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3-3

Brooks

®

Model SLA5840

Section 3 Operation

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
October, 2017

Figure 3-3 Typical Application of Downstream Controller

Figure 3-4 Typical Application of Upstream Controller

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Содержание SLA5840

Страница 1: ...ng Part Number 541B201AAG October 2017 Brooks Model SLA5840 Brooks Digital Remote Transducer Pressure Controller Flowmeter Model SLA5840 Model SLA5840 With RS485 Communications Model SLA5840 With Prof...

Страница 2: ...e local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check f...

Страница 3: ...search and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior...

Страница 4: ...Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Brooks Model SLA5840 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...2 2 2 7 Installation 2 2 2 8 In Line Filter 2 3 2 9 Electrical Interface 2 3 2 10 Operation Check Procedure 2 6 Section 3 Operation 3 1 Overview 3 1 3 2 Theory of Operation for RT 3 1 3 3 Features 3 2...

Страница 6: ...mmended I O Wiring Configuration for Current Signals Non Isolated Power Supply 2 5 2 4 Recommended I O Wiring Configuration for Current Signals Isolated Power Supply 2 5 3 1 Model SLA5840 System Block...

Страница 7: ...hat this manual be read in its entirety before attempting to operate or repair these Brooks Digital products 1 3 Description The Brooks Model SLA5840 Pressure Controller Flowmeter is designed to contr...

Страница 8: ...exibility translates into reduced lead times for our customers This flexibility allows products using both traditional analog connections or leading edge network communications protocols The SLA5800 s...

Страница 9: ...ucibility Repeatability Reproducibility Repeatability Reproducibility Repeatability Reproducibility 0 20 S P Linearity Linearity Linearity Linearity Linearity Included in accuracy Response Time Respon...

Страница 10: ...ence Input Impedence 100 Ohms N A Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specif...

Страница 11: ...rective 2011 65 EU EN 61326 1 2013 EMC RoHS ATEX IECEx Special Conditions for safe use 1 The module shall be installed in a suitable enclosure providing a degree of protection of at least IP54 accordi...

Страница 12: ...ital Series related to RS485 are 1200 2400 4800 9600 19200 and 38400 baud and can be selected via the Brooks Expert Support Tool BEST The RS485 is essentially a multidrop connection It allows a maximu...

Страница 13: ...nication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud thus making the need for any hardware baud rate selection methods not required For selecting the device...

Страница 14: ...similar to the RS485 standard in that it is a multi drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNetproducts are 125K 250K and...

Страница 15: ...840 1 9 Section 1 Introduction Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Figure 1 4 Model SLA5840 Thru Flow RS485 Figure 1 5 Model SLA5840 T...

Страница 16: ...1 10 Brooks Model SLA5840 Section 1 Introduction Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Figure 1 6 Model SLA5840 Thru Flow DeviceNet...

Страница 17: ...d with the packing materials Inspect for damaged or missing parts 2 3 Recommended Storage Practice If intermediate or long term storage of equipment is required it is recommended that the equipment be...

Страница 18: ...s a The SLA Enhanced RT should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a ma...

Страница 19: ...r SLA Enhanced RT s electrical interface is designed to facilitate low loss and quiet signal connections Separate returns commons are supplied for the analog setpoint analog flow signal and the power...

Страница 20: ...llation Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Figure 2 2 Common Electrical Hookups Voltage I O Version Figure 2 1 D Connector Shielded C...

Страница 21: ...eration Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Figure 2 3 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 4 Recommended...

Страница 22: ...4 g Turn on the gas supply A positive flow signal may be present due to slight valve leak thru RT only h Supply a setpoint signal between 10 100 i Check the analog output signal The output signal shou...

Страница 23: ...s to regulate the flow through the integral solenoid control valve to stabilize the pressure at the setpoint value An ntegral mass flow sensor identical in design to the Brooks SLA5850 Mass Flow Contr...

Страница 24: ...meters are configured at the factory according to customer order and typically do not require adjustment Not all features are available on all instruments The SLA5840 is a full featured digital Remot...

Страница 25: ...tion 3 Operation Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 Figure 3 3 Typical Application of Downstream Controller Figure 3 4 Typical Applic...

Страница 26: ...etpoint 1 5 Vdc flow Output 0 20 mA setpoint 0 20 mA flow output 4 20 mA setpoint 4 20 mA flow output 0 10 Vdc setpoint 0 10 Vdc flow output Also included is a Valve Override input signal All analog s...

Страница 27: ...e PID response to the connected remote transducer or in the Mass Flow Controller mode PID response to the on board thermal mass flow sensor Switching between modes can only be done by use of a softwar...

Страница 28: ...upport the following baud rates Please specify the desired baud rate when ordering default is 19200 baud Alternately baud rate may be changed using the Brooks Expert Support Tool BEST Baud Rates 1200...

Страница 29: ...Brooks SLA5840 is also available with DeviceNetTM communication capability DeviceNet is an open digital protocol capable of high speeds and easy system connectivity Brooks Instrument has several of it...

Страница 30: ...3 8 Brooks Model SLA5840 Section 3 Operation Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 31: ...eng Part Number 541B201AAG October 2017 4 1 Overview No routine maintenance is required on the Brooks Digital RT s If an in line filter is used the filtering elements should be periodically replaced...

Страница 32: ...When troubleshooting it is important to understand that the response time required to increase or decrease pressure is directly related to the flow rate of the device and the size of the vessel or li...

Страница 33: ...to pass the full scale flow rate To check for this condition compare the actual inlet outlet pressure drop as read from pressure gauges with that specified on the order shown in Figure 4 1 Increase t...

Страница 34: ...lowing forumula should be used Where P1 percentage of gas 1 by volume P2 percentage of gas 2 by volume P3 percentage of gas n by volume Example The desired gas is 20 Helium He Sensor Factor 1 386 and...

Страница 35: ...1 812 4 125 2 Chlorobutane C4 H9 Cl 0 234 1 818 4 134 Chlorodifluoromethane f 22 CHCLF2 0 505 1 770 3 906 Chloroform Trichloromethane CHCL3 0 442 2 066 5 340 Chloropentafluoroethane f 115 C2 CLF5 0 2...

Страница 36: ...503 Isopentane C5 H12 0 211 1 605 3 222 Krypton Kr 1 382 1 729 3 708 Methane CH4 0 763 0 763 0 717 Methylacetylene C3 H4 0 473 1 196 1 782 Methyl Bromide CH3 Br 0 646 1 834 4 236 3 Methyl 1 butene C5...

Страница 37: ...931 4 648 Sulfur Dioxide SO2 0 728 1 529 2 858 Sulfur Hexafluoride SF6 0 270 2 348 6 516 Sulfur Tetrafluoride SF4 0 353 1 957 4 776 Sulfur Trioxide SO3 0 535 1 691 3 575 Sulfuryl Fluoride SO2 F2 0 423...

Страница 38: ...ctory Service Center Sizing All SLA5840 Restrictor Assemblies are factory adjusted to provide a specific pressure drop for each flow rate This corresponds to the desired full scale flow rate A list of...

Страница 39: ...0Z279BMT J 43 14 61 09 S110Z301BMA S110Z280BMT K 60 40 85 53 S110Z302BMA S110Z281BMT L 84 56 119 7 S110Z303BMA S110Z282BMT M 118 4 167 6 S110Z304BMA S110Z283BMT N 165 7 234 7 S110Z305BMA S110Z284BMT P...

Страница 40: ...10 Brooks Model SLA5840 Section 4 Maintenance Troubleshooting Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 THIS PAGE WAS INTENTIONALLY LEFT BLA...

Страница 41: ...rooks Model SLA5840 Brooks Instrument Brooks Instrument x x x Brooks Instrument x x x 1 2 x Brooks Instrument x PED 0 5 bar g 25 mm 1 inch PED x PED x 2014 34 EU x Brooks Instrument 1 x 25 mm 1 inch I...

Страница 42: ...a zen kompletn vypr zdnit Pokud tak neu in te m e z d vodu teplotn rozta nosti zbytk m dia v za zen doj t k jeho po kozen nebo k ohro en zdrav osob Evropsk sm rnice pro tlakov za zen PED Na ve ker tla...

Страница 43: ...ikke bliver lukket p samme tid i forbindelse med aftapning S fremt dette ikke overholdes er der risiko for at v sken p grund af varmeudvikling ekspanderer og dette kan for rsage skade p udstyr og pers...

Страница 44: ...pt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED Pressure Equipment Directive Alle drukapp...

Страница 45: ...sel korral v ib vedelik soojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada raskeid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele...

Страница 46: ...ttaa nesteen l mp laajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joiden paine on suurempi kuin 0 5 bar g ja j...

Страница 47: ...ng s Si cela n est pas fait une ventuelle dilatation thermique du fluide peut casser l appareil et provoquer des blessures Directive europ enne quipements sous pression PED Tous les quipements sous pr...

Страница 48: ...komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichtl...

Страница 49: ...ober 2017 Brooks Model SLA5840 Greek Brooks Instrument Brooks Instrument x x x Brooks Instrument x x x 1 2 x Brooks Instrument x PED 0 5 bar g 25 mm 1 PED x PED x 2014 34 EU x Brooks Instrument 1 x 25...

Страница 50: ...l p szelepeket a berendez st teljesen le kell r teni Ennek elmulaszt sa a folyad k h t gul s t okozhatja ami k ros thatja a berendez st s szem lyi s r l shez vezethet Nyom start berendez sekre vonatko...

Страница 51: ...eve svuotare completamente l apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europea relati...

Страница 52: ...mas ier u tuvum eso os iepl des un izpl des v rstus k da iemesla d ir j aizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas s...

Страница 53: ...tuvus i renginio reikia i leisti vis skyst To nepadarius galimas iluminis skys io pl timasis galintis sugadinti rengin ir su eisti mon s Europos sl gin s rangos direktyva PED Visa sl gin ranga kurios...

Страница 54: ...eli znajduj ce si na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi...

Страница 55: ...r as v lvulas a montante e jusante do equipamento tenha em aten o que o mesmo dever ser previamente esvaziado do flu do que o atravessa Esta obriga o surge do facto de existir a possibilidade de ocorr...

Страница 56: ...lvelor de intrare i ie ire limitrofe instala iei instala ia trebuie complet golit Neglijarea acestui lucru poate avea ca efect dilatarea termic a fluidului care poate defecta instala ia i poate produc...

Страница 57: ...d vodu je nutn uzavrie vstupn a v stupn ventily zariadenie je potrebn plne vypr zdni Zanedbanie vyp ania m za n sledok po kodenie zariadenia s mo nos ou zranenia obsluhy z d vodu tepelnej roz a nosti...

Страница 58: ...izprazniti e tega ne naredite lahko pride do toplotnega raztezanja teko ine zaradi katerega se lahko naprava prelomi in povrzo i telesne po kodbe Evropska direktiva o tla ni opreni PED Vsa tla na opr...

Страница 59: ...equipo dichas instalaciones deber n ser completamente vaciadas La omisi n de esto ltimo puede provocar la dilataci n t rmica del l quido lo que puede da ar al equipo y conducir a da os personales Dir...

Страница 60: ...ustningen och orsaka personliga skador European Pressure Equipment Directive PED R dets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar Alla utrustning f r tryck med...

Страница 61: ...Brooks Model SLA5840 Installation and Operation Manual X PR SLA5840 Series RevB RT eng Part Number 541B201AAG October 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 62: ...rds Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when require...

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