①
When the Power is on, X &Y levels are within 0.08
micron.
②
After 180 degree rotation, X& Y levels stay within 0.08
micron.
↓
See Page 9→
①
When the Power is on, X &Y levels are within 0.08
micron.
②
After 180 degree rotation, 1 of X& Y levels is out of
0.08 micron. Red LED is blinking.
↓
See Page 6→
How to check levels in Low Mode
Cas
e 1
Ca
se
2
How to check levels in High Mode
Rotate 180
degrees
Rotate 180
degrees
Red LED is blinking
Red LED is blinking
Ca
se
3
Red LED is on
①
When the Power is on, 1 of X &Y levels are out of
0.08 micron. Red LED is blinking.
↓
See Page 6→
How to check levels in Low Mode
How to calibrate in High Mode
