Calibration, Maintenance, Troubleshooting and Warranty
Check Sample Orthogonality
Rev. B
MultiMode SPM Instruction Manual
283
15.3
Check Sample Orthogonality
Check the sample scan for orthogonality along both the X- and Y-axes. If the scan is aligned along
one axis of the scan but not another, it may be necessary to adjust the microscope’s
Orthogonality
parameter in the
Scanner Calibration
panel.
15.3.1
Measure Orthogonality
1. To measure a captured image’s orthogonality, view it using the
Offline
>
View
>
Top View
function.
2. On the display monitor, select the
Angle
command and use the mouse to draw a cursor
between the edges (or centers) of widely spaced pits (see
).
Figure 15.3a
Non-Orthogonal and Corrected, Orthogonal Image
Note:
In
, pits align with the vertical (slow) axis but skew with the
horizontal (fast) axis. The angle should be measured with the vertex near the
center of the image and the vertices in the upper-right or lower-left quadrant.
The angle displays on the white status bar at the bottom of the display monitor.
3. Use the mouse to drag the cursor until it is oriented correctly then read the angle off the status
bar. If the angle differs by more than a half degree, a correction is required; otherwise, move
on to the next step.
15.3.2
Adjust Sample Orthogonality
1. Click
Realtime
>
Microscope
>
Calibrate
>
Scanner
to access the
Scanner Calibration
panel. The
Orthogonality
parameter is displayed on the bottom-right corner of the panel.
2. Enter the difference between 90º and the angle measured in the
Top View
image.
Note:
For example, if the angle measured in the
Top View
image was 92.5º, enter a
value of
-2.5
º in the
Orthogonality
parameter.