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Technical Information
Exchange of the High Voltage Feedthrough
5
VacIon Plus 300 pumps User Manual
/
87-900-103-01 (H)
87/98
Exchange of the High Voltage Feedthrough
CAUTION!
The high voltage feedthrough contains a ceramic insulator that can be damaged
if excessive force is applied in torque, in bending, or in tension. When installing
or removing the feedthrough, the applied torque should not exceed 2 Nm. Rotate
the feedthrough gently when making the threaded connection to avoid excessive
force.
1
Remove the 6 bolts of the Mini-ConFlat flange connection
(see Fig. 23).
2
Remove the cable connection disc.
3
Gently relieve the feedthrough from the metal gasket connection
and turn the feedthrough counterclockwise until it is completely
detached from the internal high voltage threaded connection.
4
Replace the feedthrough and the copper gasket, making sure that
the feedthrough is connected to the pumps internal connector.
Check that the feedthrough is not shorted.
5
Bake out the pump while it is operating, and leave it to cool
down; then verify that the base pressure is below 10
-9
mbar.
Figure 23
High voltage feedthrough connection
Содержание 9191610
Страница 3: ...VacIon Plus 300 VacIon Plus 300 pumps User Manual 87 900 103 01 H 3 98 VacIon Plus 300...
Страница 4: ...VacIon Plus 300 4 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Страница 8: ...Contents 8 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Страница 20: ...1 Procedura per l installazione Smaltimento 20 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Страница 32: ...2 Anleitung zur Installation Entsorgung 32 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Страница 44: ...3 Proc dure pour l installation Mise au rebut 44 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Страница 56: ...4 Installation Procedure Disposal 56 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
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