TECHNICAL INFORMATION
Pumping speed
N
2
: 1950 l/s
He: 2000 l/s
H
2
: 1500 l/s
Compression ratio
N
2
: >1 x 10
9
He: 2 x 10
6
H
2
: 2 x 10
5
Base pressure*
Minimum with recommended
mechanical forepump:
1 x 10
-9
mbar (< 1 x 10
-9
Torr)
Inlet flange
CFF 12" O.D.
ISO K 250
ISO F 250 bolted
Foreline flange
KF 40 NW
Rotational speed
33000 RPM
Start-up time
12 minutes
Recommended
forepump
DS 602
Operating position
Any
Cooling
requirements
Water (use water with electrical con-
ductivity
≤
500
µ
S/cm)
Coolant water
recommended: 100 l/h (0.45 GPM)
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout tempera-
ture
80° C at inlet flange (ISO flange)
120° C at inlet flange (CF flange)
Max rotor
temperature
120 °C
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Motor supplied
voltage
120 Vac, three phase, 550 Hz
Lubricant permanent
lubrication
Storage tempera-
ture
- 20° C to + 70° C
Weight kg (lbs)
ISO K 250: 44 (96.8)
ISO F 250 bolted: 48 (105.6)
CFF 12”: 55 (121)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
Graph of nitrogen pumping speed vs inlet pressure using the recommended mechanical forevacuum pump
27
87-900-915-01(E)
