ii
Brooks
®
Models 5964, 5850EM
Contents
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number:541B121AHG
November, 2008
Figures
Figure
Page
Number
Number
1-1
MFC/MFM Dimensional Drawing for Model 5964/5850EM
with D-Connector and VCR Fittings ........................................................................................ 1-5
1-2
MFC/MFM Dimensional Drawing for Model 5964/5850EM
with Card Edge and VCR Fittings ............................................................................................ 1-6
1-3
MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector .... 1-7
1-4
MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge ....... 1-8
2-1
Card Edge Connector ............................................................................................................. 2-6
2-2
20 Pin Card Edge Connector Ribbon Cable Hookup Diagram ................................................ 2-7
2-3
D-Connector Shielded Cable Hookup Diagram - Voltage I/O Version ..................................... 2-6
2-4
D-Connector Shielded Cable Hookup Diagram - Current I/O Version ..................................... 2-8
2-5
Maximum Allowable Loop Resistance-Current I/O version ..................................................... 2-8
2-6
Common Electrical Hookups Current I/O version ................................................................... 2-9
3-1
Model 5964/5850EM Components .......................................................................................... 3-2
3-2
Externaslly Accessible Adjustments ........................................................................................ 3-3
3-3
Flow Sensor Operational Diagram (VCR
TM
End Connections Shown) .................................... 3-4
3-4
Flow Controller System Block Diagram ................................................................................... 3-4
3-5
Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function ................. 3-6
3-6
Standard Response 20 Pin D-Connector PC Board Jumper location and Function ................ 3-7
3-7
Enhanced Response 15 Pin D-Connector PC Board Jumper location and Function .............. 3-8
3-8
Standard Response 15 Pin D-Connector PC Board Jumper location and Function ................ 3-9
3-9
Current I/O Version PC Board Jumper Location and Function .............................................. 3-10
3-10
Command Steps, Soft Start Disabled .................................................................................... 3-11
3-11
100% Command Steps, Soft Start Enabled ........................................................................... 3-11
3-12
Adjustment Potentiometer Location ...................................................................................... 3-14
3-13
Bench Troubleshooting Circuit .............................................................................................. 3-16
3-14
Response Adjustment ........................................................................................................... 3-22
4-1
Model 5964/5850EM Orifice Sizing Nomograph ................................................................... 4-11
4-2
Example Nomograph ............................................................................................................ 4-14
Tables
Table
Page
Number
Number
2-1
Recommended Filter Size .......................................................................................................... 2-3
3-1
Cables, calibration Covers and PC Boards for Model 5964/5850EM ......................................... 3-3
4-1
Bench Troubleshooting .............................................................................................................. 4-4
4-2
Sensor Troubleshooting ............................................................................................................. 4-5
4-3
Conversion Factors (Nitrogen Base) .......................................................................................... 4-7
4-4
Model 5964/5850EM Standard Restrictors ................................................................................ 4-16