Aerotech MPS75SL, Руководство по оборудованию

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Overview MPS75SL/SLE Hardware Manual
Table 1-4: MPS75SLE Series Mechanical Specifications
Mechanical Specifications
(1)
-025 -050 -075 -100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy
Uncalibrated ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
Uncalibrated
with Bellows
±2.75 µm ±3.25 µm ±3.75 µm ±4.25 µm
Calibrated
(2)
±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental
Motion)
(3)
0.025 µm 0.025 µm 0.025 µm 0.025 µm
Bidirectional Repeatability
(3)
±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm
Bidirectional Repeatability (with
Bellows)
±0.2 µm ±0.2 µm ±0.2 µm ±0.2 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball
Screw)
DC Motor
(-M1)
50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor
(-M2)
30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity
(4)
Horizontal 15 kg 15 kg 15 kg 15 kg
Side 15 kg 15 kg 15 kg 15 kg
Vertical 4 kg 4 kg 4 kg 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. With Aerotech controllers.
3. Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both
the rotary and linear encoders.
4. Payload specifications are for a single-axis system.
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