2-5
Brooks
®
Models 5964, 5850EM
Section 2 Installation
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
To insure proper operation, the Model 5964/5850EM must be connected
per Figures 2-1 through 2-6 depending upon the type of printed circuit
board and connector. As a minimum, the following connections must be
made:
Voltage I/O Version
Current I/O Version
• Chassis Ground
• Chassis Ground
• Signal Common
• Signal Output Return
• Signal Output
• Voltage or Current
• +15 Vdc Supply
Signal Output
• -15 Vdc Supply
• 15-28 Vdc Supply
• Command Input
• Supply Common
• Command Common
• Voltage or Current
• Supply Common
• Voltage or Current
• Valve Return (Specific
Command Input
to applications see below)
• Command Return
The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.
Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.
NOTICE
Note: If older Brooks secondary electronics are used to power and control
the Model 5964/5850EM, the 5 Volt reference must be enabled. Brooks
secondary electronics that require the 5 Volt reference consist of 587x and
589x series.
2-10 Operation Procedure
a. Mount the controller in its final orientation.
b. Apply power to the controller and allow approximately 45 minutes for
the instrument to warm up and stabilize its temperature.
c. Turn on the gas supply.
d. Command zero percent (0%) flow and observe the controller’s output
signal. If the output is not zero mVdc (10 mVdc), check for leaks and, if
none are found, refer to the re-zeroing procedure in Section 3-6.
e. Set the command for the desired flow rate to assume normal operation.
Note: If a separate positive shut-off valve is not installed, a flow signal
may result from leak-through. Leak-through is more significant with
stainless steel and Teflon valve seats.