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BRONKHORST

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Содержание CEM

Страница 1: ...ator and mixer Doc no 9 17 010J Date 19 09 2016 ATTENTION Please read this instruction manual carefully before installing and operating the instrument Not following the guidelines could result in personal injury and or damage to the equipment ...

Страница 2: ...page 2 9 17 010 BRONKHORST ...

Страница 3: ...rly during this period may be repaired or replaced at no charge Repairs are normally warranted for one year or the balance of the original warrant whichever is longer See also paragraph 9 of the Conditions of sales The warranty includes all initial and latent defects random failures and undeterminable internal causes It excludes failures and damage caused by the customer such as contamination impr...

Страница 4: ...stem and tighten the fittings according to the instructions of the supplier of the fittings Check the system for leaks before applying fluid pressure In systems with corrosive or reactive fluids purging with an inert gas is absolute necessary before use Complete purging after use with corrosive or reactive fluids is also required before exposing the system to air Apply power to the instruments and...

Страница 5: ...n page 8 2 5 Liquid filling page 8 2 6 In line filter page 9 2 7 Fluid connections page 9 2 8 Electrical connections page 9 2 9 Caution page 9 2 10 Supply pressure page 9 2 11 System purging page 9 2 12 Seals page 9 3 Operation 3 1 General page 10 3 2 Power and warm up page 10 3 3 Start up close down page 10 4 Cables 4 1 EMC and cables page 12 Appendix Recommendations for handling the Bronkhorst D...

Страница 6: ...page 6 9 17 010 BRONKHORST ...

Страница 7: ...a liquid vapour At room temperature the liquid for instance water or TEOS is drawn from a container with an inert gas blanket or membrane and measured by a liquid mass flow meter type m flow or LIQUI FLOW The required flow rate is controlled to the setpoint value by a control valve that forms an integral part of the CEM system A carrier gas controlled by a MFC is used to stimulate the evaporation ...

Страница 8: ...ing box seal instrument in plastic etc All instruments must be dispatched with a completely filled in declaration on contamination form In the back of this manual Instruments without this declaration will not be accepted Note If the instruments have been used with toxic or dangerous gases the customer should pre clean the instrument Important Clearly note on top of the package the customer clearan...

Страница 9: ...EM valve with a Red Coloured sticker Check test pressure before installing in the line If this sticker is not available or the test pressure is incorrect the instrument should not be mounted in the process line and be returned to the factory Each instrument is leak tested to at least 2 10 9 mbar l s Helium 2 10 Supply pressure Do not apply pressure until electrical connections are made When applyi...

Страница 10: ...en stabilised the liquid flow can be applied to the system by gradually increasing the setpoint of the liquid controller Now your CEM system should be operating When closing down operation of the system proceed in reverse order First stop the liquid flow and after that the gas flow Note Make sure there is always gas flow whenever liquid flow is present Operation example Application Generation of h...

Страница 11: ...at e e h r 6 236 100 3 473 50 e mbar The moleRatio 305 0 6 236 25 1013 6 236 X so in a gas flow of 2 ln min the saturated water flow 50 r h is 61 0 2 305 0 gas water X ln min and in g h 41 29 4 22 60 18 61 0 ln min min ln mol h mol g g h Result at 50 r h the waterflow is 29 41 g h ...

Страница 12: ...with the EMC requirements as are valid for this kind of equipment However compliance with the EMC requirements is not possible without the use of proper cables and connector packing gland assemblies Screens of cables should be carefully connected at both ends of the cable to the metal housing of the connector for good EMC behaviour For sensors and valves follow the guidelines as explained in the a...

Страница 13: ...APPENDIX Recommendations for handling the Bronkhorst DLI CEM system Vacuum system Non Vacuum system ...

Страница 14: ...BRONKHORST 1 ...

Страница 15: ...etween process gas source and gas MFC Give setpoint 0 to LFM 6 closes Open valve 9 briefly for some seconds A5 Pump down liquid supply Open 3 for some time close 3 A6 Pressurize liquid supply Close 1 give right pressure on inert gas supply Open 2 open 3 briefly A7 Fill the system with liquid 1 Let gas flow in the carrier gas line during filling of the system Close 7 Open 5 briefly allow mixing val...

Страница 16: ... use Proceed according to B E To empty and purge the system 3 4 Procedure Actions E1 Follow procedure How to leave system overnight until leave system unused See D1 and D2 E2 Purge liquid out of lines Open 4 and 7 E3 Purge lines with inert gas Close 1 Open 2 briefly for some time E4 Evacuate liquid lines cont Close 2 open 1 E5 Optional Repeat last two steps for a few times 1 Make sure that the car...

Страница 17: ...ol valve 8 opens Give setpoint 0 to liquid flow controller Purge for a long time A2 Pressurize liquid supply Close 4 give right pressure on inert gas supply Open 3 A3 Fill the system with liquid 1 Let gas flow in the carrier gas line during filling of the system Open 5 briefly allow mixing valve 6 to fill Wait until all gas bubbles left the system then close 7 A4 The system is now ready for use 1 ...

Страница 18: ...rocedure Actions E1 Follow procedure How to leave system overnight until leave system unused See D1 and D2 E2 Purge liquid out of lines Open 4 and 7 open 2 E3 Purge lines with inert gas Purge for long time E4 Optional Purge with inert liquid Connect inert liquid to inert gas supply Proceed according to E2 E5 Optional Alter E3 and E4 for a few times 1 Make sure that the carrier gas is always flowin...

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