Aerotech MPS50SL, Руководство по оборудованию

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MPS50SL Hardware Manual Overview
1.3. Basic Specifications
Table 1-3: MPS50SL Series Mechanical Specifications
Mechanical Specifications
(1)
MPS50SL-025 MPS50SL-050
Travel 25 mm 50 mm
Accuracy
(2)
1.0 mm/rev
Ball Screw
Uncalibrated (-PL1) ±3.0 µm ±4.0 µm
Calibrated
(3)
(-PL2)
±1.5 µm ±1.5 µm
0.5 mm/rev
Lead Screw
Uncalibrated (-PL1) ±5.0 µm ±7.5 µm
Calibrated
(3)
(-PL2)
±2.0 µm ±2.5 µm
Resolution
(Minimum
Incremental
Motion)
1.0 mm/rev Ball Screw 0.1 µm 0.1 µm
0.5 mm/rev Lead Screw 0.1 µm 0.1 µm
Bidirectional
Repeatability
(3)
1.0 mm/rev Ball Screw ±0.75 µm ±0.75 µm
0.5 mm/rev Lead Screw ±1.5 µm ±1.5 µm
Straightness ±2.0 µm ±3.0 µm
Flatness ±2.0 µm ±3.0 µm
Maximum Speed
1.0 mm/rev
Ball Screw
DC Motor (-M1) 5 mm/s 5 mm/s
Stepper Motor (-M2) 1 mm/s 1 mm/s
0.5 mm/rev
Lead Screw
DC Motor (-M1) 2.5 mm/s 2.5 mm/s
Stepper Motor (-M2) 0.5 mm/s 0.5 mm/s
Load Capacity
(4)
Horizontal 5 kg 5 kg
Side 5 kg 5 kg
Vertical 2.5 kg 2.5 kg
Stage Mass 0.85 kg 0.9 kg
Material Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. Excessive duty cycle may impact stage accuracy.
3. With Aerotech controllers.
4. Payload specifications are for a single-axis system.
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