BRONKHORST CEM, Инструкция по эксплуатации

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Appendix , page 3
Startup using Vacuum
A) To fill the system:
Procedure: Actions:
A1) Evacuate the lines “Vacuum” Start pumps
A2) Evacuate all lines Close: 2,3,5,10 and 9.
Connect inert gas on carrier gas inlet.
Open : 1,4,7,11.
Give setpoint to gas and liquid control
(the control valves 6 and 8 open).
Pump for a long time.
Remark: if the system is not completely
dry follow procedure of E3, E4, (E5).
A3) Purge line between inert gas source and
valve 2.
Close: 4.
Open valve 2 briefly for some seconds.
A4) Purge line between process gas source and
gas MFC.
Give setpoint = 0 to LFM (6 closes).
Open valve 9 briefly for some seconds.
A5) Pump down liquid supply. Open 3 for some time, close 3.
A6) Pressurize liquid supply. Close 1, give right pressure on inert gas
supply. Open 2, open 3 briefly.
A7) Fill the system with liquid.
(1)
Let gas flow in the carrier gas line during
filling of the system.
Close 7.
Open 5 briefly, allow mixing valve 6 to fill.
A8) Optional: degassing mixing valve. Open 7, a needle valve will be best, to
avoid too much liquid be pumped away.
A9) The system is now ready for use.
Vacuum
Liquid
1
4
3 5
6
8
10 11
9
MFC
Carrier
Processgas
Vacuum
7
LFM
Inertgassupply
2
Process
Vacuum
Valve
Heatedline
CEM
Liquid Gas