20
P R O C E S S M A S T E R
W A F E R
F E
M
6 3 0
| COM/FE
M
630/E/MB
-
EN RE
V. A
…EtherNet/IP interface
EtherNet/IP Alarms FEP63x / FEH63x / FEW53x
Error messages of the FEP63x / FEH63x / FEW53x are displayed
as alarm bits. If an error occurs, one or more corresponding
warning and/or alarm bits are set. If an error disappears, one or
more corresponding warning and/or alarm bits are reset.
This data type also includes a byte enumeration at the
beginning which includes the device status:
• 0x00: NO Alarm
• 0x01: Check Function Alarm
• 0x02: Off Specification Alarm
• 0x03: Maintenance Alarm
• 0x04: Failure Alarm.