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2021.08.19 

• 

REV. 1 

• MASS FLOW METER OPERATING MANUAL

 25

Gas List by Number

To use any of these gases in your device, use Gas Select™ (

page 13

).

#

Short 

Name

Long 

Name

0

Air

Air (Clean Dry)

1

Ar

Argon

2

CH4

Methane

3

CO

Carbon Monoxide

4

CO2

Carbon Dioxide

5

C2H6

Ethane

6

H2

Hydrogen

7

He 

Helium

8

N2

Nitrogen

9

N2O

Nitrous Oxide

10

Ne

Neon

11

O2

Oxygen

12

C3H8

Propane

13

nC4H10

Normal Butane

14

C2H2

Acetylene

15

C2H4

Ethylene (Ethene)

16

iC4H10

Isobutane

17

Kr

Krypton

18

Xe

Xenon

19

SF6

Sulfur Hexafluoride

1

20

C-25

25% CO2, 75% Ar

21

C-10

10% CO2, 90% Ar

22

C-8

8% CO2, 92% Ar

23

C-2

2% CO2, 98% Ar

24

C-75

75% CO2, 25% Ar

25

He-25

25% He, 75% Ar

26

He-75

75% He, 25% Ar

27

A1025

90% He, 7.5% Ar, 2.5% CO2

28

Star29

Stargon CS (90% Ar, 

8% CO2, 2% O2)

29

P-5

5% CH4, 95% Ar

30

NO

Nitric Oxide

2

31

NF3

Nitrogen Trifluoride

2

32

NH3

Ammonia

2

33

Cl2

Chlorine

2

34

H2S

Hydrogen Sulfide

2

35

SO2

Sulfur Dioxide

2

36

C3H6

Propylene

2

80

1Buten

1-Butylene

2

81

cButen

Cis-Butene (cis-2-Butene)

2

82

iButen

Isobutene

2

83

tButen

Trans-2-Butene

2

84

COS

Carbonyl Sulfide

2

85

DME

Dimethylether (C2H6O)

2

86

SiH4

Silane

2

100

R-11

Trichlorofluoromethane 

(CCl3F)

2

,

³

#

Short 

Name

Long 

Name

101

R-115

Chloropentafluoroethane 

(C2ClF5)

2

,

³

102

R-116

Hexafluoroethane (C2F6)

2

103

R-124

Chlorotetrafluoroethane 

(C2HClF4)

2

,

³

104

R-125

Pentafluoroethane (CF3CHF2)

2

,

³

105

R-134A

Tetrafluoroethane (CH2FCF3)

2

,

³

106

R-14

Tetrafluoromethane (CF4)

2

107

R-142b

Chlorodifluoroethane 

(CH3CClF2)

2

,

³

108

R-143a

Trifluoroethane  (C2H3F3)

2

,

³

109

R-152a

Difluoroethane (C2H4F2)

2

110

R-22

Difluoromonochloromethane 

(CHClF2)

2

,

³

111

R-23

Trifluoromethane (CHF3)

2

,

³

112

R-32

Difluoromethane (CH2F2)

2

,

³

113

R-318

Octafluorocyclobutane (C4F8)

2

114

R-404A

44% R-125, 4% R-134A, 

52% R-143A

2

,

³

115

R-407C

23% R-32, 25% R-125, 

52% R-143A

2

,

³

116

R-410A

50% R-32, 50% R-125

2

,

³

117

R-507A

50% R-125, 50% R-143A

2

,

³

140

C-15

15% CO2, 85% Ar

141

C-20

20% CO2, 80% Ar

142

C-50

50% CO2, 50% Ar

143

He-50

50% He, 50% Ar

144

He-90

90% He, 10% Ar

145

Bio5M

5% CH4, 95% CO2

146

Bio10M

10% CH4, 90% CO2

147

Bio15M

15% CH4, 85% CO2

148

Bio20M

20% CH4, 80% CO2

149

Bio25M

25% CH4, 75% CO2

150

Bio30M

30% CH4, 70% CO2

151

Bio35M

35% CH4, 65% CO2

152

Bio40M

40% CH4, 60% CO2

153

Bio45M

45% CH4, 55% CO2

154

Bio50M

50% CH4, 50% CO2

155

Bio55M

55% CH4, 45% CO2

156

Bio60M

60% CH4, 40% CO2

157

Bio65M

65% CH4, 35% CO2

158

Bio70M

70% CH4, 30% CO2

159

Bio75M

75% CH4, 25% CO2

160

Bio80M

80% CH4, 20% CO2

161

Bio85M

85% CH4, 15% CO2

162

Bio90M

90% CH4, 10% CO2

163

Bio95M

95% CH4, 5% CO2

164

EAN-32

32% O2, 68% N2

165

EAN-36

36% O2, 64% N2

166

EAN-40

40% O2, 60% N2

167

HeOx20

20% O2, 80% He

168

HeOx21

21% O2, 79% He

169

HeOx30

30% O2, 70% He

170

HeOx40

40% O2, 60% He

171

HeOx50

50% O2, 50% He

172

HeOx60

60% O2, 40% He

#

Short 

Name

Long 

Name

173

HeOx80

80% O2, 20% He

174

HeOx99

99% O2, 1% He

175

EA-40

Enriched Air-40% O2

176

EA-60

Enriched Air-60% O2

177

EA-80

Enriched Air-80% O2

178

Metab

Metabolic Exhalant (16% O2, 

78.04% N2, 5% CO2, 0.96% Ar)

179

LG-4.5

4.5% CO2, 13.5% N2, 82% He

180

LG-6

6% CO2, 14% N2, 80% He

181

LG-7

7% CO2, 14% N2, 79% He

182

LG-9

9% CO2, 15% N2, 76% He

183

HeNe-9

9% Ne, 91% He

184

LG-9.4

9.4% CO2, 19.25% N2, 71.35% He

185

SynG-1

40% H2, 29% CO, 20% 

CO2, 11% CH4

186

SynG-2

64% H2, 28% CO, 1% 

CO2, 7% CH4

187

SynG-3

70% H2, 4% CO, 25% 

CO2, 1% CH4

188

SynG-4

83% H2, 14% CO, 3% CH4

189

NatG-1

93% CH4, 3% C2H6, 1% 

C3H8, 2% N2, 1% CO2

190

NatG-2

95% CH4, 3% C2H6, 

1% N2, 1% CO2

191

NatG-3

95.2% CH4, 2.5% C2H6, 

0.2% C3H8, 0.1% C4H10, 

1.3% N2, 0.7% CO2

192

CoalG

50% H2, 35% CH4, 

10% CO, 5% C2H4

193

Endo

75% H2, 25% N2

194

HHO

66.67% H2, 33.33% O2

195

HD-5

LPG: 96.1% C3H8, 1.5% C2H6, 

0.4% C3H6, 1.9% n-C4H10

196

HD-10

LPG: 85% C3H8, 10% 

C3H6, 5% n-C4H10

197

OCG-89

89% O2, 7% N2, 4% Ar

198

OCG-93

93% O2, 3% N2, 4% Ar

199

OCG-95

95% O2, 1% N2, 4% Ar

200

FG-1

2.5% O2, 10.8% CO2, 

85.7% N2, 1% Ar

201

FG-2

2.9% O2, 14% CO2, 

82.1% N2, 1% Ar

202

FG-3

3.7% O2, 15% CO2, 

80.3% N2, 1% Ar

203

FG-4

7% O2, 12% CO2, 80% N2, 1% Ar

204

FG-5

10% O2, 9.5% CO2, 

79.5% N2, 1% Ar

205

FG-6

13% O2, 7% CO2, 79% N2, 1% Ar

206

P-10

10% CH4 90% Ar

210

D-2

Deuterium

Sulfur hexafluoride is a highly potent greenhouse 

gas monitored under the Kyoto Protocol.

2

 

Corrosive-resistant units only

3

 

Under the Montreal Protocol and Kigali Amendment, the 

production and consumption of these ozone-depleting 

substances (ODS) is being or has been phased out. 

It is recommended you ensure compliance with this 

universally ratified treaty before attempting to use 

these gases, in addition to R113, R-123, and R-141b.

Содержание M

Страница 1: ...OPERATING MANUAL FOR MASS FLOW METERS Models M MQ MS MW MB MBQ MBS MWB ...

Страница 2: ...ces in Electrical and Electronic Equipment RoHS Directive 2011 65 EU This device complies with the requirements of the Low Voltage Directive 2014 35 EU and the EMC Directive 2014 30 EU and carries the CE Marking accordingly This device complies with the requirements of the European Union s Waste Electrical Electronic Equipment WEEE Directive 2002 96 EC DOC MANUAL M Apex Rev 1 2021 08 19 ...

Страница 3: ...light page 17 Change your STP standard temperature and pressure to match any standard temperature and pressure reference page 15 Connection to a computer for control and data logging to capture all pressure data for logging and analysis page 18 This manual covers the following instruments Gas mass flow meters High pressure gas mass flow meters Anti corrosive gas mass flow meters Low pressure drop ...

Страница 4: ... Reference Values 15 Flow and Pressure Averaging 15 Zero Band 15 Configuring Serial Communications 16 Unit ID 16 Modbus RTU Address 16 Baud Rate 16 Display Setup 17 Main Screen Options 17 Screen Lighting 17 Display Rotation 17 Advanced Setup 17 Serial Communication 18 Modbus RTU Communication 18 Establishing Communication 18 Polling Mode 18 Streaming Mode 19 Taring 19 Collecting Data 19 Using Gas ...

Страница 5: ...l configuration of a standard mass flow meter Your device s appearance and process connections may differ See page 12 DT for more examples Backlight The monochrome display comes equipped with a backlight To toggle the backlight power press the logo on the front of your device For optional color TFT displays pressing this button will turn off the display to conserve power See page 11 Maintenance an...

Страница 6: ...ocked MOV Mass flow over range of device OVR Totalizer rolled over to zero POV Pressure over range of device TMF Totalizer missed out of range flow TOV Temperature over range of device VOV Volumetric flow over range of device Mounting Flow meters do not require straight runs of pipe upstream or downstream Most flow meter models can be mounted in any position including upside down Corrosive resista...

Страница 7: ...tream Connecting Your Gas Flow Meter Your flow meter can measure flow generated by positive pressure and or suction Connect the meter so that the flow travels in the same direction as the flow arrow usually from left to right from the front of the device Warning Using the flow meter above the maximum specified common mode or differential pressure will result in permanent damage to the internal pre...

Страница 8: ...r meter through either the power jack or the multi pin connector on top of your device Note Power requirements vary based on analog configuration and valve type Please reference the associated specification sheet for power requirements Standard 8 Pin Mini DIN Pinout Pin Function 1 Not Connected Optional 4 20 mA primary output signal 2 Static 5 12 Vdc Optional secondary analog output 4 20 mA 0 5 Vd...

Страница 9: ...ll resume when the switch is released You can also tare with the front controls page 11 or serial commands page 19 This should only be done in a true zero flow condition Option Second Analog Output Signal The default 8 pin Mini DIN connector places the secondary analog output on pin 2 for both voltage and current signals Your device s secondary analog signal may differ from its primary output sign...

Страница 10: ...solute pressure reading can also be tared when the device is exposed to the local barometric pressure How to Tare Taring Flow MENU TARES TARE FLOW Flow tares should take place at the expected process pressure with no flow A message ENSURE NO FLOW BEFORE PRESSING TARE will be displayed Press TARE to complete the taring process Optional Taring Pressure MENU TARES TARE PRESS Absolute pressure tares r...

Страница 11: ... the instrument since its last reset similar to a gasoline pump TOTAL TIMER toggles between totalized flow and elapsed time as the highlighted parameter in the center SLPM or another measurement of mass flow displays the live flow rate Press to change engineering units Optional M AVG or V AVG Shows totalizer averaging which displays average flow rate since last reset updated live SL in this exampl...

Страница 12: ...the device SW Firmware version Display SW color displays only Firmware version of the display Device Full Scale Ranges ABOUT Full Scale Ranges This displays the maximum calibrated range of available flow and pressure readings Most will include mass flow volumetric flow and absolute pressure Devices equipped with an optional barometer will also show gauge and barometric pressures Manufacturer Infor...

Страница 13: ... Mixes SETUP Active Gas COMPOSER Mixes To provide accurate measurements your flow meter needs to reference the viscosity of the gas you are flowing through it The closer you can get to defining your actual gas composition the more accurate your flow readings will be COMPOSER is an included feature of Gas Select that lets you define new mixed gas compositions to reconfigure your flow meter whenever...

Страница 14: ... gas COMPOSER can change the gas percentage to fill the remaining portion to 100 by selecting the component gas then selecting Set to Balance Once the gases total 100 the mixture can be saved be selecting Save Mix Selecting BACK will permanently discard the mix After a few gases have been added the list will push the menu to a second page use the PAGE button to see the remaining list Viewing Delet...

Страница 15: ... for STP and NTP calculations Unless otherwise requested your flow meter ships with a default STP of 25 C and 1 atm which affects flow units beginning with S and an NTP of 0 C and 1 atm which affects flow units beginning with N Warning Changes to STP or NTP references will alter your mass flow readings Flow and Pressure Averaging SETUP Sensor Flow Averaging SETUP Sensor Pressure Averaging Averagin...

Страница 16: ...en you select SET If you select as the Unit ID the flow meter will enter streaming mode when you exit the menu page 19 Modbus RTU Address SETUP RS 232 Serial or RS 485 Serial Modbus Address The Modbus address is the identifier that a computer or programmable logic computer PLC uses to distinguish your device from other devices when connected to a Modbus network Values of 1 247 are available for us...

Страница 17: ...to adjust the brightness level and move the brightness indicator left or right Display Rotation SETUP Display Display Rotation The device has the option of inverting flipping the screen upside down as configured in this menu Advanced Setup MENU SETUP Advanced The advanced setup menu contains settings and detailed information that are useful when troubleshooting with customer support Factory Restor...

Страница 18: ...ttings Baud 19200 by default others can be used if the computer computer software and the meter are all set to the same rate Data bits 8 Parity none Stop bits 1 Flow control none Communication Programs Although the device will communicate with any compatible terminal program over RS 232 PuTTy is a common option A USB port or COM port will not supply enough power to your device to function Please u...

Страница 19: ...n The default streaming interval is 50 ms but this can be increased by changing Register 91 while the device is in polling mode Set streaming interval unit ID w91 number of ms Example aw91 500 streams new data every 500 ms Taring Before collecting flow data be sure to tare your meter Manual taring can be accomplished through two separate commands for flow and pressure Taring flow sets the zero flo...

Страница 20: ... or hyphen only This is equivalent to the short name when creating a mix via the front panel page 14 Mix Number Choose a number from 236 to 255 If a user mix with that number already exists it will be overwritten Use the number 0 to assign the next available number to your new gas Gas numbers are assigned in descending order from 255 Gas1 Gas1 Number For each gas enter its molar percentage up to 2...

Страница 21: ... live data frame unit ID Begin streaming data unit ID Stop streaming data desired unit ID Set streaming interval unit ID w91 of ms Query gas list info unit ID g Choose a different gas unit ID g Gas Number New COMPOSER mix unit ID gm Mix Name Mix Gas1 Gas1 Gas2 Gas2 Delete COMPOSER mix unit ID gd Mix Query live data info unit ID d Manufacturer info unit ID m Firmware version unit ID m9 or ave Lock ...

Страница 22: ...cks out keep using it but tell us about the drop at your next annual recalibration so we can check it out for you Issue How can I see readings in different units Action From the main menu select SETUP Sensor Engineering Units From this menu you can adjust any variable s units For more information see page 15 Flow Readings Issue The live flow readings won t settle down Action The device is very fas...

Страница 23: ... the COM number matches the one your software is using to connect to the flow meter 5 On the external serial communications device computer PLC etc be sure that the flow control handshaking settings are set as on page 18 Still experiencing issues Please contact support page 12 12 Maintenance Cleaning Your flow meter does not require cleaning provided that it has been flowing clean dry gas If neces...

Страница 24: ...et per minute count count count Setpoint count 0 64000 Percent of full scale Pressure Units Absolute or Barometric Gauge Notes PaA PaG Pascal hPaA hPaG Hectopascal kPaA kPaG Kilopascal MPaA MPaG Megapascal mbarA mbarG Millibar barA barG Bar g cm2A g cm2G Gram force per square centimeter kg cm2A kg cm2G Kilogram force per square centimeter PSIA PSIG Pound force per square inch PSFA PSFG Pound force...

Страница 25: ...o30M 30 CH4 70 CO2 151 Bio35M 35 CH4 65 CO2 152 Bio40M 40 CH4 60 CO2 153 Bio45M 45 CH4 55 CO2 154 Bio50M 50 CH4 50 CO2 155 Bio55M 55 CH4 45 CO2 156 Bio60M 60 CH4 40 CO2 157 Bio65M 65 CH4 35 CO2 158 Bio70M 70 CH4 30 CO2 159 Bio75M 75 CH4 25 CO2 160 Bio80M 80 CH4 20 CO2 161 Bio85M 85 CH4 15 CO2 162 Bio90M 90 CH4 10 CO2 163 Bio95M 95 CH4 5 CO2 164 EAN 32 32 O2 68 N2 165 EAN 36 36 O2 64 N2 166 EAN 40 ...

Страница 26: ... N2 1 0 Ar 10 O2 9 5 CO2 79 5 N2 1 0 Ar 13 O2 7 0 CO2 79 N2 1 0 Ar Laser Gas Mixes 4 5 CO2 13 5 N2 82 He 6 0 CO2 14 N2 80 He 7 0 CO2 14 N2 79 He 9 0 CO2 15 N2 76 He 9 4 CO2 19 25 N2 71 35 He 9 0 Ne 91 He Fuel Gas Mixes Coal Gas 50 H2 35 CH4 10 CO 5 C2H4 Endothermic Gas 75 H2 25 N2 HHO 66 67 H2 33 33 O2 LPG HD 5 96 1 C3H8 1 5 C2H6 0 4 C3H6 1 9 n C4H10 LPG HD 10 85 C3H8 10 C3H6 5 n C4H10 Natural Gas...

Страница 27: ...5 Vdc or 0 10 Vdc output signal 7 Power In 8 Ground common for power digital communications analog signals and alarms Warning Do not connect power to pins 1 through 6 as permanent damage can occur It is common to mistake pin 2 labeled 5 12 Vdc Output as the standard 0 5 Vdc analog output signal Pin 2 is normally a constant 5 12 Vdc Locking Industrial Connector Pinout Pin Function 1 Power In 2 RS 2...

Страница 28: ...NC Ground Ground 2 Analog Out Analog Out Analog Out RX or A Analog Out NC Analog Out 3 Ground Analog In NC NC NC NC NC 4 NC Ground NC NC NC Analog Out NC 5 Power In Ground Power In Ground Ground Power In Ground 6 NC Ground NC Analog Out NC NC NC 7 NC Power In NC Ground Power In Analog In NC 8 Analog In TX or B Analog In NC Analog In NC5 Analog In 9 Ground Ground Ground NC Analog Out 2 Ground Groun...

Страница 29: ...l RS 485 A 4 Remote tare ground to tare Remote tare ground to tare 5 Serial RS 232 TX signal Optional RS 485 B Serial RS 232 TX Signal Optional RS 485 B 6 Static 5 12 Vdc Optional Secondary analog output 4 20 mA 0 5 Vdc 1 5 Vdc 0 10 Vdc or basic alarm 0 5 Vdc Output Signal Optional 1 5 or 0 10 Vdc 7 Ground common for power digital communi cations analog signals and alarms Power in 8 Inactive Optio...

Страница 30: ......

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