BRONKHORST CEM, Инструкция по эксплуатации

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BRONKHORST
®
Appendix, page 6
B) To start the process:
Procedure: Actions:
B1) Set the CEM heater at right temperature. Give setpoint to the heater, wait until the
temperature is stabilized.
B2) Start gas flow.
(1)
Give setpoint to gas MFC.
B3) Start liquid flow.
(2)
Give setpoint to liquid flow controller, wait
until stabilization.
B4) Connect process. Open 10, close 11.
C) To stop the process:
Procedure: Actions:
C1) Disconnect process. Open 11, close 10.
C2) Stop liquid flow. Give setpoint = 0 to liquid flow controller.
C3) Optional: Stop gas flow.
(1)
Give setpoint = 0 to gas MFC.
D) How to leave system overnight:
Procedure: Actions:
D1) Relief the supply pressure from the liquid
supply and lines.
Close 5.
Relief pressure inert gas supply. Open 2.
D2) Leave system unused. Close 3. Close 2.
D3) Before startup, pressurize liquid supply. Open 2.
Open 3 and 5.
D4) System is now ready for use. Proceed according to B.
E) To empty and purge the system:
(3,4)
Procedure: Actions:
E1) Follow procedure “How to leave system
overnight” until “leave system unused”.
See D1 and D2.
E2) Purge liquid out of lines. Open 4 and 7, open 2
E3) Purge lines with inert gas. Purge for long time.
E4) Optional: Purge with inert liquid. Connect inert liquid to inert gas supply .
Proceed according to E2.
E5) Optional: Alter E3 and E4 for a few times.
1
Make sure that the carrier gas is always flowing when the liquid flow is on. Preferably,
let always gas flow in the carrier gas line when the system is filled with liquid.
2
Close supply pressure of the liquid vessel during the process. The pressure controller of
the inert gas supply can influence the stability of the liquid flow controller.
3
If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully,
before introducing liquid in the system.
4
If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is
purged fully (preferably with inert liquid, E3, E4, E5) before opening the system.
Remarks:
- In case of non-pure liquids, place a filter just before the Liqui-Flow.
- Mount the CEM system vertical.