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GB 02923 - Edition 05 - 03/2013

5/5

B 300

Pump connections to an installation

For safety reasons, it is important to tighten the bolts with a torque
wrench according to the specified values :
- lower torque: risk of loosened bolts
- higher torque: risk of damaging the bolts.

We strongly recommend the use of ISO-F or CF-F flanges. ISO-K type
flanges are not recommended to fasten turbomolecular because:
• There is no visual reminder (like threaded holes on ISO-F) to signal
how many clamps are needed to secure the pump,
• It is not as easy to fasten claw clamps on ISO-K flanges as to secure
bolts on ISO-F flanges,
• The ISO-K flanges do not prevent accidental rotation of the pump on
the equipment flange in case of pump rotor crash. This rotation could
damage the foreline and the purge gas line which would generate
hazards for the user.

Inlet flange installation

conditions (cont.)

Equipment installation

conditions (item 3)

(Option)

Optionally, if the equipment flange cannot be designed to withstand
the maximum loads in case of rotor crash, an additional bracket can
be fixed to the bottom of the pump (6 x M10 threaded holes are
provided on this purpose). In this case, contact the manufacturer for
calculation support.

ATPM

3

ATPM

Chamber

Equipmen

t

Bracket

Frame

adixen Vacuum Products - Operating Instructions - ATP 2300 M

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Содержание ATP 2300 M

Страница 1: ...Operating Instructions Operating Instructions Translated from original version Translated from original version ATP 2300 M Turbopumps EN EN ...

Страница 2: ... many years of experience in the field of Turbopump design In order to ensure the best possible performance of the equipment and your complete satisfaction in using it we advise you to read this manual carefully before any intervention on your pump and to pay particular attention to the equipment installation and start up section This operating instruction manual includes only the instructions to ...

Страница 3: ... copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by adixen Vacuum Products This product complies with the requirements of European Directives listed in the Declaration of Conformity contained in sheet G100 of the controller operating instructions adixen Vacuum Products Ope...

Страница 4: ...1 Typical electrical wiring diagram Chapter C OPERATION C 100 Safety instructions for product use Chapter D MAINTENANCE D 100 Safety instructions for product removal D 150 Maintenance frequency Chapter E MAINTENANCE INSTRUCTIONS E 50 Replacement of the water valve coil E 100 Shipping procedure for contaminated pumps Chapter F MAINTENANCE COMPONENTS F 000 Spare parts Instructions of use F 100 First...

Страница 5: ...uct Before switching on the product study the Operating instructions and make sure you follow the safety instructions it gives You can recognise these by the Caution Warning and Danger symbols Good practice tips and manufacturer s recommendations are in a blue box Symbols labels Description Warning hot surface Warning hazardous voltage Caution risk of danger Refer to the operating instructions bef...

Страница 6: ...pump operating principle Pumping principle The Turbopump in an installation The back up ball bearings No maintenance Battery free Variation of the pump rotational speed A 400 Technical characteristics of the pump A 510 The accessories of the pump Pump accessories A 515 Accessory dimensions Purge valve 50 sccm dimensions Air inlet valve dimensions Water valve dimensions adixen Vacuum Products Opera...

Страница 7: ...tment to any unbalance of the rotor from very low speed Maintenance free Inert gas purge Protect from corrosion the magnetic spindle Battery free In case of a power failure the pump motor acts like a generator to transform the rotor energy into electrical power to supply the controller Controllers The ATP 2300 M works with the OBC controller or with the MAGPOWER controller refer to corresponding o...

Страница 8: ...lectronics Power amplifiers Position of Reference Position return Electro magnet Correction Position sensor Z X X Y Y Movements in relation to these axes are monitored by position sensors According to the position data recorded the controller corrects differences to bring the rotor back to its optimum position by varying the current in electromagnets 3 controlled translations X Y Z 2 controlled ti...

Страница 9: ...in the rotor balance due to deposit built up during the life time of the pump are automatically compensated by the unbalanced force rejection control It ensures the lowest possible levels of noise and vibration Stator geometric axis Rotor geometric axis Rotor inertia axis A 200 Control loop of the pump 2 2 GB 02721 Edition 04 Aug 07 adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 10: ...protection for corrosive applications and ensures the rotor cooling The turbopump in an installation At the pump exhaust the gases are evacuated to atmosphere by a roughing pump Since the ATPM compression ratio is set by the design the pumping performances depend on the primary pump and on the installation ATMOSPHERIC PRESSURE Primary pumping INLET PRESSURE Secondary pumping High vacuum Rough vacu...

Страница 11: ...percentage of landing time to be deducted depends on the number of incidents D 150 In case of a power failure the motor acts like a generator supplying enough power for the magnetic bearings When the rotation speed is too low the pump shuts down and lands on the back up ball bearings The ATPM pump rotation speed can be selected and set between a minimum speed and the maximum speed This makes it po...

Страница 12: ...0 to nominal speed 31000 517 Sound pressure level db A 46 Pump protection index IP 42 Controller power supply V 200 240 50 60 Hz Maximum leakage current 7 mA 12 Max start up supply W 1000 Power consumption at ultimate pressure W 130 Max apparent start up power VA 1250 Mounting orientation any N2 purge flange ISO KF DN16 Integral leak rate hPa l s 5 10 8 Without inlet screen Value could be depend o...

Страница 13: ... 45 Use of the product Indoor only Maximum altitude m ft 2000 6562 Accept transient over voltages typi cally present on the main supply Catégory II Pollution degree applicable 2 Maximum relative humidity 8 80 Three phase motor characteristics max values Voltage between phases Supply frequency Phase current Vrms Hz A 36 1033 9 7 5 Over 25 C apply a derating on continuous max flow 6 Not applicable f...

Страница 14: ... 12 10 20 12 05 11 18 0 33 32 5 625 6 72 DN 200 ISO F mm 16 00 314 30 317 90 339 20 316 60 350 20 276 20 285 260 00 11 00 12 00 15 178 50 inch 0 63 12 37 12 52 13 35 12 46 13 79 10 87 11 22 10 23 0 43 12 15 7 03 DN 200 ISO K mm 12 00 314 30 317 90 339 20 316 60 350 20 276 20 240 187 60 inch 0 47 12 37 12 52 13 35 12 46 13 79 10 87 9 45 7 39 Dimensions Electrical power Supply 6 Holes M10 6H along 1...

Страница 15: ... valve at pump inlet The secondary isolation valve is used to maintain the vacuum in the chamber while the pump is reset to atmospheric pressure See the manufacturer s catalog For pumps equipped with purge valve see next page Pumps model Inlet size DN P N for ISO F Description P N for CF F Description ATH 1603 M 200 110675 110676S 12 CHC M10x30 12 CHC M10x35 250 110675 110676S 12 CHC M10x30 12 CHC...

Страница 16: ...e braking time of the pump to put it at the atmospheric pressure It is a NC valve which is activated when the pump nominal speed is below 10 000 rpm Air inlet valve P N 24 V DC 114280 Purge valve 50 sccm P N 24 V DC 111921S The gas purge provides an excellent protection of the maglev bearings for corrosive applications and ensures the rotor cooling The purge of this valve can be isolated during an...

Страница 17: ... 32 1 26 1 8 NPT Can rotate Plug coil Pump connection 62 2 44 82 3 23 65 5 2 58 18 5 0 73 65 2 56 1 8NPT female connector air inlet DN 40 ISO KF Pump connection Connector for coil possible to rotate 1 8 NPT female connector Dust filter Air inlet valve dimensions mm inch adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 18: ...Water valve dimensions mm inch Cable water valve Scale 13 20 Inlet and outlet 1 8 NPT female 0 86 2 15 0 59 54 7 15 15 0 59 38 7 1 88 2 58 1 52 65 6 50 3 1 98 29 7 1 17 47 7 18 0 7 34 2 1 34 0 28 22 7 OUT IN adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 19: ...initions B 310 Inlet and exhaust connections Vacuum connections At inlet At exhaust B 330 Nitrogen purge and air inlet valve device connections Characteristics of filtered dry nitrogen supply Purge device Air inlet valve with purge device B 340 Water cooling connection Characteristics of water cooling Standard assembly Assembly with a water valve B 401 Typical electrical wiring diagram The electri...

Страница 20: ...ded it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the language the manual is written in ensure operators know the safe practices to apply when using the product Make sure the equipment shows no sign of transport damage If it has been damaged take the necessary steps to record this with the...

Страница 21: ...ion to the installation It is strongly recommended to secure the maglev turbopump installation to prevent any safety hazard to the user in standard operating conditions B 300 Risk of cut injury The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime if the pump is not switched on it may be driven by another pump in operation Always connect the p...

Страница 22: ... to the pump when gas is detected over 25 of LEL for that flammable material For non clean process If loss of purge flow creates a significant risk then the purge flow must be monitored externally and a response to loss of purge flow must be provided by the process equipment and interlocked If pyrophoric materials above the LEL lower explosive limit are sent to the pump then nitrogen should be sup...

Страница 23: ... hazardous energies Water cooling circuit and nitrogen purge are pressurized hazardous energies Release pressure before servicing 1 for the N2 purge disconnect the gas line 2 for the water cooling circuit disconnect the input connector and leave the output connected Don t forget to put a vessel 1 l under the water output Operation in local mode There is no device to warn that the pump operates in ...

Страница 24: ...se on avoiding any deposition into the pumping line Contact our customer service The manufacturer guarantees the right operation of the pump if it is used in an uniform magnetic field up to 0 5 mT From 0 5 to 5 mT the limit of the right operation depends on the cooling and the gas loads Exceeding 5 mT can cause excessive rotor heating due to the eddy current It is therefore necessary to provide su...

Страница 25: ...ike crushing or cutting The user must keep all body parts away from moving parts MOVING PARTS PRESENT Moving parts can crush and cut Keep hands or feet away from moving parts WARNING The user must label visibly the product to warn against pumped process gas that could be dangerous and toxic and could cause severe injuries or death It precises that any preventive maintenance operation can only be p...

Страница 26: ...ree environment at an ambient temperature between 5 C and 50 C for a period of 2 years maximum If you need to store a pump which has run on clean process don t forget to blow out the water line and to purge the pump with N2 Seal the inlet exhaust and purge ports with blanking plates Don t store the pump more than 6 months in a clean and dry environment Never store a pump which has been used on cor...

Страница 27: ...e model Blanked with a DN 40 ISO KF blanking plates Blanked with a DN 16 ISO KF blanking plates The product is supplied with the inlet and exhaust blancked off This prevents foreign bodies entering the pump during transport and storage Do not remove these blanking plates until you are ready to install the product on the vacuum line adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 28: ...ct the pump to the customer s handling device using the threaded holes located at the rear of the pump refer to chapter A400 of the operating manual The equipment frame on which the pump is installed must be sufficiently rigid to absorb the kinetic energy of the rotor in case of pump rotor crash For this take into account the maximum loads to calculate the equipment attachment devices the flange d...

Страница 29: ...l failure an improperly installed pump could be ejected from the equipment if the kinetic energy was transferred to the pump body It is absolutely necessary to install the pump according to the following installation specifications to secure the user and the equipment The manufacturer declines any responsibility if the pump installation is not designed in accordance with these installation specifi...

Страница 30: ...d out of the pump inlet flange and can impact on the plate of the valve or any other part of the system If this is placed close to the turbo pump and if it has high stiffness the impact can create a high axial load on the system Such axial force has not been observed on a standard pendulum valve The impact of the rotor parts on the housing will create a radial force on the housing This radial forc...

Страница 31: ...g moment Axial force The resulting maximum loads from a crash have to be taken into account by the pump assembling bolts Design and secure the pump frame so that it can withstand the loads According to the housing type Inlet flange installation conditions item 2 Mounting holes at inlet flanges ATP 2300 M Inlet flange DN250 ISO F DN200 ISO K with centering ring DN250 ISO F without centering ring DN...

Страница 32: ... ISO K flanges as to secure bolts on ISO F flanges The ISO K flanges do not prevent accidental rotation of the pump on the equipment flange in case of pump rotor crash This rotation could damage the foreline and the purge gas line which would generate hazards for the user Inlet flange installation conditions cont Equipment installation conditions item 3 Option Optionally if the equipment flange ca...

Страница 33: ...astomers FPM Pump installation with inlet housing facing up connect the pump to the customer s handling device using the threaded holes located at the rear of the pump A 400 of the Operating instructions After connecting the product to the pumping line check for leaks along the entire to ensure proper connections Pollution risk Unclean and contaminated component can increase the pumping down time ...

Страница 34: ...e turbopump must be connected to roughing pump line compatible with process gases It is highly recommended to install an isolation valve closed when power is off between the turbo pump and the roughing circuit At exhaust The turbomolecular pumps can t evacuate at atmospheric pressure they are connected to a roughing pump For a transient period they can start to run at atmospheric pressure The valv...

Страница 35: ... guarantees a flow rate of 50 sccm at pressure 110 kPa Note N2 supply can be equipped with a mass flow meter and in this case it is not necessary to install the flow reduction device Different connection accessories can be found in the manufacturer catalog Adjust the flow rate Feed the nitrogen purge throughout pumping according to the flow rate and pressure values in the scale given 20 1 0 1 1 1 ...

Страница 36: ...urge device 50 sccm During pump operation it s possible to stop the purge i e for air tightness test of the pump A nitrogen purge can be connected instead of the dust filter 1 8 NPT female Air inlet valve A nitrogen purge can be connected instead of the dust filter 1 8 NPT female Filtered air or N2 purge A Dust filter When the inert gas purge is stopped the pumped gases can pass from rough vacuum ...

Страница 37: ...ad to water circuit clogging due to limestone deposition which may necessitate in the worst case a complete cleaning and overhaul of the cooling circuit The presence of micro organisms like aquatic weed and micro biological substances like bacteria can lead to cooling problem in the pump Appropriate water treatment system need to be used to prevent growth of such micro organisms Water leak risk ma...

Страница 38: ...e using a flexible tube following the assembly diagram Connect the other nipple to the draining circuit Standard assembly Water OUT Water IN Provide a water inlet pipe and a tap to adjust the flow rate Connect the water inlet line to one of the cooler water fittings 1 4 NPT female on the pump with the other fitting connected to the water draining circuit via a tube supplied by customer adixen Vacu...

Страница 39: ...isolation valve V1 between the turbo pump and the roughing pump a high vacuum isolation valve V2 between the turbo pump and the chamber to be pumped a relay K1 their contacts drive the valve V1 and the roughing pump power supply the thermostatic option MT pump model We recommend that you fit a separate earth ground conductor to earth pump Use an un insulated braid or a separate insulated green yel...

Страница 40: ...tion ATP 2300 M Operating instructions Detailed contents C C 100 Safety instructions for product use Refer to Magpower or OBC user s manual to have instructions about pump operations adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 41: ...ther pump in operation Always connect the pump inlet port before starting the pump Specific operating conditions may exist that require extra caution from users due to the high temperatures generated outer surfaces 70 C wear protective gloves and leave the pump to cool before working on the product Pump damage Make sure that exhaust pipe line and pump internal parts are not clogged by process by p...

Страница 42: ...aintenance operations Before performing a maintenance operation stop the pump When the pump is at rest switch off the pump by setting the controller main switch to 0 wait 5 minutes before disconnecting the main cable If this last one remains connected some components will still be energized Be sure that the controller status is visible from the operator otherwise disconnect the cable from the pump...

Страница 43: ...ion 03 03 2013 1 1 Maintenance ATP 2300 M Operating instructions Detailed contents D D 100 Safety instructions for product removal D 150 Maintenance frequency adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 44: ...ump musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable After pumping on corrosive or toxic gases it is strongly recommended to seal the pump with blanking plates in case of return to the repair service centers E 100 Don t forget to label in a visible way the product for the operator Risk due to pumping conditions Remaining process gases in t...

Страница 45: ... an repair service center please make sur ou follow the Service procedure and ill in the declaration of contamination found on our website How to contact us The overhaul must be performed by manufacturer s trained personnel Contact nearest service center or the service support at the following e mail address support service adixen fr The outside of the product and control box can be cleaned with a...

Страница 46: ... value is set at 100 When this percentage reaches 0 an alarm is generated pump can t restart and back up ball bearings need to be replaced by authorised Service Center The bearing counter Warning messages for pump maintenance The ball bearing alert threshold can be set on the menu C300 on the controller Operating instructions If the ball bearings life time is smaller than the alert threshold an al...

Страница 47: ...perating instructions Detailed contents E E 50 Replacement of the water valve coil Coil dismantling Coil reassembling E 100 Shipping procedure for contaminated pumps Connecting ports Rough decontamination procedure adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 48: ...g clip Remove the coil and replace it by a new one Put again the spring clip Install the new O ring on the M5 fitting Stick the first threads of M5 fitting with Loctite 542 glue Screw the M5 fitting and tighten it slightly with a 14 mm open end wrench Registered trade mark Loctite Coil reassembling adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 49: ...33 Fitting 1 4 VCR female 108500 C Purge port A B C D Whenever you return the product to an repair service center please make sure you follow the Service procedure and fill in the declaration of contamination found on our website Study the safety instructions related to preventive maintenance D 100 A Inlet port Risk of injury by cutting Contact with the pump rotor cell may cause cuts Alternatively...

Страница 50: ...the pump exhaust port Flush with dry nitrogen for 10 minutes Stop the nitrogen flow 30 10 N2 N2 D Purge port pressurisation Characteristics of dry nitrogen B 330 Install the pump under an extractor hood It must remain there throughout the operation Description P N DN 16 1 8 BSPT flange with anti suckback valve including an injector A458805 Injector 106859 Description P N Kit for DN 200 ISO F flang...

Страница 51: ...ontaminated pumps 3 Pressurize the pump Blank the inlet port and exhaust port Pressurize the pump with dry nitrogen to an absolute pressure of 110 kPa using the injector Characteristics of dry nitrogen B 330 N2 adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 52: ...g clip Remove the coil and replace it by a new one Put again the spring clip Install the new O ring on the M5 fitting Stick the first threads of M5 fitting with Loctite 542 glue Screw the M5 fitting and tighten it slightly with a 14 mm open end wrench Registered trade mark Loctite Coil reassembling adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 53: ...ce components ATP 2300 M Operating instructions Detailed contents F F 000 Spare parts Instructions of use Replacement of parts and use of non genuine parts F 100 First level maintenance parts adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 54: ...t genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides counterfeiting and unfair trading of parts are condemned under civil and criminal laws The manufacturer urges the user not to use imitation parts or the misappropriation and pirating of intellectual pr...

Страница 55: ...4 V DC 038066 Dust filter Replace regularly the dust filter when used in dusty air P N Dust filter 106229 A complete range of connecting accessories is available in the manufacturer s catalogue flanges fittings Water valve coil P N Coil 24 V DC 108667 adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 56: ...GB 02932 Edition 04 12 2012 1 1 Appendix ATP 2300 M Operating instructions Detailed contents G G 200 Service adixen Vacuum Products Operating Instructions ATP 2300 M ...

Страница 57: ...be accepted if they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substanc es and compounds in accordance with the hazardous goods regulations current version Neutralize the pump by flushing it with nitrogen or dry air Close all openings airtight Seal the pump or device in suitable protective film Return the pump device only in a suitable and s...

Страница 58: ... how and our portfolio of training opportunities We support you with your plant layout and provide opportunities We support you with your plant layout and provide first class on site service worldwide first class on site service worldwide Vacuum Solutions Vacuum Solutions from a single Source from a single Source Are you looking for a Are you looking for a perfect vacuum solution perfect vacuum so...

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