BRONKHORST®
9.17.061
EL-FLOW
Base
Series Mass Flow Controllers
Page 3
TABLE OF CONTENTS
Contents
1
General Product Information ........................................................................................................... 5
1.1
Introduction ....................................................................................................................................................... 5
1.2
Intended Use ...................................................................................................................................................... 5
1.3
Symbols .............................................................................................................................................................. 5
1.4
Product Support References .............................................................................................................................. 5
1.5
Warranty ............................................................................................................................................................ 6
1.6
Product Description ........................................................................................................................................... 6
1.6.1
General Description .................................................................................................................................... 6
1.6.2
Model Key ................................................................................................................................................... 7
1.6.3
Seals ............................................................................................................................................................ 7
1.6.4
Calibration ................................................................................................................................................... 8
1.6.5
Features ...................................................................................................................................................... 8
1.7
Operating Principles ........................................................................................................................................... 9
1.7.1
Thermal Gas Flow Sensor Principle ............................................................................................................. 9
1.7.2
Bypass Principle .......................................................................................................................................... 9
1.7.3
Solenoid Valve Principle ............................................................................................................................ 10
1.8
Maintenance .................................................................................................................................................... 10
2
Installation Instructions ................................................................................................................. 11
2.1
Introduction ..................................................................................................................................................... 11
2.2
Unpacking and inspection ................................................................................................................................ 11
2.3
Rated pressure test inspection ........................................................................................................................ 11
2.4
Instrument mounting ....................................................................................................................................... 11
2.5
Fluidic connections .......................................................................................................................................... 12
2.6
In-line filter usage ............................................................................................................................................ 12
2.7
Piping requirements ........................................................................................................................................ 12
2.8
Electrical connections ...................................................................................................................................... 13
2.8.1
Interface .................................................................................................................................................... 13
2.8.2
Power Supply ............................................................................................................................................ 13
2.9
Power and warm-up ........................................................................................................................................ 13
2.10
Pressure supply / Start-up ............................................................................................................................... 13
2.11
System purging ................................................................................................................................................ 14
2.12
Zeroing ............................................................................................................................................................. 14
3
Basic Operation ............................................................................................................................. 15
3.1
General ............................................................................................................................................................ 15
3.2
Analog operation ............................................................................................................................................. 15
3.3
Digital communication protocol detection (Flow-BUS RS232 or MODBUS RS485) ......................................... 16
3.4
Basic RS232 Flowbus operation ....................................................................................................................... 17
3.5
Modbus RS485 operation ................................................................................................................................ 18
3.5.1
Modbus termination ................................................................................................................................. 18
3.5.2
Slave address, baud rate and parity setup ................................................................................................ 19
3.5.3
Implementation class ................................................................................................................................ 23
3.5.4
Response time ........................................................................................................................................... 23
3.5.5
Supported Modbus functions ................................................................................................................... 23
3.5.6
Available parameters ................................................................................................................................ 24
3.6
Push-button operation .................................................................................................................................... 26
3.7
Micro-switch use for reading/changing control mode .................................................................................... 27
3.7.1
Read control mode ................................................................................................................................... 27
3.7.2
Change control mode: .............................................................................................................................. 27
3.8
LED indications ................................................................................................................................................. 28
3.9
Basic Parameters and Properties ..................................................................................................................... 29
3.9.1
Introduction .............................................................................................................................................. 29
3.9.2
Basic Parameters ....................................................................................................................................... 30
4
Advanced Operation ..................................................................................................................... 31
4.1
Reading and Changing Instrument Parameters ............................................................................................... 31
