4-4 | DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE
ture needed to maintain a pressure of 10
-5
Torr in the quadrupole region.
Aperture Size (microns) = 50/(sample chamber pressure)
.5
aperture Size
pressure Ratio
max. Sample
(Microns)
Chamber Pressure (Torr)
2
6.0 x 10
7
600
5
1.0 x 10
7
100
10
2.5 x 10
6
25
20
6.0 x 10
5
6
50
1.0 x 10
5
1
100
2.5 x 10
4
.25
200
6.0 x 10
3
6.0 x 10
-2
500
1.0 x 10
3
1.0 x 10
-2
1000
2.5 x 10
2
2.5 x 10
-3
No Aperture
70
7.0 x 10
-4
Figure 4-3.
pressure reduction
ratios for aperture
inlet diameters.
Содержание Dycor 100 AMU Multiplier
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