions, due to Brooks' proprietary Adaptive Valve Control
algorithm.
1-4 Specification