Aerotech MPS75SL, Руководство по оборудованию

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Table of Contents MPS75SL/SLE Hardware Manual
List of Figures
Figure 2-1: MPS75SL/SLE Dimensions 18
Figure 2-2: MPS75SL/SLE with Bellows Dimensions 19
Figure 2-3: MPS75SL/SLE-025 Mounting Plate Dimensions 20
Figure 2-4: MPS75SL/SLE-050 Mounting Plate Dimensions 20
Figure 2-5: MPS75SL/SLE-075 Mounting Plate Dimensions 20
Figure 2-6: MPS75SL/SLE-100 Mounting Plate Dimensions 20
Figure 2-7: MPS75SL/SLE HDZ Angle Bracket Dimensions 21
Figure 2-8: MPS75SL/SLE Mounting Hole Locations 23
Figure 2-9: Access To All Mounting Holes 24
Figure 2-10: Load Capability of MPS75SL/SLE Series Stages 25
Figure 2-11: Stage Orientations 26
Figure 2-12: Torque Required to Turn Ball Screw in Vertical Orientation 27
Figure 3-1: Motor and Feedback Wiring (-M1 Option) 36
Figure 3-2: Motor and Feedback Wiring (-M2 Option) 37
Figure 3-3: Machine Direction 41
Figure 3-4: Analog Encoder Phasing Reference Diagram 42
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 42
Figure 4-1: Remove the Bellows Bolts 46
Figure 4-2: Slide the Stage Carriage and Bellow Compression 46
Figure 4-3: Motor Cover Screw Location 47
Figure 4-4: Bellows Support Rods 47
Figure 4-5: Secure the Bellows Support Rods 48
Figure 4-6: Attach the Bellows 48
Figure 4-7: Attach the Bellows Cover 48
Figure 4-8: Attach the Bellows Tabletop 49
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