Aerotech MPS75SL, Руководство по оборудованию

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MPS75SL/SLE Hardware Manual Overview
1.3. Basic Specifications
Table 1-3: MPS75SL Series Mechanical Specifications
Mechanical Specifications
(1)
-025 -050 -075 -100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy
(2)
Uncalibrated ±2.5 µm ±3.0 µm ±3.5 µm ±4.0 µm
Uncalibrated
with Bellows
±3.5 µm ±4.0 µm ±4.5 µm ±5.0 µm
Calibrated
(3)
±1.0 µm ±1.0 µm ±1.5 µm ±1.5 µm
Resolution (Minimum Incremental
Motion)
0.1 µm 0.1 µm 0.1 µm 0.1 µm
Bidirectional Repeatability
(3)
±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Bidirectional Repeatability (with
Bellows)
±1.2 µm ±1.2 µm ±1.2 µm ±1.2 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball
Screw)
DC Motor
(-M1)
50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor
(-M2)
30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity
(4)
Horizontal 15 kg 15 kg 15 kg 15 kg
Side 15 kg 15 kg 15 kg 15 kg
Vertical 4 kg 4 kg 4 kg 4 kg
Stage Mass 1.7 kg 1.8 kg 1.9 kg 2.0 kg
Material Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. Excessive duty cycle may impact stage accuracy.
3. With Aerotech controllers.
4. Payload specifications are for a single-axis system.
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