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BOC Edwards EXT555H, Инструкция по эксплуатации

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Issue A

Jun 01

PAGE

10

EXT555H

IN
STALL

A

TION

10

Figure 1 - Typical pumping system

1. Alternative position for 

vent-valve

2. Vacuum system

3. High-vacuum gauge

4. Inlet-screen

5. EXT pump

6. Backing valve

7. Vacuum gauge

8. Flexible bellows

9. Foreline trap

10. Rotary backing pump

11. Mist filter

12. Cooling water connectors

13. EXC controller

14. Air cooler

15. PRX10 purge restrictor

16. Regulated purge gas supply

17. Vent-valve

Содержание EXT555H

Страница 1: ...NRA 266 880 Issue A Original 98 37 EC 89 336 EEC 73 023 EEC Instruction Manual EXT555H...

Страница 2: ......

Страница 3: ...3 2 Inlet connection 11 3 3 3 Backing connection 11 3 3 4 Interstage connection Hi pump variants only 13 3 4 Vent options vent valve connection and control 13 3 5 Purge gas connection 15 3 5 1 Connect...

Страница 4: ...and conflat only 30 7 4 6 FL20K foreline trap 31 7 4 7 TAV vent valve and vent port adaptor 31 7 4 8 ACX air cooler 31 7 4 9 WCX water cooler 32 7 4 10 Vibration isolators 32 7 4 11 PRX purge restrict...

Страница 5: ...flange seals 28 12 EXC controller 28 13 Pump to controller cable 30 14 EXDC drive modules 30 15 BX bakeout band 30 16 FL20K foreline trap 31 17 TAV vent valve and vent port adaptor 31 18 ACX air coole...

Страница 6: ...Issue A Jun 01 EXT555H PAGE iv iv This page intentionally blank...

Страница 7: ...ase obey these instructions The use of warnings and cautions is defined below In accordance with the recommendations of EN61010 the following warning symbols may appear on the pump or its accessories...

Страница 8: ...Issue A Jun 01 EXT555H PAGE 2 2 This page intentionally blank...

Страница 9: ...NING Vent dangerous gases and gas mixtures safely Do not expose people to these gases WARNING Do not use EXT555H pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose WAR...

Страница 10: ...do not contact your supplier you may invalidate the warranty on the pump The pumps are not suitable for pumping aggressive or corrosive gases 2 2 2 Pumps with gas purge When purged with an inert gas...

Страница 11: ...ification 2 5 Water cooling The following water cooling specification corresponds to a typical high quality drinking water specification Check with your water supply authority if you are in doubt abou...

Страница 12: ...EXT555H Notes Mass EXT555H ISO160 13 4 kg Mass EXT555H DN160CF 21 2 kg Main inlet flange DN160ISO K DN160CF Outlet flange DN25NW Interstage port Hi variants DN25NW Vent port 1 8 inch BSP Purge port 1...

Страница 13: ...ater cooling at 15 C 3 x 10 4 mbar Water cooling while pumping high concentrations of argon is not recommended Maximum continuous backing pressure light gas pumping Forced air cooled 30 C ambient 12 m...

Страница 14: ...se level at 1 metre 60 dBA Recommended controllers EXC250 EXC300 EXDC160 Quiescent power consumption 35 W Pumping speeds are without inlet screen or inlet strainer EXT555Hi Inlet screens and inlet str...

Страница 15: ...all packing materials for use should you return the pump for service WARNING The EXT555H DN160CF pump variant weighs 21 kg Take care when handling the pump and ensure that you grip it firmly by the in...

Страница 16: ...vent valve 2 Vacuum system 3 High vacuum gauge 4 Inlet screen 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 Mist filter 12 Cooling water connec...

Страница 17: ...e and further damage to equipment If the inlet flange of the EXT555H is not connected to a rigid firmly fixed vacuum system ensure that the base of the pump is fixed to a firm support Remove the four...

Страница 18: ...Issue A Jun 01 PAGE 12 EXT555H INSTALLATION 12 Figure 2 Diagram of inlet screen remove screws A in order to remove the inlet screen Do not remove screws B...

Страница 19: ...when the rotational speed of the EXT555H pump has fallen to 50 of full rotational speed If you use a TAV vent valve or other solenoid vent valve you should only use the vent valve to vent the pump fr...

Страница 20: ...Issue A Jun 01 PAGE 14 EXT555H INSTALLATION 14 Figure 3 Maximum rate of pressure rise when venting...

Страница 21: ...lectrically bond the EXT555H pump to earth ground using the earth ground screw provided on the pump item 5 Figure 4 to ensure that the pump complies with EN61010 Always make the electrical connections...

Страница 22: ...1 PAGE 16 EXT555H INSTALLATION 16 Figure 4 Dimensions and features of EXT555H pumps 1 Backing port NW25 2 Interstage port Hi variants NW25 3 Electrical supply connector 4 Vent valve 5 Earth bond point...

Страница 23: ...ransfer paste between the water cooling accessory and the turbo pump body CAUTION Where possible if you need to pump argon you should avoid water cooling the pump in order to avoid excessive thermal g...

Страница 24: ...Issue A Jun 01 EXT555H PAGE 18 18 This page intentionally blank...

Страница 25: ...This can be used to allow system pressure to increase where this suits a particular process However you should not run the pump in this mode for long periods of time as the pump is not designed to be...

Страница 26: ...s so that the pump will reach ultimate vacuum in the shortest possible time If you heat the pump this will also prevent condensation of vapours inside the pump You can use the Edwards BX bakeout band...

Страница 27: ...g procedures 5 3 Clean the pump If the EXT555H pump is contaminated inside it may not be possible to achieve the specified ultimate vacuum or pump down time may increase The pump should be returned to...

Страница 28: ...rrectly made refer to the instruction manual supplied with the EXC Controller Check that the pump to controller lead is connected If all the above checks are OK then consult BOC Edwards or your suppli...

Страница 29: ...he cooling to the pump or decrease the gas load Does the rotor rotate freely If not the EXT pump bearings are damaged Consult Edwards or your supplier The EXC Controller trips into Fail all the speed...

Страница 30: ...the same as the resonant frequency of the attached system If so change the natural frequency of your system or isolate the pump using flexible bellows Is the vibration being transmitted from the rota...

Страница 31: ...ed in Section 3 4 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the EXT555...

Страница 32: ...Issue A Jun 01 EXT555H PAGE 26 26 This page intentionally blank...

Страница 33: ...e exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide BOC Ed...

Страница 34: ...ange seals 7 3 3 Inlet flange seals EXT pumps are supplied with an inlet seal The Item Numbers of replacement seals are given below 7 4 Accessories 7 4 1 Installation The accessories available for use...

Страница 35: ...Inlet flange seal supplied 4 Inlet screen fitted 5 EXT555H pump 6 TAV solenoid vent valve 7 DN10NW adaptor 8 Manual vent valve fitted 9 VRX vent restrictor 10 Vent port supplied with manual vent valve...

Страница 36: ...le 7 4 4 EXDC drive modules Fit an EXDC Drive Module as an alternative to an EXC Controller and pump to controller cable Drive module Item Number EXDC160 D396 41 000 Table 14 EXDC drive modules 7 4 5...

Страница 37: ...fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on your vacuum system The vent port adaptor a...

Страница 38: ...size Inlet flange size Item Number DN160ISO K B581 25 000 DN160CF K B581 10 000 Table 20 Vibration isolators 7 4 11 PRX purge restrictor A modified DN10NW centring ring is available to filter the pur...

Страница 39: ...or to restrict the flow of vent gas into the EXT pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Vent restrictor Orifice diameter mm Item Number VRX10 0 1...

Страница 40: ...Issue A Jun 01 EXT555H PAGE 34 34 This page intentionally blank...

Страница 41: ...y and then complete the Declaration HS2 3 Remove all traces of dangerous gases pass an inert gas through the equipment and any accessories which will be returned to your supplier Drain all fluids and...

Страница 42: ...equipment that is contaminated with radioactive substances unless you Decontaminate the equipment Provide proof of decontamination YOU MUST CONTACT YOUR SUPPLIER FOR ADVICE BEFORE YOU RETURN SUCH EQUI...

Страница 43: ......

Страница 44: ...dwards Shuwa Shiba Park Building A 3F 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Tel 81 0 3 5470 6530 Fax 81 0 3 5470 6521 OSAKA 81 0 6 6384 7052 Fax 81 0 6 6384 7504 KYUSHU 81 0 96 326 7300 Fax 8...

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