Adixen ACP 15 Скачать руководство пользователя страница 1 | Manualshive

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Содержание ACP 15

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Страница 2: ...first step was the founding of Alcatel Vacuum Products Hingham MA in the United States thirty years ago reinforced today by 2 others US subsidiaries in Fremont CA and Tempe AZ In Europe AVTF France headquarters and its subsidiaries Alcatel Hochvakuumtechnik Germany Alcatel Vacuum Technology UK Scotland Alcatel Vacuum Technology Benelux Netherlands Alcatel Vacuum Systems Italy and more recently Adi...

Страница 3: ... In order to guarantee per formance and obtain full satisfaction from this equipment we sug gest that you study this manual particularly chap ter B devoted to installa tion and start up before installing or performing maintenance on your pump APPLICATIONS ACP 15 ACP 28 AND ACP 40 DRY PRIMARY PUMPS FOR CLEAN APPLICATIONS Instrumentation Research and Development Semi conductors Load lock Transfer ch...

Страница 4: ...lectual property The use of Adixen products are subject to copyright and intellectual property rights in force in any jurisdic tion All rights reserved including copying this document in whole or any part without prior written authorization from Alcatel Vacuum Technology France Specifications and information are subject to change without notice by Alcatel Vacuum Technology France 2 2 Alcatel Vacuu...

Страница 5: ...C 20 Detailed description of RS 485 commands C10 Pump operations C20 Detailed descriptions of RS 485 commands D10Maintenancefrequency D 20 Instructions for cleaning E 00 Maintenance safety instructions F Non used G 10 ACP 15 15 G Pumping curves G 11 ACP 28 28 G Pumping curves G 12 ACP 40 40 G Pumping curves G 100 European Declaration of Conformity G 101 S2 Semi certificate G 200 Safety questionnai...

Страница 6: ...MANUAL REFERENCE 112369 EDITION 02 June 2008 General contents ACP Series User s Manual 2 2 Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 ...

Страница 7: ...ctrum free of traces of hydrocarbons Sealed air cooled motor permanent air cooling built in fan safety certified leaktight Single phase frequency converter multi voltage dual frequency 50 60 Hz 2 pump models according to different applications standard version G version Thermal protection based on temperature sensors RS 485 Serial link Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 1...

Страница 8: ...Model ACP 28 28 G 40 40 G overview Model ACP 15 15 G overview A10 ACP Series dry primary pump overview 2 2 ...

Страница 9: ...No contact design The rotors do not touch each other or the housing INLET The standard pumps are equipped with a gas ballast device to improve pumping of li ght gases and condensable vapors Thus avoiding condensation of pumped gases into the pump Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 1 ...

Страница 10: ...on Load lock and transfer chamber pumping Wafer back pumping G version for G version pump is compatible with the pumping of corrosive pumping of corrosive traces It is equipped with 3 gas purge circuits used to withstand gas traces or gas traces to protect the LP and HP ball bearings and the condensable gas pump thightness is reinforced This pump model can be used in applications such as Process m...

Страница 11: ...l value obtained after minimum 1 hour of pump warm up time 2 Relative nitrogen pressure 300 mbar 3 Oil charge has been introduced into oil casing at factory Don t modify this oil level Alcatel Vacuum Technology France User s manual ACP 15 28 40 Series 2 1 2 ...

Страница 12: ...Dimensional drawing mm inch ...

Страница 13: ...A 40 Technical characteristics ACP 15 ACP 15 G Gravity center and weight distribution Right wiew Front view 2 2 Alcatel Vacuum Technology France User s manual ACP 15 28 40 Series 2 ...

Страница 14: ...d seismic fixations We strongly advise you to secure the pump on the tool with 4 M6 x20 screws 2 screws per fixation plate minimum recommended Screw material must comply with foot load specifications given in the table below ...

Страница 15: ...al value obtained after minimum 1 hour of pump warm up time 2 Relative nitrogen pressure 300 mbar 3 Oil charge has been introduced into oil casing at factory Don t modify this oil level Alcatel Vacuum Technology France User s manual ACP 15 28 40 Series 2 1 2 ...

Страница 16: ...Dimensional drawing mm inch ...

Страница 17: ...A41 Technical characteristics ACP 28 28 G 40 40 G Gravity center and weight distribution Right wiew Front view 2 2 Alcatel Vacuum Technology France User s manual ACP 15 28 40 Series 2 ...

Страница 18: ...d seismic fixations We strongly advise you to secure the pump on the tool with 4 M6 x20 screws 2 screws per fixation plate minimum recommended Screw material must comply with foot load specifications given in the table below ...

Страница 19: ...A 50 Accessories Inlet filter Exhaust silencer Frequency converter interface plug Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 2 ...

Страница 20: ... supplied Wheel kit This kit includes 4 free castering wheels and connecting accessories that can be installed on pump frame and allows pump easy movement through an around cluttered areas It is compatible with ACP15 ACP28 and ACP40 pump models 2 2 Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 ...

Страница 21: ...B 00 Safety instructions Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 5 ...

Страница 22: ...B 00 Safety instructions Installation Start up ctd 2 5 Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 ...

Страница 23: ...B 00 Safety instructions Installation Start up ctd Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 3 5 ...

Страница 24: ...B00 Safety instructions Contact in case of emergency Operation ctd 4 5 Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 ...

Страница 25: ...Pump labels B 00 Safety instructions Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 5 5 ...

Страница 26: ...rage precautions for up to 3 months storage temperature between 14 F 10 C and 140 F 60 C and pump sealed For storage period of over 3 months we recommend to run the pump approximately 30 minutes with gas ballast opened or with a dry air flow case of G model and 30 minutes at ultimate pressure inlet gas ballast and gas line ports blocked Then stop the pump and store it with the inlet the exhaust th...

Страница 27: ...s on the type of accessories used and instructions the quality of the mechanical connection Determine where the pump will be placed Refer to dimensional diagram in section A 40 or A 41 Install the pump in a way that the Start Stop switch of the pump is accessible for the operator After pump connection it is necessary to perform a leak tightness test The pump must be operated in the horizontal posi...

Страница 28: ...riate inlet filters in order to protect the pump sectionA50 Also we advise to use clean fittings and pipings for connecting the pump to the installation When pumping on corrosive gas traces or aggressive gases pump G version the gas can cause injury or death The exhaust of the pump must be connected to an exhaust stack or an evacuation duct Make sure that the exhaust pressure does not exceed 1200 ...

Страница 29: ...ance of 3m 10 ft from the pump inlet Lock out tag out LO TO electrical device In order to properly secure the pump for installation and or maintenance it is required to lock out tag out the pump properly in accordance with OSHA requirement 29 CFR 1910 147 When switching off an item of equipment containing capacitors loaded at over 60 VDC or 25 VAC take precautions concerning the access to the conn...

Страница 30: ... Circuit breaker The motor is equipped with an electrical frequency converter which allows automatically low or high voltage pump running according to range voltage 110 V to 230 V 50 60 Hz The pump supplying cable is provided with the pump delivered The earthing of the pump frequency converter covers body of the pump is realized by the cable connected with the network customer The network customer...

Страница 31: ...remote control connector Remote control The pump can be used in remote mode using the Sub D connector principle at the rear of the pump Used by means of dry contacts Rotation speed remote control according to the table below 0 open 1 closed Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 3 ...

Страница 32: ...xcept Si 53 S4 and S5 Output S2 Do not connect a relay between the pins 5 and 6 The relay coil induces a current which may result in damage of the frequency converter unit Wiring of output 52 The maximum value of the current in the output must be of 35 mA 51 start stop 52 closed pump at speed 53 54 55 rotational speed selection Pin 8 10 12 and 14 are connected to the ground of the control unit Wir...

Страница 33: ...the nominal speed is reached the transistor becomes conductive on state and Vout 0 V As long as the nominal speed is not reached the transistor is blocked off state and Vout Vcc This circuit can not be used for power transfer For switching of power circuits an amplification stage is required Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 3 3 ...

Страница 34: ...s to control and monitor several pump in a network Transmission speed 9600 bauds Data Ienght 8 bits Parity none Stop bit 1 RS 485 serial link Several units up to 255 can be controlled on a single link It s a parallel type connection which allows communication in the network even if a pump is disconnected Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 1 ...

Страница 35: ... 1 ppm Pressure 1 5 bar absolute before the gas pressure reducing valve customer supply Connect the gas line supply to the R 1 4 connector provides on purpose with flexible or stainless steel pipe customer supply For optimum ball bearing protection the neutral gas pressure must be set to 0 3 bar relative pressure according to the flowrate value given in the table below Alcatel Vacuum Technology Fr...

Страница 36: ...e has decreased until the restart value It is the responsibility of the user to take all the measures required to prevent risks resulting from this type of operation The user must provide a device integrated in the equipment host tool to warn or to avoid this restart In local mode the pump can run only if the cover plug delivered with the pump is fitted on the remote control connector Wiring of th...

Страница 37: ...re to be taken by the user In order to better handle condensable vapours it is necessary to pump with a hot pump It is recommended to isolate the pump from the installation and let the pump run for at least 1 hour with gas ballast opened Then open the isolation valve the pump will operate in optimized conditions thus reducing the risk of condensation inside the pumping module Operation of gas ball...

Страница 38: ... ok or Err2 This command is used to allocate a specific number to each of the products making up a network It s i mportant to record each product address When the address of the product is unknown it s possible to recover the product address using ADR command but only this pump must be connected on the link RS 485 Syntax ADR CR LF chain of three ascii characters Result adr ok OK means command rece...

Страница 39: ... 40 or RVP 4800 rpm 80 Hz Note you must send the SBY command before changing the pump rotational speed using RPM command Result adr ok or adr Errx x 1 out of range 2 parameter error 3 context error SBY Switches the speed set point to the stand by value Syntax adrSBY CR LF Resets the stand by speed to the default value 35Hz for all pump models Result adr ok Note you must send the SBY command before...

Страница 40: ...f red LED 1 otherwise 0 4 motor temperature too high 1 3 motor current too high 1 2 reserved 0 1 reserved 0 0 reserved 0 zzzzzzalert bits 5 reserved 0 4 reserved 0 3 reserved 0 2 reserved 0 1 reserved 0 0 reserved 0 sssss current speed value in rpm codified on 5 decimal figures eg speed 05600 rpm sssss 05600 iiii Motor power in Watts codified on 4 decimal figures eg power 450 W iiii 0450 www reser...

Страница 41: ...For applications using G pump versions these values can be reduced Contact the support service Pump overhaul The full overhaul must be performed by manufacturer s trained personnel Contact nearest service center or the service support at the following e mail address support service adixen fr M Performed by the manufacturer Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Serie...

Страница 42: ...ning The outside covers of the pump can be clean with a fluffy free duster Use a cleaning product avoiding to damage the cover paint and stickers Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 1 1 ...

Страница 43: ...tical to the programmed values during process During pump removal operator could be in contact with process residues on the exhaust which could cause severe injury or death Ask your safety department for instructions according to the local statements Purge the installation with dry nitrogen Wear gloves protective glasses and if necessary a breathing mask Ventilate the premises well Do not dispose ...

Страница 44: ...ated pump Refer to safety instructions listed on page 1 Close the inlet and exhaust pipe of the pump with the following connecting accessories avalaible in manufacturer s catalog How us to contact The full overhaul must be performed by manufacturer trained personnel Contact manufacturer nearest service center or the service support at the following e mail address support service adixen fr 2 2 ...

Страница 45: ...G10 ACP 15 15 G pumping curves ...

Страница 46: ...G11 ACP 28 28 G pumping curves ...

Страница 47: ...G12 ACP 40 40 G pumping curves ...

Страница 48: ...changes in public low voltage supply NF EN 61000 4 2 EMC Immunity to electrostatic discharge NF EN 61000 4 3 EMC Immunity to radiated radio frequency electromagnetic field NF EN 61000 4 4 EMC Immunity to electrical fast transient burst NF EN 61000 4 5 EMC Immunity to surge NF EN 61000 4 6 EMC Immunity to conducted disturbances inducted by radio frequency fields NF EN 61000 4 11 EMC Immunity to sho...

Страница 49: ...G 101 52 SEMI Certificate 1 1 Alcatel Vacuum Technology France Manuel de l Utilisateur ACP 15 28 40 Series 2 ...

Страница 50: ...as pathogenic germs micro organisms bacteria viruses etc classes 1 to 4 and group E our Service Center is currently unable to decontaminate and recycle such material without risk to the safety of our staff Please contact us before sending the product to the Service center Radioactive In case of contamination our Service Center is currently unable to decontaminate and recycle such material without ...

Страница 51: ...STIONNAIRE Ce questionnaire est telechargeable sur le site www adixen com This questionnaire can be downloaded from www adixen com Procedure de retour des produits ADIXEN Ce formulaire ne peut etre rempli et signs que par une personne habilitee ...

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