44
Abbreviation
Parts Name
MC1
Vacuum Pump Contactor
MC2
Film Motor Contactor
MC3
Bottom Chamber Motor (exit)
MC4
Bottom Chamber Motor (enter)
PR
Vacuum Pump Phase Reversal Relay
TR1 Timer
SC Sensor
Controller
F1 Fuse
SSR Solid
Relay
PW Power
Supply
TR2 Timer
RE1~RE4 Relay
PC PC
Board
H1 Temp.
Controller
Q1 Power
Switch
M3 Film
Motor
LS2
Limit Switch (Rear)
LS1
Limit Switch (Front)
M2
Bottom Chamber Motor
Y2
Gas Flushing Valve
Y1 Vacuum
Valve
Y4
Air Inlet Valve
Y5.1/ Y5.2/ Y3
Cylinder Valve
F Fan
CY1/CY2 Cylinder
Summary of Contents for TS420
Page 3: ...2 5 2 Airborne noise level 5 3 Storage condition 5 4 Operation environment ...
Page 5: ...4 Unit mm ...
Page 6: ...5 ...
Page 12: ...11 2 5 4 Warning sign WARNING ...
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Page 24: ...23 ...
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Page 44: ...43 ...
Page 46: ...45 A B C D E A B C D E CIRCUUIT DIAGRAM DATE NAME PROCESSED CHECKED STANDARD PAGE ...
Page 47: ...46 Q1 PC H1 EStop A B C D E A B C D E DATE NAME PROCESSED CHECKED STANDARD PAGE ...