Aerotech MPS50SL, Руководство по оборудованию

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MPS50SL Hardware Manual Table of Contents
Table of Contents
MPS50SL Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 19
2.3.1. For XY Assemblies and Special Cases 21
2.4. Attaching the Payload to the Stage 22
Chapter 3: Electrical Specifications and Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 31
3.3. Motor and Feedback Specifications 33
3.4. Limits and Machine Direction 35
3.5. Motor and Feedback Phasing 36
Chapter 4: Maintenance 37
4.1. Service and Inspection Schedule 37
4.2. Cleaning and Lubrication 38
4.2.1. Bearing Centering Procedure 40
4.3. Troubleshooting 43
Appendix A: Warranty and Field Service 45
Appendix B: Revision History 47
Index 49
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