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Jun 01
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5
MAINTENANCE
5.1
Introduction
The maintenance operations for the EXT555H
Turbomolecular pumps are described in the
following sections. The inlet-screen, the WCX
water-cooler accessory, the inlet-strainer and inlet-
flange seals are available as spares (refer to
Section 7). Fit the ISX inlet-screen as described in
Section 3.3.1. Fit the WCX water-cooler as
described in Section 3.7.3.
5.2
Bearing maintenance
When supplied, the pump contains sufficient
lubricant to supply the bearings for life. No routine
maintenance is therefore required between bearing
replacements. The bearings are not user-
serviceable. The bearings will need to be replaced
when they reach the end of their service life. This is
typically more than 20,000 hours, but may be less;
this depends on the type of pumping duty on which
the pump is used.
When the bearings need replacement, we
recommend that you exchange your pump for a
factory reconditioned replacement. Alternatively,
you can send your pump to an Edwards Service
Centre to have the bearings replaced.
When you return EXT555H pumps to Edwards
Service Centres please use the procedure included
at the end of this manual.
WARNING
Allow the pump-rotor to stop, then
disconnect the EXC Controller
before you remove the pump from
your vacuum system for maintenance
or fault-finding procedures.
5.3
Clean the pump
If the EXT555H pump is contaminated inside, it may
not be possible to achieve the specified ultimate
vacuum, or pump-down time may increase. The
pump should be returned to a BOC Edwards Service
Centre where the pump will be dismantled and
cleaned. Use the procedure included at the end of
this manual.
You can use any organic solvent to clean the
external surfaces of your pump. We recommend
that you use non-CFC solvents, such as isopropanol
or ethanol. Use a cleaning solution which is suitable
for the contaminants on the pump surfaces.
For environmental reasons, keep wastage of
cleaning solutions and solvents to a minimum.
5.4
Fault finding
Refer to Table 8 for the possible causes of faults and
for the recommended actions to rectify faults.
Table 8 is applicable to a basic, manually controlled
pumping system with an EXC Controller configured
for local (manual) operation.
Note that if you use an EXC Controller configured
for remote operation to control the EXT555H
pump, or if you use an EXDC Pump Drive Module
to control the EXT555H pump, some of the checks
and actions in Table 8 may not apply to your system.
CAUTION
Do not attempt to clean any parts of the pump
other than external surfaces. Use of solvents may
damage internal pump components.
WARNING
Clean the external surfaces of the
pump in a well-ventilated location.
When you use cleaning solutions and
solvents to clean the pump, observe
all precautions specified by the
manufacturer. Avoid inhalation of any
particulates which may be present in
the pump.
Содержание EXT555H
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