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Installation ASR1100 Rotary Stage User's Manual
2.2. Preparing the Mounting Surface
The mounting surface should be flat and have adequate stiffness in order to achieve the maximum per-
formance from the ASR1100 stage. When a stage is mounted to a non-flat surface, the stage can be dis-
torted as the mounting screws are tightened. This distortion will decrease the overall accuracy of the stage.
Adjustments to the mounting surface must be done before the stage is secured.
N O T E : To maintain accuracy, the mounting surface should be flat within 1 µm per 50 mm.
N O T E : The stage base is precision machined and verified for flatness prior to stage assembly at the fac-
tory. If machining is required to achieve the desired flatness, it should be performed on the mounting sur-
face rather than the stage base. Shimming should be avoided if possible. If shimming is required, it should
be minimized to improve the rigidity of the system.
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