GB 00731 - Edition 14 - Sept. 12
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B 100
Safety instructions for pump and
controller installation
The user and /or OEM are ultimately responsible for operating the
equipment in a safe manner. The manufacturer has no control over the
types of gases exposed to this pump. This is the user and/or the OEM’s
responsibility to follow the necessary safety requirements.
Frequently process gases are toxic, flammable, corrosive, explosive and/
or otherwise reactive.
Toxic gases can cause serious injury or death. Operators and users must
take the appropriate safety recommendations to prevent injury. Consult
the responsible department for instructions and safety information.
Hazardous gases through the pump can cause serious injury or death. It’s
mandatory by regulations to connect the turbomolecular pump’s exhaust
to a rough pumping line compatible with the process gases. Check that
pump is correctly connected to the equipment (
B 310).
If any corrosive, reactive, flammable, pyrophoric, oxidizing process gases
can be sent to the pump, then an exhaust extraction system monitor should
be used to ensure that gas flow to the pump is stopped when exhaust gas
extraction system is lost.
If flammable materials are sent to the pump, the customer will need
to provide a hardware based LEL detection in the exhaust extraction
system (detection capability at 25 % of the LEL) that will stop chemical
supply to the pump when gas is detected over 25 % of LEL for that
flammable material.
For non clean process
.
If loss of purge flow creates a significant risk, then the purge flow must be
monitored externally and a response to loss of purge flow
must be provided by the process equipment and interlocked.
If pyrophoric materials above the LEL (lower explosive limit) are sent to the
pump then nitrogen should be supplied at a rate to ensure that concentration
is diluted to be below the LEL, in addition an interlock should be provided to
ensure that gas flow to the pump is stopped when nitrogen is lost.
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The product’s EMC rating is obtained on the understanding that it is
installed in compliance with EMC rules.
Specially: in environments that are prone to emit interference,
use shielded cables and connections on interfaces.
Ensure that the product is connected to an electrical installation:
- in compliance with the local and national safety requirements,
- equipped with electrical protection (fuses, circuit breaker, …) which has
a suitable earth (ground) point, properly connected.
This pump is not equipped with a lock out/tag out (LO/TO) device because
it is designed for use on process tools.
In order to properly secure the pump for installation or/and
maintenance,
the entire tool needs to be properly locked-out/tagged out in accordance
with OSHA requirement 29 CFR.1910.147.
If access to the IEC connector is restricted an additional isolation device
should be provided, which will be easily accessible by an operator.
Installation (cont’d)
adixen Vacuum Products - Operating Instructions - ATP 2300 M
