YOKOGAWA OX100, User Manual

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IM 11M10A01-01E-
• Keep the equipment away from noise-generating devices to minimize the possibility of
malfunction, although it is designed to cope with noise.
• The sensor has a limited life, which varies depending on operating conditions. It is
strongly recommended that you replace the sensor once a year from a preventive main-
tenance standpoint, even if sensor deterioration is not observed.
• Keep this instruction manual handy for your quick reference during operation and main-
tenance.
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Restrictions on Use
• Do not use the equipment in atmospheres containing combustible, corrosive, or flue gases,
or organic compounds.
• If it is used in silicon gas atmospheres, in flow furnaces or nitrogen reflow furnaces, the
equipment must be used in the following system:
• The sampling unit, K9424GA, must be used.
• The sampling unit requires appropriate maintenance, which is determined by gas
conditions. Filters and activated carbon packs should be replaced at intervals which depend
on the operating conditions.
For best measurement, use new activated carbon packs. Using expired packs may result in
invalid measurement results, or even sensor deterioration.
• If you have any questions, please contact your Yokogawa representative.
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How to Use This Manual
The structure of this manual is as shown in the table below. This table shows which chapters you
are recommended to read when performing the corresponding tasks.
Chapter to refer to: Unpacking
installation
Initial
setting
Daily
operation
Changing
settings
Maintenance
Maintenance
troubleshooting
Chapter 1. Overview
Chapter 2. Installation
Chapter 3. Operation
Chapter 4. Troubleshooting
Appendix 1. Sampling Unit
Appendix 2. Calibration Gas Kits
Safety precautions
CMPL (Parts List)
: Read and completely understand before operating the equipment.
: Read before operating the equipment, and refer to it whenever necessary.
4th Edition : Oct. 23, 2019-00