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Site Preparation and Installation Supplement
Connecting Utilities to the System
Advanced Dicing Technologies Ltd
.
24
Table 25. System Utility Connections
Utility
Diameter
Connection Point
Drain
38 mm
Rear of System
Spindle cooling water
supply
8 mm
Rear of System
Air supply
12 mm
Rear of System
DI water supply
12 mm
Rear of System
Exhaust
100 mm
Rear of System
Figure 12. Exhaust Connection
Figure 13. Utility Connection Points
Caution:
Before running any test procedures, examine the system water
pipeline for leaks.
Exhaust
Connection
Drain Outlet
Spindle Water
Inlet
Connection for
optional Spindle
Cooling Water
Recycler
DI Water Inlet
Air Inlet: via Air
purification system
(optional)