Agilent Technologies 9191610 Скачать руководство пользователя страница 26

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Anleitung zur Installation

Installation

26/98

VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)

WARNUNG!

Um Personenschäden zu vermeiden, darf die Hochspannungsleitung der

Pumpe erst angeschlossen werden, wenn die Pumpe im System installiert ist

und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind.

Der Pumpenbetrieb wird nur durch den Einsatz speziell dafür
vorgesehener Agilent Steuereinheiten optimiert.

VORSICHT!

Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur

bei Verwendung von Agilent Steuereinheiten gewährleistet.

FALSCH!

Содержание 9191610

Страница 1: ...ps Models 9191610 1620 1640 9191611 1621 1641 9191612 1622 1642 9191650 1660 1680 9191651 1661 1681 9191652 1662 1682 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 90...

Страница 2: ...nt are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prim...

Страница 3: ...VacIon Plus 300 VacIon Plus 300 pumps User Manual 87 900 103 01 H 3 98 VacIon Plus 300...

Страница 4: ...VacIon Plus 300 4 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 5: ...per l installazione 11 Installazione 13 Uso15 Procedure di uso 16 Manutenzione 18 Smaltimento 19 2 Anleitung zur Installation 21 Allgemeine Hinweise 22 Vor der Installation 23 Installation 25 Gebrauc...

Страница 6: ...al Information 46 Preparation for Installation 47 Installation 49 Use51 Operating Procedure52 Maintenance 54 Disposal 55 5 Technical Information 57 Vaclon Plus Pump Replacement Parts and Accessories 5...

Страница 7: ...Flange Connection 76 Control Unit Connection 79 Safety Interlock 80 Heater Installation 80 Heater Replacement 82 Bakeout Operation 82 Operating Procedure84 Maintenance 85 Exchange of the High Voltage...

Страница 8: ...Contents 8 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 9: ...User Manual 9 98 1 Procedura per l installazione Informazioni Generali 10 Preparazione per l installazione 11 Installazione 13 Uso 15 Procedure di uso 16 Manutenzione 18 Smaltimento 19 Traduzione dell...

Страница 10: ...utilizzate comunemente per applicazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei p...

Страница 11: ...asciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell amb...

Страница 12: ...1 Procedura per l installazione Preparazione per l installazione 12 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figura 1...

Страница 13: ...stallare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per...

Страница 14: ...lta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse Il funzionamento delle pompe ottimizzato solo con l uso delle appo...

Страница 15: ...sigillata con olio ma se deve essere utilizzata una tale pompa si raccomanda di inserire una trappola lungo la linea di vuoto per ridurre la pressione causata dai vapori di acqua e di olio provenient...

Страница 16: ...i controllo indice dell esistenza di una perdita nella pompa e nel sistema Un temporaneo incremento della pressione di pre vuoto normale durante la fase di avvio 4 Lasciare la valvola di pre vuoto ape...

Страница 17: ...mosferica usare azoto secco in modo da evitare l assorbimento di vapore acqueo da parte delle pareti della pompa AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabil...

Страница 18: ...VacIon Plus non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall alta...

Страница 19: ...a indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertant...

Страница 20: ...1 Procedura per l installazione Smaltimento 20 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 21: ...00 pumps User Manual 21 98 2 Anleitung zur Installation Allgemeine Hinweise 22 Vor der Installation 23 Installation 25 Gebrauch 27 Bedienungsschritte 28 Wartung 30 Entsorgung 31 bersetzung der Origina...

Страница 22: ...von Gas zu pumpen und ihres vibrations und wartungsfreien Betriebes allgemein f r Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen f r...

Страница 23: ...etzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz VORSICHT Um Entgasungsprobleme zu vermeiden d...

Страница 24: ...2 Anleitung zur Installation Vor der Installation 24 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Abbildung 1...

Страница 25: ...iert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht W hrend des Betriebes...

Страница 26: ...chlossen werden wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgese...

Страница 27: ...mechanische Pumpe zu verwenden Falls hingegen eine derartige Pumpe benutzt werden mu soll an der Vakuumleitung eine Falle eingesetzt werden um den durch die Wasser und ld mpfe aus der mechanischen Pu...

Страница 28: ...hert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist w hrend der Anlaufphase normal 4 W hrend des Anlaufes der Ionenpumpe soll das Vorvakuumv...

Страница 29: ...ist trockener Stickstoff zu verwenden um die Aufnahme von Wasserdampf durch die Pumpenw nde zu verhindern WARNUNG Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gase...

Страница 30: ...e VacIon Plus erfordern keine Wartung S mtliche Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden WARNUNG Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen...

Страница 31: ...ses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Enda...

Страница 32: ...2 Anleitung zur Installation Entsorgung 32 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 33: ...ual 33 98 3 Proc dure pour l installation Indications G n rales 34 Pr paration de l installation35 Installation 37 Utilisation 39 Proc dure d utilisation 40 Maintenance 42 Mise au rebut 43 Traduction...

Страница 34: ...eur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie VacIon Plus sont des pompes ioniques g n ralement utilis es pour des applications de vide ultra pouss Les paragraphes...

Страница 35: ...subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l envir...

Страница 36: ...3 Proc dure pour l installation Pr paration de l installation 36 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figure 1...

Страница 37: ...ler et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige des poussi res des gaz de combat ainsi que dans des milieux explosifs ou fort risque d incendie Pendant l...

Страница 38: ...ue celle ci soit install e dans le syst me et avant que toutes les brides d entr es soient correctement assembl es ou ferm es Le fonctionnement de la pompe n est optimis que si celle ci est utilis e a...

Страница 39: ...huile mais au cas o il serait n cessaire d utiliser une telle pompe il est recommand d introduire un dispositif de retenue le long de la ligne de vide afin de r duire la pression due aux vapeurs d eau...

Страница 40: ...nit de contr le r v le l existence d une fuite dans la pompe et dans le syst me Au cours de la phase de d marrage un accroissement momentan de la pression de pr vide est normal 4 Laisser la soupape de...

Страница 41: ...rique utiliser de l azote sec de fa on viter que les parois de la pompe n absorbent de la vapeur aqueuse AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou ra...

Страница 42: ...s pompes de la s rie VacIon Plus ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr AVERTISSEMENT Avant toute intervention sur la pompe la d brancher de la haute te...

Страница 43: ...dique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoi...

Страница 44: ...3 Proc dure pour l installation Mise au rebut 44 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 45: ...Plus 300 pumps User Manual 45 98 4 Installation Procedure General Information 46 Preparation for Installation 47 Installation 49 Use 51 Operating Procedure 52 Maintenance 54 Disposal 55 Original Instr...

Страница 46: ...cIon Plus series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following parag...

Страница 47: ...any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In or...

Страница 48: ...4 Installation Procedure Preparation for Installation 48 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figure 1...

Страница 49: ...o not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain...

Страница 50: ...ect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using one of the special Agilent...

Страница 51: ...st rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanic...

Страница 52: ...uld indicate that an unconfined flow discharge exists in the pump and system A temporary rise in roughing pressure will usually be noticed during any starting procedure 4 Allow the roughing valve to r...

Страница 53: ...When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the requi...

Страница 54: ...lus series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel WARNING Before carrying out any work on the pump disconnect it from the High...

Страница 55: ...uropean Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The...

Страница 56: ...4 Installation Procedure Disposal 56 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...

Страница 57: ...0 Diode 65 Vaclon Plus 300 Noble Diode 66 Outline Drawing 68 Stray Magnetic Field 69 VacIon Plus Pump Installation 72 Inspection Procedure 72 Visual Inspection 72 Vacuum Evaluation 73 Short Circuits 7...

Страница 58: ...keout of Vaclon Pump with the Integral Heaters83 Operating Procedure 84 Maintenance 85 Exchange of Pumping Element 86 Exchange of the High Voltage Feedthrough87 Leakage Current Check 88 High potting 8...

Страница 59: ...from bombarding the system and pump walls at starting pressures and have high speed for inert gases The VacIon Plus Diode and Noble Diode pumps require a lower starting pressure i e 10 4 mbar The tan...

Страница 60: ...60 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Fig 2 shows the VacIon Plus 300 pump Fig 3 shows the main assemblies of the pump Figure 2 VacIon Plus 300 pump Figure 3 Pump main assemblies In...

Страница 61: ...bar hours 80 000 50 000 50 000 Max starting current 400 mA Max baking current 50 mA Protect current 100 mA Operating voltage max 7000 Vdc 10 7000 Vdc 10 Maximum starting pressure mbar 1x10 2 1x10 3 Ul...

Страница 62: ...rams for the same pump The pumping speed of a newly regenerated i e baked sputter ion pump decreases during operation until it reaches a stabilized level known as saturation nominal pumping speed To s...

Страница 63: ...nformation Vaclon Plus 300 Starcell 5 VacIon Plus 300 pumps User Manual 87 900 103 01 H 63 98 Vaclon Plus 300 Starcell Figure 4 Pumping speed vs pressure for Nitrogen Figure 5 Pumping speed vs pressur...

Страница 64: ...5 Technical Information Vaclon Plus 300 Starcell 64 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figure 6 Pressure vs current diagram...

Страница 65: ...nical Information Vaclon Plus 300 Diode 5 VacIon Plus 300 pumps User Manual 87 900 103 01 H 65 98 Vaclon Plus 300 Diode Figure 7 Pumping speed vs pressure for Nitrogen Figure 8 Pressure vs current dia...

Страница 66: ...ormation Vaclon Plus 300 Noble Diode 66 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Vaclon Plus 300 Noble Diode Figure 9 Pumping speed vs pressure for Nitrogen Figure 10 Pumping speed vs pres...

Страница 67: ...Technical Information Vaclon Plus 300 Noble Diode 5 VacIon Plus 300 pumps User Manual 87 900 103 01 H 67 98 Figure 11 Pressure vs current diagram...

Страница 68: ...nformation Outline Drawing 68 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Outline Drawing The following figure shows the outline drawing for the VacIon Plus pump Figure 12 VacIon Plus pump ou...

Страница 69: ...ld strength along the centre line of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 14 15 16 17 and 18 where Bx is the magnetic field along X axis By...

Страница 70: ...formation Stray Magnetic Field 70 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figure 15 Stray magnetic field from flange along Y axis z 0 mm Figure 16 Stray magnetic field from flange along X...

Страница 71: ...nformation Stray Magnetic Field 5 VacIon Plus 300 pumps User Manual 87 900 103 01 H 71 98 Figure 17 Stray magnetic field from flange along Y axis z 100 mm Figure 18 Stray magnetic field from flange al...

Страница 72: ...e installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Inspect the pinch off seal If it is open the pump is at atmospheric pressure WA...

Страница 73: ...tage cable is proper connected to the ion pump and its power unit Make sure that the pump is well grounded 2 With the main power switch in the OFF position plug the control unit into a suitable power...

Страница 74: ...ntrol unit will be drawn and low voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector low voltage will also be observed when the high voltage con...

Страница 75: ...rest of the system if required 3 The control unit 4 A clean roughing pump i e turbo or sorption 5 A thermocouple gauge capable of indicating pressure from atmosphere to 10 3 mbar range 6 A valve to s...

Страница 76: ...bag over the ion pump flange Small pumps can be placed inside of the bag Purge the bag with clean dry nitrogen for several minutes then reach into the bag and release the internal vacuum using pliers...

Страница 77: ...rew threads Lubrication simplifies sealing and disassembly A recommended lubricant is Fel Pro C 100 NOTE Lubrication is essential to prevent galling of the nut and screw after bakeout 5 Attach the nut...

Страница 78: ...5 Technical Information Inlet Flange Connection 78 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H Figure 20 Stud mounting kit...

Страница 79: ...efore it is installed into the system and all the inlet flanges are properly connected or blanked off Make sure that the pump is well connected to the grounded vacuum system WARNING Before removing th...

Страница 80: ...the pump case NOTE It is advisable to make a 10 15 minutes initial operation of the heater in a ventilated room to allow the evaporation of residual internal alloying elements To install the element...

Страница 81: ...Technical Information Heater Installation 5 VacIon Plus 300 pumps User Manual 87 900 103 01 H 81 98 Figure 21 Heating element Figure 22 Heating element installation...

Страница 82: ...peratures between 150 C and 220 C 220 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapor without damaging the ma...

Страница 83: ...2 The integral heaters are designed to provide a temperature of 250 C to 300 C when the pump is wrapped in a 3 fold aluminium foil NOTE A three layer foil wrapping is advisable and sufficient to achi...

Страница 84: ...voltage 7 kilovolts for example The applied voltage may be reduced later to optimize pumping and achieve the lowest vacuum pressure 5 If started at 10 4 mbar the voltage will start at approximately 8...

Страница 85: ...on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sur...

Страница 86: ...part of the pump with the appropriate solvent 5 Put in the new element through the inlet flange Make sure that the element is fixed at its rear by the two press formed buttons of the element pocket a...

Страница 87: ...ion to avoid excessive force 1 Remove the 6 bolts of the Mini ConFlat flange connection see Fig 23 2 Remove the cable connection disc 3 Gently relieve the feedthrough from the metal gasket connection...

Страница 88: ...unit 2 Remove the pump magnet 3 Turn on the pump control unit and wait for current stabilization The current reading should not be higher than 300 nA Make sure that the control unit and the high volt...

Страница 89: ...um and preferably without pump magnets installed to reduce the drawn current High potting must be done carefully and in voltage steps since uncontrolled arcing inside the pump can cause permanent dama...

Страница 90: ...hours after 20 hours air exposure With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours 4 Slow pump down due to absorption of vapours on pump and system walls Vap...

Страница 91: ...N 8 System fails to achieve desired UHV vacuum pressure System not appropriately cleaned for UHV Excessive outgassing from walls limits base pressure Clean all components for UHV and bake the system a...

Страница 92: ...ange 10 pack individually sealed FG 0600 CI Nut and bolt set for 6 inlet flange FB 0450 C12 Copper gasket for 1 1 3 CF feedthrough flange 10 pack individually sealed FG 0133 CI Nut and bolt set for 1...

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Страница 98: ...s UK Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 China Agilent Technologies China Co Ltd No 3 Wang Jing Bei Lu Chao Yang District Beijing...

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