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3-5

Brooks

®

Models 5964, 5850EM

Section 3 Operation

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Figure 3-3. Flow Sensor Operational Diagram (VCR

TM

End Connections Shown)

Figure 3-4. Flow Control System Block Diagram.

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Содержание 5850EM

Страница 1: ...Number 541B121AHG November 2008 Brooks Models 5964 5850EM Brooks Models 5964 5850EM Mass Flow Controllers Model 5850EM Mass Flow Controller with D Connector Model 5850EM Downported Mass Flow Controlle...

Страница 2: ...like substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed...

Страница 3: ...search and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior...

Страница 4: ...Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Brooks Models 5964 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...from Storage 2 2 2 7 In Line Filter 2 3 2 8 Installation 2 3 2 9 Electrical Interface 2 4 2 10 Operation Procedure 2 5 Section 3 Operation 3 1 Overview 3 1 3 2 Connections and Controls 3 1 3 3 Theory...

Страница 6: ...rnaslly Accessible Adjustments 3 3 3 3 Flow Sensor Operational Diagram VCRTM End Connections Shown 3 4 3 4 Flow Controller System Block Diagram 3 4 3 5 Enhanced Response 20 Pin Card Edge PC Board Jump...

Страница 7: ...incorporates metal seals or welded joints insuring leak integrity for high purity and high vacuum applications Reducing the amount of internal threads makes the design less prone to system contaminat...

Страница 8: ...0 25 of rate Settling Time Model 5964 Enhanced response PCB s less than 1 sec to within 2 of Full Scale of final value for a 0 100 command step with Normally Closed Valve Optional on 5850EM Model 5850...

Страница 9: ...gh alloy ferritic stainless steel External seals Nickel Internal seals Nickel Valve Seat 316L Viton fluoroelastomers Buna N Kalrez or Teflon Dimensions Refer to Figures 1 1 thru 1 4 Process Connection...

Страница 10: ...1 Vdc into 2 000 ohms minimum Power Requirements Voltage Option N C Valve or N O Valve with flow less than 2 5 slpm 3 25 watts max 15 Vdc 35 mA 15 Vdc 180 mA N O Valve with flow rate greater than 2 5...

Страница 11: ...5850EM Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 1 1 MFC MFM Dimensional Drawing for Model 5964 5850EM with D Conn...

Страница 12: ...4 5850EM Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 1 2 MFC MFM Dimensional Drawing for Model 5964 5850EM with Card...

Страница 13: ...964 5850EM Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 1 3 MFC MFM Dimensional Drawing for Model 5964 5850EM Downport...

Страница 14: ...5964 5850EM Section 1 Introduction Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 1 4 MFC MFM Dimensional Drawing for Model 5964 5850EM Downpor...

Страница 15: ...Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718...

Страница 16: ...rooksInstrument com Instrument must have been purged in accordance with the following All flow instruments returned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Sta...

Страница 17: ...e clean and free of lateral scratches When installing the controller care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps un...

Страница 18: ...seal manufacturers recommendations for installation Tighten the mounting screws in 10 in lb increments such that the seal undergoes uniform compression Final torque values depend on the screw and hard...

Страница 19: ...hould use a cable which is completely screened with a 100 shield D Connectors should also be shielded using a metal shield If applicable metal cable glands must be used to provide cable screen clampin...

Страница 20: ...7 or 3 8 Jumper Selectable Remote Transducer input on standard response PC board only Refer to Figure 3 8 This pin is used for Valve Common on Unit replacement PC Board Remote Transducer In on 3 secon...

Страница 21: ...V Signal Output Green C 6 Supply Common Blue 4 7 15 Vdc Supply Violet D 8 Valve test Point Gray 5 9 Not Used White E 10 Not Used Black 6 11 Not Used Brown F 12 15 Vdc Input Red 7 13 Slot Orange H 14...

Страница 22: ...wable Loop Resistance Current I O Version Figure 2 4 D Connector Shielded Cable Hookup Diagram Current I O Version Pin No Function Color Code 1 Command Return Black 2 0 5 Volt Signal Output White 3 No...

Страница 23: ...Input Signal Output Return Current Signal Setpoint and Output Com Current Output Note 2 Indicator or Receiver 1 15 9 8 Power Supply 15 28 Vdc Voltage Setpoint Input Signal Output Return Voltage Signa...

Страница 24: ...2 10 Brooks Models 5964 5850EM Section 2 Installation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 25: ...lp in bringing the flow on smoothly Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter This section contains the following information Features and Jump...

Страница 26: ...mber 2008 Figure 3 1 Model 5964 5850EM Components Electronics Cover Valve Coil Assembly Valve Connector Outlet Connector Electrical Interface Inlet Connector Adjustment Potentiometers Tubing Connectio...

Страница 27: ...124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA 0154E 0151i Panel Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA D Connector 0151i Table Top Current I O 0152i Shielded S124Z576AAA S124Z577AAA...

Страница 28: ...mperatures T1 and T2 therefore are equal When gas flows through the sensor tube the upstream sensor is cooled and the downstream sensor is heated which produces a temperature difference The temperatur...

Страница 29: ...ection 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 3 3 Flow Sensor Operational Diagram VCRTM End Connections Shown Figure 3 4 Fl...

Страница 30: ...ble on all devices Refer to Figures 3 5 through 3 9 depending upon the type of printed circuit board and connector for jumper locations functions and adjustment potentiometers Note To obtain access to...

Страница 31: ...BLACK BLACK A B A B A B C D Pin 10 is connected to Circuit Common 5V Ref disabled Standard NOTE For S097X061AAA PC Boards all J1 Pins should be open A B C D YELLOW YELLOW YELLOW External Valve Return...

Страница 32: ...ed to Power Supply Common at the Power Supply for 15 Volt Valve Drive or where Pin 10 is connected to 15 Volts at the Power Supply for 30 Volt Valve Drive 5V Ref Disabled Disabled Standard NOTE Normal...

Страница 33: ...SPAN ZERO R12 R1 R4 ADJUSTMENT POTENTIOMETERS J3 J2 J1 Disabled Standard J2 RED SOFT START Enabled Valve Drive 15 Volts External Valve Return J3 BLACK VALVE DRIVE JUMPER SENSOR CONNECTOR VALVE CONNECT...

Страница 34: ...FUNCTION Disabled Standard J2 RED SOFT START Enabled Disabled Standard Enabled J7 GREEN REMOTE TRANSDUCER INPUT CS REV H AND HIGHER COMPONENT SIDE SHOWN Valve Drive 30 Volts External Valve Return Use...

Страница 35: ...output Disabled Standard J2 RED SOFT START Enabled A A A J7 GREEN SETPOINT INPUT SIGNAL TYPE Mass Flow Controller only CS REV H AND HIGHER COMPONENT SIDE SHOWN SENSOR CONNECTOR R3 R2 R1 R4 VALVE CONNE...

Страница 36: ...ection 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 3 10 Command Steps Soft Start Disabled Figure 3 11 100 Command Step Soft Star...

Страница 37: ...nd yellow jumpers On the standard response PC Boards Pin 10 is configured using the J3 black and J8 yellow jumpers Refer to Figure 3 5 or 3 6 as applicable for jumper configurations b D Connector Volt...

Страница 38: ...reen jumper Refer to Figure 3 6 or 3 8 as applicable for jumper configurations Low Command Flow Cutoff Auto Shut Off Prevents the valve from opening whenever the command input is less than 2 of full s...

Страница 39: ...ates removal of the electronics cover Adjusting potentiometers can seriously affect the performance of the mass flow controller and should only be performed by properly trained and qualified personnel...

Страница 40: ...ow for details Response The response potentiometer is used to adjust the response of the sensor for steps in flow Adjusting this potentiometer in the clockwise direction will increase actual flow over...

Страница 41: ...4 6 If older Brooks secondary electronics Models 5878 5876 and 5896 are being used as a power supply during the calibration the 5 Volt reference must be enabled on the card edge version for proper op...

Страница 42: ...rs 10 turns counterclockwise This provides a rough adjustment of this circuit and makes the flow more stable for calibration c Adjust zero by connecting the DVM digital voltmeter positive lead to the...

Страница 43: ...t two minutes for the flow to fully stabilize Read the flow rate Calculate the error using the following equation Record the error If the error is positive too much flow the linearity jumper must be i...

Страница 44: ...t in Step c above If the zero does not repeat check for leakage Note Controllers supplied with all metal or Teflon valve seats do not provide tight shut off A 0 8 leak through is typical For metal or...

Страница 45: ...5 TP2 correction voltage 1 5 x 0 450 0 675 Volts New TP2 voltage zero volts 0 675 0675 Volts j Set the command potentiometer for 100 flow 5 000 V Connect the DVM positive lead to TP2 linearity voltage...

Страница 46: ...en the response time of the flow controller is not critical to overall system performance Adjustment 2 describes a method that will allow adjustment of your Model 5964 5850EM mass flow controller to o...

Страница 47: ...an 100 millisecond response to within 0 2 of final value in series with the Model 5964 5850EM and a storage oscilloscope or recorder a Set the command to zero percent flow rate 0 000 V and allow the f...

Страница 48: ...iometer is necessary If the desired response characteristics are still not achieved some additional improvement can be realized by making adjustments to the flow control valve Refer to Section 4 4 Sta...

Страница 49: ...ithin 0 2 of final value or better in series with the Model 5850EM and a storage oscilloscope or recorder a Make a step change in command to the controller from zero to 100 of full scale flow and reco...

Страница 50: ...3 26 Brooks Models 5964 5850EM Section 3 Operation Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 51: ...4 1 Brooks Models 5964 5850EM Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 4 1 Overview...

Страница 52: ...for bench troubleshooting or return especially if the system is new 1 Verify a low resistance common connection correct power supply voltage and that signals are reaching and leaving the controller T...

Страница 53: ...ibration conditions Verify that the output signal reaches and stabilizes at 5 000 Volts Vary the command voltage over the control range and verify that the output signal follows the command input Appl...

Страница 54: ...low 15 Volts applied to the valve override input Check the valve override terminal Refer to Section 2 6 for terminal assignments through the controller Defective printed circuit board Replace printed...

Страница 55: ...CTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal...

Страница 56: ...g the ratio of the molar specific heat of the two gases or by sensor conversion factor A list of sensor conversion factors is given in Table 4 5 To change to a new gas multiply the output reading by t...

Страница 57: ...ne f 22 CHCLF2 0 505 1 770 3 906 Chloroform Trichloromethane CHCL3 0 442 2 066 5 340 Chloropentafluoroethane f 115 C2 CLF5 0 243 2 397 7 165 Chlorotrifluoroethylene C2 CLF3 0 337 2 044 5 208 Chlorotri...

Страница 58: ...382 1 729 3 708 Methane CH4 0 763 0 763 0 717 Methylacetylene C3 H4 0 473 1 196 1 782 Methyl Bromide CH3 Br 0 646 1 834 4 236 3 Methyl 1 butene C5 H10 0 252 1 584 3 127 Methyl Chloride CH3 CL 0 687 1...

Страница 59: ...silane SiHCL3 0 329 2 201 6 038 Trimethyloxyborane TMB B OCH3 3 0 300 1 929 4 638 1 1 2 Trichloro 1 1 2 Triflouroet f 113 C2 CL3 F3 0 231 2 520 7 920 Trimethylamine CH3 3 N 0 316 1 467 2 639 Tungsten...

Страница 60: ...ote that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined in the fo...

Страница 61: ...4 11 Brooks Models 5964 5850EM Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 4 1 Model 5850EM Orifice Sizing Nomograph...

Страница 62: ...ollowing formula must be used Where P1 percentage by volume of gas 1 P2 percentage by volume of gas 2 Pn percentage by volume of gas n Example Find the Nitrogen equivalent for 20 slpm of a 20 Helium a...

Страница 63: ...drop psi on the vertical line marked Dp Point A 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked QNitrogen Point B 6 Draw a line connecting Dp and QNitrogen and ext...

Страница 64: ...4 14 Brooks Models 5964 5850EM Section 4 Maintenance Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 Figure 4 2 Example Nomograph...

Страница 65: ...hen the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel See Section 4 3 Disassembly and Assembly for restricto...

Страница 66: ...M Nitrogen Equivalent Flow Part Number Size Low High ACLFE Wire Mesh D 8 038 11 38 S110Z275BMG E 11 25 15 93 S110Z276BMG F 15 75 22 30 S110Z277BMG G 22 05 31 23 S110Z278BMG H 30 88 43 73 S110Z279BMG J...

Страница 67: ...ktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Ja...

Страница 68: ...tion Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Eq...

Страница 69: ...ignal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous appro...

Страница 70: ...ngsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italia...

Страница 71: ...obles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Inst...

Страница 72: ...ltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual...

Страница 73: ...Brooks Models 5964 5850EM Installation and Operation Manual X TMF 5964 5850EM MFC eng Part Number 541B121AHG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 74: ...is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customer...

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