Varian Turbo-V 2000 ICE Instructions For Use Manual Download Page 41

TECHNICAL INFORMATION 

 36 

87-900-915-01(E) 

ing temperature sensor, pin E is connected to the 
pump ground and pins J, K and L are spare. 

PUMP USED IN PRESENCE OF MAGNETIC 
FIELDS 

Magnetic fields induce eddy currents in the rotor of 
a turbomolecular pump that tend to oppose to its 
rotation. The result is increased electrical power 
consumption by the motor, most of which is dissi-
pated in the rotor. 

 

Since the rotor is not in contact with the stator the 
above power can leave the rotor mainly by radia-
tion and hence the rotor may be overheated while 
static parts of the pump remain cool. This effect is 
strongly dependant from the intensity, time func-
tion and distribution of the magnetic field. In gen-
eral, therefore, an increase in pump current can be 
expected.  
If this increase is lower than 50% of the current 
value drawn by the motor in high vacuum opera-
tion, no particular problem should be expected.   
However if the effect is grater, than the case 
should be carefully reviewed by Varian's specialist. 
As a matter of fact, in case of high magnetic fields, 
also important forces might be generated and ap-
plied to the rotor. 

If one temperature sensor is disconnected, the 
pump will not start. To prevent damage to the 
pump when the temperature exceeds 60° C, the 
sensor automatically cuts out the power supply. 

MOVING THE GAS PURGE VALVE AND 
FOREVACUUM PUMP CONNECTIONS 

All the pneumatic connections to the Turbo-V2000 
ICE pump can be moved to its bottom (see the fol-
lowing figure). 

 

ACCESSORIES 

DESCRIPTION PART 

NUMBER 

Inlet screen, ISO 250 

969-9350 

Heating jacket, 120 Vac 

969-9821 

Heating jacket, 220 Vac 

969-9820 

Water cooling kit for American fractional 
tubes 

969-9338 

Water cooling kit for Metric tubes 

969-9348 

Pump to controller cable 

969-9954 

Vent flange NW 10 KF (M8) 

969-9108 

Vent valve with fixed delay time 

969-9843 

Vent device with adjustable delay time 

969-9831 

Heavy duty vent valve 

969-9842 

Solid state flowmeter 1/4" Swagelock 

969-9114 

Solid state flowmeter KF16 

969-9115 

Monitor autodiagnostic unit 

969-9252 

Purge vent device 

969-9116 

Triscroll Dry Vacuum Pump PTS 600 
single phase, universal motor 

PTS06001UNIV 

Triscroll Dry Vacuum Pump PTS 600 3 
phase, universal motor 

PTS06003UNIV 

Dual stage rotary vane pump DS 602 
with single phase motor 

949-9335 

Dual stage rotary vane pump DS 602 
with 3 phase motor 

949-9336 

Dual stage rotary vane pump DS 1002 
with 3 phase motor 

949-9340 

To move the gas purge valve to the bottom of the 
pump make the following steps: 

1.  Unscrew the gas purge valve from the side of 

the pump 

2.  Unscrew the purge port cover on the bottom of 

the pump and screw it on the side 

3.  Screw the gas purge valve (with a torque of 2.5 

Nm) in the bottom of the pump. 

To move the forevacuum pump flange to the bot-
tom of the pump make the following steps: 

1.  Unscrew the three screws that fix the forevac-

uum blank flange to the bottom of the pump 

2.  Unscrew the three screws that fix the forevac-

uum flange to the side of the pump 

3.  Fix the forevacuum flange to the bottom of the 

pump using the relevant three screws 

4.  Fix the forevacuum blank flange to the side of 

the pump using the relevant three screws. 

For a complete overview of Varian's extensive 
product lines, please refer to the Varian catalog. 

Summary of Contents for Turbo-V 2000 ICE

Page 1: ...9127 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA...

Page 2: ...Turbo V 2000 ICE...

Page 3: ......

Page 4: ......

Page 5: ...9 WATER COOLING KIT INSTALLATION 30 VENT DEVICE INSTALLATION 31 VENT VALVE INSTALLATION 32 PUMP USED WITH CORROSIVE GASES 33 Gas Purge 33 Gas Purge Vent Device Description 33 Solid State Flowmeter Ins...

Page 6: ...azzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare...

Page 7: ...raffreddamento ad acqua durante le operazioni di riscaldamento PERICOLO Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare...

Page 8: ...und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltnisse vorliegen Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Nach extrem langer Lagerung mu die P...

Page 9: ...akuumkammer darf die Temperatur des Eingangsflanschs und des Rotors 120 C nicht berschreiten Vakuumsystemen die TP mit Was serk hlung arbeiten GEFAHR W hrend des Ausheizens d rfen weder die Pumpe noch...

Page 10: ...il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 C 70 C humidit relative 0 95 non condensante Si le temps d emmagasinage est tr s long mettre la pompe en marche...

Page 11: ...urs le refroidissement par eau pendant les op rations de chauffage DANGER viter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peu...

Page 12: ...n las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START...

Page 13: ...empre la refrigeraci n por agua durante las operaciones de calentamiento PELIGRO No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede pro...

Page 14: ...evem ser superadas as seguintes condi es ambientais temperatura de 20 C a 70 C humidade relativa 0 95 n o condensante Se o tempo de armazenagem for muito longo accionar a bomba em SOFT START ver manua...

Page 15: ...deve ultrapassar 120 C Utilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A eleva...

Page 16: ...belangrijke informatie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve v...

Page 17: ...sunit Tijdens het eventuele verwarmen van de vacu mkamer mag de temperatuur van de ingangsflens en de rotor niet meer dan 120 C bedragen Pas tijdens het verwarmen altijd waterkoeling toe GEVAAR Raak d...

Page 18: ...ade p udstyret BEM RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumperne skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20 C...

Page 19: ...en og rotoren ikke overskride 120 C Brug altid vandafk ling under opvarmningen ADVARSEL R r ikke ved turbopumpen eller eventuelt tilbeh r under opvarmningsman vrerne Den h je temperatur kan for rsage...

Page 20: ...ARING F ljande krav p omgivningsf rh llanden g ller vid transport och f rvaring av pumpen temperatur fr n 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter l ng f rvaring skall pumpen start...

Page 21: ...en ska temperaturen f r ing ngsfl nsen och rotorn inte verstiga 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r a...

Page 22: ...pfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre m pumpen MYKSTARTES se kontrollenhetens manual KLARGJ RE TIL INSTALLASJON Pumpen leveres i en spesi...

Page 23: ...ling under oppvarmingen ADVARSEL Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller...

Page 24: ...stoinnin aikana t ytyy seuraavien ymp rist koskevien ehtojen olla t ytettyin l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Jos varastointiaika on hyvin pitk tulee pumppu k ynnist SOFT STA...

Page 25: ...120 C K ytt k aina kuumentamisen aikana vett j hdytykseen VAARA lk koskeko turbopumppuun tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P...

Page 26: ...louqej periballontik j sunq kej qermokras a ap 20 C m cri 70 C scetik ugras a 0 95 asump knwth An o cr noj apoq keushj e nai pol makr j h antl a qa pr pei na teqe se k nhsh me tr po SOFT START bl pe...

Page 27: ...ta ugr y xh KINDUNOS KINDUNOS KINDUNOS KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH...

Page 28: ...TORAGE When transporting and storing the pumps the following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is...

Page 29: ...nd of the rotor must not exceed 120 C Always use the water cooling system during the heating operations WARNING Do not touch the turbopump or any of its accessories during the heating process The high...

Page 30: ...rced air cooling A water cooling kit is available to cool the pump in the cases where it is used under heavy load or when forced air is insufficient for cooling purposes Two thermistor sensors are mou...

Page 31: ...TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo V2000 ICE outline dimensions The dimensions arte indicated in mm inches 26 87 900 915 01 E...

Page 32: ...5 bar 45 to 75 Psi Bakeout tempera ture 80 C at inlet flange ISO flange 120 C at inlet flange CF flange Max rotor temperature 120 C Vibration level displacement 0 01 m at inlet flange Motor supplied...

Page 33: ...CAL INFORMATION Graph of compression ratio vs foreline pressure measured with vertical axis Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 28 87 900 91...

Page 34: ...h a 120 Vac power supplied controller mod 969 9449 CAUTION The use of a wrong supply voltage heating jacket model may cause a serious damage to both heat ing jacket and controller It is applied to the...

Page 35: ...338 metallic model and 969 9348 plastic model Model 969 9338 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be hel...

Page 36: ...LATION Assemble the seal ring and lock the vent device in position using the KF klamp The vent device mod 969 9831 allows to avoid undesired venting of the pump during a temporary power failure adjust...

Page 37: ...e mod 969 9843 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic vent operation Unscrew the threaded plug see figure below Tighten...

Page 38: ...ing figure or model 969 9115 operating in the range from 0 to 150 SCCM with Nitrogen and from 0 to 125 SCCM with Argon that connected to the controller can monitor the flow of the protective gas purge...

Page 39: ...for refer ence Ask VARIAN for proper temperature set ting Heater jacket must be always on even during start up and shutdown 1 Turbo V controller 2 Vent valve 3 Vacuum pump shut off valve optional Fil...

Page 40: ...mospheric pressure for a better bearing pro tection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures...

Page 41: ...Inlet screen ISO 250 969 9350 Heating jacket 120 Vac 969 9821 Heating jacket 220 Vac 969 9820 Water cooling kit for American fractional tubes 969 9338 Water cooling kit for Metric tubes 969 9348 Pump...

Page 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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