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4. Operation
Be sure to use the procedure below to start up or shut down the pump.
・
When you do not use air-flush device,
proceed 4.1 Standard operation [page 21].
・
When you use air-flush device,
proceed 4.2 Air-flush operation [page 22].
WARNING
Danger of explosion and ignition
Do not evacuate gas which is hazardous to humans or explosive, flammable, or
corrosive. Do not evacuate with substances containing chemicals, solvents, and
powders.
If done, it can cause failure or bodily injury by gas, explosion or ignition.
※
When evacuating vapor, operate in accordance with 4.2 [page 22].
Never evacuate
hazardous gas
Danger of entanglement and foreign matter dispersal
Never put finger or foreign matter into air hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2) cooling fins.
If done, it can cause bodily injury from entanglement with turning section, or foreign
matter dispersal.
Avoid foreign matter
Danger of electric shock and entanglement
Do not remove or alter safeguards or insulation parts.
If done, it can cause bodily injury from electric shock or turning section and it can cause
deteriorated performance and operating lifetime, and invalidate guarantee.
Never alter
Danger of failure and bodily injury
Change air-flush port only after vacuum pump is stopped.
If you change it during vacuum pump operation, it can cause vacuum pump failure and
bodily injury.
Change after
vacuum pump is
stopped
Finger, foreign matter
Cooling fan
Air hole of fan guard
Clearance between FS(1) and FS(2)
cooling
fins
Finger, foreign matter
Содержание ISP-50
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Страница 29: ...27 7 Disposal When a vacuum pump is disposed please comply with local law such as the Waste Disposal Law...
Страница 31: ...29 8 2 Dimensions 8 2 1 ISP 50 SV1...
Страница 32: ...30 8 3 Performance data...
Страница 33: ...memo...