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General Information

1

Agilent 5517B/BL/C/D/DL/FL User’s Guide

5

Manual Organization

Front matter

 includes the warranty information, safety information, table 

of contents, and list of figures and tables.

Chapter 1, “General Information” (this chapter) —

Covers product description, manual organization, options, and available 
accessories.

Chapter 2, “Laser Head at a Glance” —

Provides a visual introduction to the Agilent 5517B/BL/C/D/DL/FL Laser 
Head and an overview of its aperture, indicators, and connector.

Chapter 3, “Installation” —

Provides installation and power- up instructions for the 
Agilent 5517B/BL/C/D/DL/FL Laser Head. This chapter contains details 
about connecting the laser heads to the power supplies, axis boards, and 
chassis/systems using the laser head cables. It also contains electrical and 
mounting considerations information.

Chapter 4, “Performance Tests” —

Provides procedures that verify the laser head operates properly and 
meets the Agilent 5517B/BL/C/D/DL/FL Laser specifications given in 

Chapter 8, “Specifications

.”

Chapter 5, “Adjustments” —

Provides instructions on how to adjust voltage levels at key points on the 
hardware.

Chapter 6, “Using the Laser Head in a System” —

Provides an overview of how the laser interferometer system works, and 
describes how to align the optics, make a measurement, and solve 
problems. 

Chapter 7, “Service” —

This chapter is divided into three parts. Part 1 contains instructions on 
unpacking and inspection, warranty claims, and returning the laser head 
to Agilent for service. Part 2 contains troubleshooting information that 
guide you in troubleshooting the laser head to the defective assembly. Part 
3 contains the disassembly and reassembly procedures.

Chapter 8, “Specifications” —

Lists all specifications and operating characteristics for the laser head.

Index

Содержание 5517B

Страница 1: ...Agilent Technologies Agilent 5517B BL C D DL FL Laser Head User s Guide...

Страница 2: ...ocument are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government...

Страница 3: ...w to use the Agilent 5517B BL C D DL FL Laser Head The information in this guide applies to laser heads having the serial prefix number listed below SERIAL PREFIX NUMBER US4627 for 5517B US4605 for 55...

Страница 4: ...umentation must be reviewed for familiarization with this safety markings and instructions before operation This product is a safety Class I instrument provided with a protective earth terminal Before...

Страница 5: ...T APERTURE FOR REDUCED BEAM 15V POWER ON 15V POWER ON READY LASER ON COMPLIES WITH 21 CFR 1040 10 AND 1040 11 5517D HeNe Laser Opt SN US44444444 Power 200 uW Split Freq 3 74 MHz ISM 1 A ICES NMB 001 A...

Страница 6: ...ological Health regulations 21 CFR 1040 10 and 1040 11 These regulations may also apply to the end product into which the Agilent 5517B BL C D DL FL Laser Head will be designed Care must be taken to i...

Страница 7: ...lance Laser Head Front Panel at a Glance 12 Laser Head Rear Panel at a Glance 13 3 Installation Introduction 16 Preparing the Laser Head for Use 16 Unpacking and Inspection 16 Warranty Claims 17 Insta...

Страница 8: ...nsiderations 40 Recommended Test Equipment 41 Laser Head Adjustments 41 Equipment needed 41 Preheat setting 42 Adjustment Test Record 49 6 Using the Laser Head in a System Introduction 52 A one axis e...

Страница 9: ...Reshipment 63 Laser Head Troubleshooting 64 Exchange Laser Tube Assemblies 64 Troubleshooting 64 Disassembly Procedures 68 Tools Required 68 To remove the Front Panel and the Cover 69 To remove the A3...

Страница 10: ...x Agilent 5517B BL C D DL FL User s Guide Contents...

Страница 11: ...igure 13 Jumper Locations on A3 Controller Reference Board 05517 60031 47 Figure 14 Jumper Locations on A3 Controller Reference Board 05517 60003 47 Figure 15 High voltage area and anode lead 48 Figur...

Страница 12: ...xii Agilent 5577B BL C D DL FL User s Guide Figures...

Страница 13: ...el Connector pin assignments 24 Table 7 Laser Head Power Supply requirements 25 Table 8 Laser head internal fuses 26 Table 9 Recommended Test Equipment 32 Table 10 Setpoint voltages at TP11 and TP15 s...

Страница 14: ...xiv Agilent 5577B BL C D DL FL User s Guide Tables...

Страница 15: ...C D DL FL Laser Head User s Guide Agilent Technologies 1 General Information Introduction 2 Description of the Agilent 5517B BL C D DL FL Laser Head 2 Manual Organization 5 Options 6 Accessories 7 Re...

Страница 16: ...ntrol circuits a reference receiver and a high voltage power supply The laser head requires external 15 Volt supplies Status lights mounted on the rear panel of the laser head provide information on p...

Страница 17: ...9 Figure 1 Agilent 5517B C D and 5517BL DL FL Laser Heads Table 1 lists the physical and operating differences The primary difference between the laser heads is the difference between their laser beam...

Страница 18: ...z to 2 4 MHz Min 120 W Max 1 mW 79 5 mm No 5517BL 500 mm s 1 9 MHz to 2 4 MHz Min 120 W Max 1 mW 80 8 mm Yes 5517C 711 mm s 2 4 MHz to 3 0 MHz Min 180 W Max 1 mW 79 5 mm No 5517D 1000 mm s 3 4 MHz to...

Страница 19: ...mounting considerations information Chapter 4 Performance Tests Provides procedures that verify the laser head operates properly and meets the Agilent 5517B BL C D DL FL Laser specifications given in...

Страница 20: ...Laser and Optics User s Manual Option A6J ANSI NCSL 2540 1 1994 Compliant Calibration 5517C Option A6J ANSI NCSL 2540 1 1994 Compliant Calibration Option H07 Optical Power 400 W Option OBV Additional...

Страница 21: ...cables that can be used with any of the laser heads in this manual The table lists the connectors on each cable and the axis boards and systems compatible with the cables A detailed description of ea...

Страница 22: ...BNC 10895A VME Axis Board2 B 7 23 0 C 20 65 6 10881 A 3 9 8 18 pin connector 5 pin female DIN connector3 4 pin LEMO 10885A PC Axis Board 10889B PC Servo Axis Board 10896B VME Laser Compensation Board...

Страница 23: ...t 5517B BL C D DL FL User s Guide 9 Related Documents Agilent Laser Head User s Guide this document p n 05517 90077 Agilent Laser and Optics User s Manual p n 05517 90086 Agilent Laser and Optics User...

Страница 24: ...10 Agilent 5517B BL C D DL FL User s Guide 1 General Information...

Страница 25: ...11 Agilent 5517B BL C D DL FL Laser Head User s Guide Agilent Technologies 2 Laser Head at a Glance Laser Head Front Panel at a Glance 12 Laser Head Rear Panel at a Glance 13...

Страница 26: ...nt Panel at a Glance 1 Shutter The shutter also known as the aperture ring allows for three aperture settings Open used during normal operation Reduced used during alignment of the measurement axes Cl...

Страница 27: ...LED amber This LED lights to indicate the high voltage power supply is ON and that laser light is being emitted 5 18 Pin Connector twist lock This connector is used to connect the external power suppl...

Страница 28: ...14 Agilent 5517B BL C D DL FL User s Guide 2 Laser Head at a Glance...

Страница 29: ...s Guide Agilent Technologies 3 Installation Introduction 16 Preparing the Laser Head for Use 16 Installing the Laser Head 17 Connecting the Laser Head Cables 18 Electrical Considerations 25 Mounting C...

Страница 30: ...e incomplete if there is mechanical damage or defect or if the instrument or some component fails the performance tests notify the nearest Agilent office If the shipping container is damaged or the cu...

Страница 31: ...systems showing the laser head and the inclusion of optics and interferometers are included but details about how to set them up are not For details about other system considerations refer to the Lase...

Страница 32: ...ch requires a clockwise 1 3 turn to secure the cable to the mating connector See Table 6 on page 24 for pin outs of this connector 2 Plug the smallest connector on the laser head cable into the Refere...

Страница 33: ...ower Supply a Connect the ac line cord to the input connector of the 10884B power supply b Plug the ac line cord into an operating ac line outlet The 10884B power supply has no power switch As soon as...

Страница 34: ...nt N1251B High Performance Laser Head Cable 6 Connecting Agilent 10881D E F to a customer supplied power supply a Connect the three spade lugs to the terminals of a power supply other than the 10884B...

Страница 35: ...0881D E F laser head cables used with a power supply other than the 10884B The figure also shows a typical connection of a receiver to an axis board There are a variety of receivers and receiver cable...

Страница 36: ...A B C Laser Head Cable 1 Connect the largest connector on the laser head cable to the mating connector on the rear panel of the laser head This 18 pin laser head connector is keyed to fit together onl...

Страница 37: ...B C laser head cables Not shown are the spade lugs of the 10881D E F laser head cables used with a power supply other than the 10884B The figure also shows a typical connection of a receiver to an ax...

Страница 38: ...ctor pin assignments Pin Number Signal Name A No connection B MEAS No connection C MEAS No connection D Signal Return E REF F REF G H Ground J 15V Sense K 15 Volts L 15 Volts M 15 Volts N P Cable Shie...

Страница 39: ...ystem also use 15V Add these to the laser head current requirements to obtain the overall system requirements Power dissipation The laser head dissipates approximately 23 watts during operation Fusing...

Страница 40: ...laser head see Disassembly Procedures on page 68 Table 8 lists the fuse values 1For A3 Controller Reference Board p n 05517 60003 2 For A3 Controller Reference Board p n 05517 60031and 05517 60032 Fi...

Страница 41: ...rthogonal with the machine axes being measured Thermal isolation Because there is some heat dissipation from the laser heads you should choose the mounting method and location with care Where possible...

Страница 42: ...ount of noise can be present in the interferometer measurement due to turbulence If interferometer components optics are mounted very close to the laser head such that the operating temperature of the...

Страница 43: ...the system performance but the measurement direction sense will change with each 90 rotation Figure 9 Laser position transducer mounting Mounting and clearance Aluminum is the preferred material for a...

Страница 44: ...ons Powering Up the Laser Head 1 Plug the laser power supply either the Agilent 10884B or one of your own design into the line power nominally 110 V or 230 V ac to start the laser All LEDs on the rear...

Страница 45: ...31 Agilent 5517B BL C D DL FL Laser Head User s Guide Agilent Technologies 4 Performance Tests Introduction 32 Recommended Test Equipment 32 Performance Tests 33 Performance Test Record 37...

Страница 46: ...en in the table may be substituted for the recommended model s 1 Equipment having equivalent characteristics can be substituted 2 Use with 10884B or 10881D when using the E3615A Table 9 Recommended Te...

Страница 47: ...erture See Figure10 Figure 10 Front Panel Turret and Aperture NOTE Make sure all equipment is calibrated and adjusted correctly CAUTION Always turn off or disconnect the laser head power supply before...

Страница 48: ...cur less than 20 minutes after power is applied 5 Turn on the power meter 6 Align the power meter detector with the laser beam for a maximum reading as shown in Figure11 Figure 11 Measuring the laser...

Страница 49: ...r head cable to the laser head using the 18 pin connector end of the cable shown in Figure12 2 Connect the power connector end of the laser head cable to the power supply 3 Connect the laser head LEMO...

Страница 50: ...e Performance Test Record on page 37 Wavelength test After replacement of the laser tube and power supply a wavelength test should be performed Wavelength tests require specialized and expensive equip...

Страница 51: ...nt Model Number ____________ Instrument Serial Number ____________ Description Date Measured Actual Reading Limits Laser Power Output Test 1 ____________ 1 ____________ W Laser Beam Split Frequency Te...

Страница 52: ...38 Agilent 5517B BL C D DL FL User s Guide 4 Performance Tests...

Страница 53: ...lent 5517B BL C D DL FL Laser Head User s Guide Agilent Technologies 5 Adjustments Introduction 40 Safety Considerations 40 Recommended Test Equipment 41 Laser Head Adjustments 41 Adjustment Test Reco...

Страница 54: ...protective covers removed Such maintenance should be performed only by service trained personnel who are aware of the hazards involved for example fire and electric shock Where maintenance can be per...

Страница 55: ...Laser Head Adjustments Equipment needed 34401A Digital Multimeter DMM with test leads Large flat blade screwdriver Small flat blade screwdriver Frequency counter The laser head cover will need to be...

Страница 56: ...the laser head contains the 05517 60003 A3 Board see Figure 14 on page 47 for jumper and testpoint locations 4 Move the Heater Jumper A3JMP7 to its OFF position 5 Remove the HVPS connector 3 pin with...

Страница 57: ...A1 Connector Board 17 Connect the positive lead of the DMM to A3TP11 18 Reconnect the laser head cable to the laser head to power it on 19 Wait until the READY LED is ON continuously indicating the l...

Страница 58: ...0 215 0 276 0 250 0 321 0 285 0 366 0 216 0 278 0 251 0 323 0 286 0 368 0 217 0 279 0 252 0 324 0 287 0 369 0 218 0 280 0 253 0 325 0 288 0 370 0 219 0 281 0 254 0 326 0 289 0 371 0 220 0 283 0 255 0...

Страница 59: ...87 0 402 0 218 0 305 0 253 0 354 0 288 0 403 0 219 0 307 0 254 0 356 0 289 0 405 0 220 0 308 0 255 0 357 0 290 0 406 0 221 0 309 0 256 0 358 0 291 0 407 0 222 0 311 0 257 0 360 0 292 0 409 0 223 0 312...

Страница 60: ...0 215 0 276 0 250 0 321 0 285 0 366 0 216 0 278 0 251 0 323 0 286 0 368 0 217 0 279 0 252 0 324 0 287 0 369 0 218 0 280 0 253 0 325 0 288 0 370 0 219 0 281 0 254 0 326 0 289 0 371 0 220 0 283 0 255 0...

Страница 61: ...Adjustments 5 Agilent 5517B BL C D DL FL User s Guide 47 Figure 13 Jumper Locations on A3 Controller Reference Board 05517 60031 Figure 14 Jumper Locations on A3 Controller Reference Board 05517 60003...

Страница 62: ...48 Agilent 5517B BL C D DL FL User s Guide 5 Adjustments Figure 15 High voltage area and anode lead Figure 16 Three pin high voltage power supply connector...

Страница 63: ...____________ Instrument Serial Number ____________ Description Date Measured Actual Reading Limits Preheat Setting 1 TP11 2 TP15 Adjusted Voltage 3 TP11 1 ____________ 2 ____________ 3 ____________ 1...

Страница 64: ...50 Agilent 5517B BL C D DL FL User s Guide 5 Adjustments...

Страница 65: ...C D DL FL Laser Head User s Guide Agilent Technologies 6 Using the Laser Head in a System Introduction 52 Setting Up the System Electronics 54 Aligning the Optics 56 Making Measurements An Example 57...

Страница 66: ...re then operated like the axis in the example Basic steps apply to all laser systems Specific products identified by Agilent model number are used in the example but the installation and operation of...

Страница 67: ...te laser head interferometer and reflector The laser beam must be aligned with the optical elements and the motion of the optics to preserve beam alignment and provide an accurate measurement The opti...

Страница 68: ...r electronics board in the PC Install the Agilent laser electronics board s API library and monitor program on a computer used for program development Connect the electronics cables 1 Connect the larg...

Страница 69: ...D blinks on and off to indicate that the laser is in the process of locking When the head is ready for use this LED remains on indicating the laser has achieved lock and is generating a reference sign...

Страница 70: ...turn beam on the receiver lens When the Laser Ready indicator comes on the green LED on the receiver will light when the beam alignment is satisfactory 6 Block the beam from the interferometer to the...

Страница 71: ...select the for example Agilent N1231B API program from the pop up menu The Agilent N1231B API pop up menu is displayed as shown in Figure 18 Figure 18 Start Programs pop up menu 4 From the Agilent N12...

Страница 72: ...et All Axes button in the lower left of the screen The position in uncompensated raw lambda 2048 counts can now be read in the Position boxes corresponding to axes that have valid measurement signals...

Страница 73: ...Agilent 5517B BL C D DL FL User s Guide 59 Figure 20 Measurement screen To exit this application click the Close button in the lower left corner of the application s screen or the close X button in th...

Страница 74: ...ectronics Ensure that the system electronics are connected to an operating power source and are turned on Ensure that the alignment of the laser head optics and receiver causes the beam from the inter...

Страница 75: ...61 Agilent 5517B BL C D DL FL Laser Head User s Guide Agilent Technologies 7 Service Introduction 62 Laser Head Shipment 63 Laser Head Troubleshooting 64 Disassembly Procedures 68...

Страница 76: ...er is damaged or shows signs of stress notify the carrier as well as the Agilent office Keep the shipping materials for the carrier s inspection The Agilent office will arrange for repair or replaceme...

Страница 77: ...d be followed when repackaging with commercially available materials 1 If shipping to an Agilent Support Office or Center attach a tag indicating the type of service required return address and model...

Страница 78: ...d LASER ON indicator not lit READY indicator does not illuminate as expected Normally the indicator will start to blink on and off within four minutes of applying power to the laser head This indicate...

Страница 79: ...laser head cable Note LASER ON LED The 15V specifications apply when the cable is loaded with the nominal operating current This adjustment assumes that all the receivers are also connected Replace la...

Страница 80: ...m on continuously Is laser beam flashing Is DS3 LED flashing Yellow LED on center of A3 Controller Board NO Is DS4 LED flashing Red LED on bottom center of A3 Controller Board NO Is DS6 LED flashing R...

Страница 81: ...Service 7 Agilent 5517B BL C D DL FL User s Guide 67 Figure 23 DS1 through DS4 locations on A3 Controller Reference Board Figure 24 DS4 DS6 Q3 TP1 and TP8 locations on A3 Controller Reference Board...

Страница 82: ...nt damage always disconnect the power source from the laser head before removing the cover s CAUTION To avoid damaging the electronics assemblies work at a properly grounded work station NOTE Unless o...

Страница 83: ...gure 25 Laser head cover removal 4 Remove the front panel by gently pulling it straight away from the laser head 5 If you have a single piece cover MP10 remove it by gently pulling the cover forward a...

Страница 84: ...3 Controller Reference Board on page 70 3 Unplug the A5 Laser Tube Assembly wires from the two pin connector on the A1 Connector Board and the A2 Power Supply wires from the three pin connector on the...

Страница 85: ...er Tube Assembly wires from the two pin connector on the A1 Connector Board and the A2 Power Supply wires from the three pin connector on the A1 board 3 From the bottom of the laser base remove the fo...

Страница 86: ...72 Agilent 5517B BL C D DL FL User s Guide 7 Service...

Страница 87: ...73 Agilent 5517B BL C D DL FL Laser Head User s Guide Agilent Technologies 8 Specifications Introduction 74 Specifications and Characteristics 74...

Страница 88: ...ll continue to operate at low levels of optical power It is important to know the level of optical power needed to maintain the integrity of your system You will need to calculate how often to measure...

Страница 89: ...y f2 Parallel to laser head base Perpendicular to laser head base Reference signal Differential square wave DC isolated TTL levels Duty 50 1 typical Reference frequency Difference between f1 and f2 55...

Страница 90: ...c field strength Non operating Does not exceed 5 25 milligauss at a distance of 460 cm 15 ft from any point on the surface of the packaged laser head Field is due to permanent magnets around the tube...

Страница 91: ...cm 4 in beyond back Electrostatic Discharge ESD When the product is tested with 8kV air discharge or 4kV contact discharge in accordance with IEC 61000 4 2 errors that will affect the measurement dat...

Страница 92: ...DO NOT STARE INTO BEAM Also when open and interlock if any failed or defeated MAXIMUM OUTPUT 1 mw PULSE SPEC continuous wave LASER MEDIUM helium neon CLASS II LASER PRODUCT 111 82 198 06 55 76 6 55 11...

Страница 93: ...erlock if any failed or defeated MAXIMUM OUTPUT 1 mw PULSE SPEC continuous wave LASER MEDIUM helium neon CLASS II LASER PRODUCT 111 82 198 06 55 76 15 75 64 33 11 64 102 12 6 55 11 43 10 63 128 27 358...

Страница 94: ...80 Agilent 5517B BL C D DL FL User s Guide 8 Specifications...

Страница 95: ...ions power 25 documents related 9 E electrical considerations 25 electronics cables connecting 54 equipment recommended 32 F flowchart troubleshooting 65 66 front panel at a glance 12 front panel remo...

Страница 96: ...er 12 shutter front panel 12 specifications 73 starting laser head 30 starting system 55 system power up 55 T test equipment recommended 32 test record adjustment 49 performance 37 thermal isolation 2...

Страница 97: ...h an Agilent test and measurement product or application you can find a list of local service representatives on the web site listed above If you do not have access to the Internet one of the followin...

Страница 98: ......

Страница 99: ......

Страница 100: ...SATISFACTORY QUALITY AND FITNESS FOR A PARTICULAR PURPOSE Agilent will be liable for damage to tangible property per incident up to the greater of 300 000 or the actual amount paid for the product th...

Страница 101: ......

Страница 102: ...05517 90077 Manual Part Number 05517 90077 Printed in U S A JUNE 18 2009...

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