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 page 145 of 152

Health and safety 

clearance form

Health and safety clearance form

1.  Device (Model):  ..................................................................................................................................................

2.  Serial no.:  ...........................................................................................................................................................

3.  Reason for return / malfunction:  .........................................................................................................................

 

   ............................................................................................................................................................................

4.  Has the device been used in a copper process step (e.g., semiconductor production): 

 yes    

 no 

 

      

5.  Substances (gases, liquids, solids, biological material, e. g. bacteria, viruses) in contact with the device / 

  which have been pumped:

   ............................................................................................................................................................................

   ............................................................................................................................................................................

   ............................................................................................................................................................................

   ............................................................................................................................................................................ 

6.  Risk level of the used biological material:                              

☐ 

none

☐ 

1

☐ 

2*

☐ 

3**

☐ 

4**

  *   Contact the VACUUBRAND service absolutely before dispatching the device.

  **  Devices which have been in contact with biological substances of risk level 3 or 4 cannot be checked, main- 

  tained or repaired. Also decontaminated devices must not returned to VACUUBRAND due to a residual risk.

7.  Radioactive contamination: 

         

 yes    

 no    

  

8.  Prior to return to the factory the device has been decontaminated: 

      

 yes    

 no

  Description of the decontamination method and the test / verification procedure:

   ............................................................................................................................................................................ 

   ............................................................................................................................................................................

9.  All parts of the device are free of hazardous, harmful substances:       

 yes    

 no

10. Protective measures required for service staff: 

 

   ............................................................................................................................................................................

11. If the paint is damaged, we wish a repaint or a replacement of parts for reason of appearance 

  (repaint and replacement at customer’s expense): 

         

 yes    

 no    

 

 

12. Legally binding declaration

  We assure for the returned device that all substances, which have been in contact with the device are listed in 

section 5 and that the information is complete and that we have not withheld any information. We declare that all 

measures - where applicable - have been taken listed in section “Repair - Maintenance - Return - Calibration”. 

By our signature below, we acknowledge that we accept liability for any damage caused by providing incom-

plete or incorrect information and that we shall indemnify VACUUBRAND from any claims as regards damages 

from third parties. We are aware that as expressed in § 823 BGB (Public Law Code of Germany) we are directly 

liable for injuries or damages suffered by third parties, particularly VACUUBRAND employees occupied with 

handling/repairing the product. Shipping of the device must take place according to regulations.

  Name: ..................................................................   Signature: ...........................................................................

  Job title: ...................................................................   Company’s seal: 

  Date: ........................................................................ 

  Release for repair grant by VACUUBRAND (date / signature)

:

 ...................................................................................................................

  Protective measures:    

☐ Protective gloves, safety goggles    ☐ Hood    ☐ External cleaning    

 

 

VACUUBRAND GMBH + CO KG

Alfred-Zippe-Straße 4  

97877 Wertheim - Germany

T +49 9342 808-5660  F +49 9342 808-5666

E-Mail: [email protected]

www.vacuubrand.com

Summary of Contents for MV 10C NT VARIO o.C.

Page 1: ...umping units Instructions for use Technology for Vacuum Systems ME 16C NT VARIO MV 10C NT VARIO MD 12C NT VARIO PC 3010 NT VARIO PC 3012 NT VARIO PC 3012 NT VARIO EK Peltronic PC 3016 NT VARIO Part I...

Page 2: ...phragm pump before leaving our factory is tested intensively including an endurance run of 14 hours Any faults even those which oc cur rarely are identified and can be eliminated immediately After com...

Page 3: ...equired measures must be applied Safety instructions for vacuum equipment FR Attention Le mode d emploi pr sent n est pas disponible dans toutes les langues d Union Europ enne L utilisateur ne doit me...

Page 4: ...tiende este manual En este caso se debe disponer de una traducci n t cnicamente correcta del manual completo El manual debe ser le do y entendido completamente y deben aplicarse todas las medidas de s...

Page 5: ...ente letto e compreso prima di operare con lo strumento e devono essere applicati tutti gli accorgimenti richiesti Istruzioni di sicurezza per apparecchi a vuoto JP KR LT D mesio is vadovas n ra patei...

Page 6: ...o ci przeczytana i zrozumiana przed podj ciem pracy z urz dzeniem oraz nale y podj wszystkie niezb dne kroki zwi zane z prawid owym uzytkowaniem Wskaz wki bezpiecze stwa do urz dze pr niowych PT Aten...

Page 7: ...opravljene pa moraja biti tudi vse potrebne meritve Varnostni nasveti za vakuumske naprave SK Upozornenie Tento manu l nie je k dispoz cii vo v etk ch jazykoch E U vate nesmie obsluhova zariadenie po...

Page 8: ...ion 1 switch off 2 press both 3 turn 4 press Portugu ycc Polski Nederl Suomi CVC 3000 V2 0 Deutsch English Fran ais Italiano Espa ol T rk e Portugu ycc Polski Nederl Suomi CVC 3000 V2 0 Deutsch Englis...

Page 9: ...s 26 Gas inlet temperatures 29 Wetted parts 31 Abbreviations 32 Pump parts 32 Use and operation 36 Installation 36 Vacuum connection inlet 37 Separator AK at the inlet 38 Connecting the outlet 39 Exha...

Page 10: ...Setting of the interface 84 Read commands CVC 2000 85 Write commands CVC 2000 86 Read commands CVC 3000 88 Write commands CVC 3000 90 Accessories Spare parts 93 Troubleshooting 96 Replacing the device...

Page 11: ...rs arising from the pump and the pumped substances VACUUBRAND disclaims any liability for inappropri ate use of these pumps and for damage from failure to follow instructions contained in this manual...

Page 12: ...d to address practices not related to personal injury Caution Hot surface Disconnect equipment from AC power Dispose of electronic equipment according to regula tions NOTICE Formatting used in this ma...

Page 13: ...hose deficiencies Replace the protective caps if the equipment is not used immediately Store the equipment in dry and non corrosive conditions see also Technical data pg 26 Do not use any damaged equi...

Page 14: ...Do not pump liquids Ensure that the pump is chemically resistant to the pumped substances prior to operation Use the equipment only as intended that is for genera tion measurement and control of vacu...

Page 15: ...ump without any me chanical contact other than the pump feet Comply with maximum permissible pressures at in let and outlet and with maximum permissible pres sure differences between inlet and outlet...

Page 16: ...larly for dust dirt Clean fan guard grills if necessary to avoid a reduction of ventilation Position the CVC 3000 controller and its vacuum line in such a way that condensate cannot flow towards the p...

Page 17: ...mity with regard to design type and model Directive EN 61010 1 gives in detail the conditions under which the equipment can be operated safely see also IP degree of protection Technical data pg 26 Ope...

Page 18: ...may lead to increased temperatures even to the point of exceeding the maximum permitted temperatures Check the inlet and outlet of the pump if there is a danger of forming deposits inside the pump e g...

Page 19: ...r otherwise remove any poten tially explosive mixtures at the outlet of the pump or dilute them to non explosive concentrations Never operate this pump if it has a damaged cord or plug If the pump is...

Page 20: ...d into the environment or into the pump housing or motor Comply with all notes regarding proper use of the pumps as well as operation and maintenance guid ance The residual leak rate of the equipment...

Page 21: ...f the pump do not cause burns Provide a suitable contact guard if necessary Ensure that the coolant outlet pipe at the waste vapor condenser is always free and that it cannot get blocked Prevent the b...

Page 22: ...om In normal use the lifetime of the diaphragms and valves is typically 15 000 operating hours Bearings have a typi cal durability of 40000 h Ensure that the pump cannot be operated acciden tally Neve...

Page 23: ...nents from the vacuum system Allow sufficient cooling of the pump Drain condensate if applicable Ensure that maintenance is done only by suitably trained and supervised technicians Ensure that the mai...

Page 24: ...which during normal operation explosive atmo spheres caused by gases vapors or mists normally don t occur or if they do occur are likely to do so only infrequently and for a short period only Equipme...

Page 25: ...mp achieves its specified ultimate vacuum is the pump s leak rate low enough to en sure that no explosive atmospheres will occur in the interior of the equip ment After any intervention at the vacuum...

Page 26: ...4 to 140 50 to 104 10 to 60 10 to 40 Permissible relative atmospheric moisture during operation no condensation 30 to 85 Maximum permissible installation altitude above mean sea level ft m 6500 2000 R...

Page 27: ...thread G 1 2 A weighted emission sound pressure level uncertainty KpA 3 dB A dB A 56 50 Dimensions L x W x H approx in mm 21 0 x 10 2 x 16 5 533 x 260 x 420 Weight approx lbs kg 61 9 28 1 Type PC 301...

Page 28: ...e with gas ballast Torr mbar 2 2 3 Maximum permissible range of supply voltage 10 Attention Observe specifications of rating plate 200 230 V 50 60 Hz Maximum rated motor current at 200 230 V 50 60 Hz...

Page 29: ...mping potentially explosive atmospheres 50 F to 104 F 10 C to 40 C Operating condition Inlet pressure Permitted range of gas temperatures at inlet Continuous operation 75 Torr 100 mbar high gas load 5...

Page 30: ...adjustment and at constant temperature 0 75 Torr 1 mbar Temperature coefficient 0 07 mbar K 0 05 Torr K Ambient temperature range operation 50 F to 104 F 10 C to 40 C Ambient temperature range storage...

Page 31: ...reinforced Outlet hose nozzle at outlet PP Exhaust waste vapor condenser catchpot Borosilicate glass Overpressure safety relief device Silicone rubber PTFE foil Outlet of exhaust waste vapor condense...

Page 32: ...alkane PP Polypropylene PPS Polyphenylene sulfide PTFE Polytetrafluoroethylene Position Component 1 Inlet 2 Outlet 3 ON OFF switch 4 Mains connection 5 Fuse holder 6 Pump rating plate 7 Fan 8 Handle 9...

Page 33: ...page 33 of 152 ME 16C NT VARIO MD 12C NT VARIO MV 10C NT VARIO 9 8 1 2 8 17 16 17 5 3 6 4 7 7 PC 3016 NT VARIO PC 3012 NT VARIO PC 3010 NT VARIO 9 8 10 14 13 15 1 2 8 11 12 17 16...

Page 34: ...page 34 of 152 1 8 2 9 18 PC 3012 NT VARIO EK Peltronic 12 11 16 8 17 3 4...

Page 35: ...t valve serial interface RS 232 C Rear side CVC 3000 rating plate Depending on technical version the connections of the VACUU BUS ca bles are equipped with a nib When connecting the VACUU BUS connecti...

Page 36: ...turvallisuustiedot Sigurnosne napomene za vakuumske ure aje A v kuum k sz l kekkel kapcsolatos biztons gi tudnival k Istruzioni di sicurezza per apparecchi a vuoto Vakuumin s rangos saugos informacija...

Page 37: ...pipes Note Flexible elements will compress or flatten when evacuated if not designed for use under vacuum Hose connections at the pump inlet must al ways be gas tight Use a suitable adapter to connect...

Page 38: ...of the pump especially if the gas ballast valve is open If this constitutes a potential source of danger take appropri ate safety measures When assembling ensure vacuum tightness After as sembly check...

Page 39: ...e g into a fume hood Never block the gas outlet The exhaust line must always be free of obstructions no back pressure to ensure an unimpeded discharge of gas The cross section of the outlet tubing mus...

Page 40: ...hattering in case of break age or implosion Assemble the catchpot at the exhaust waste vapor condenser using a joint clip over pressure safety relief device Check the overpressure safety relief device...

Page 41: ...ge Only install the optional coolant valve in the supply line of the exhaust waste vapor con denser Note Install the hoses of the cooling system in a way to avoid the flow dripping of con densed water...

Page 42: ...ic emission condenser and observe the instructions contained in that manual NOTICE Catchpot The catchpot is coated with a protective layer to protect against shattering in case of break age or implosi...

Page 43: ...ion for PTFE tube I D 3 8 O D 5 16 10 8 mm via hose or PTFE tubing to the vacuum application The cross section of the tubing should be as large as possible Inside a vacuum system where evaporation occ...

Page 44: ...the pressure transducer if necessary See section Cleaning the pressure transducer pg 82 NOTICE Connect the CVC 3000 controller to the VACUU BUS cable of the NT VARIO pump Attention Do not apply off a...

Page 45: ...Accessories Spare parts pg 93 The vacuum controller CVC 3000 controls VACUUBRAND diaphragm pumps NT VARIO and optional coolant and venting valves Connected components e g venting valve external press...

Page 46: ...is adequate especial ly if the ambient temperature is elevated max 104 F 40 C If the pump is installed at an altitude of more than 6500 ft 2000 m above mean sea lev el check compatibility with applica...

Page 47: ...in the winding Note Only manual reset is possible Press the START STOP key at the controller to confirm the error message Switch off the pump and disconnect from the power source Identify and eliminat...

Page 48: ...last This constitutes a risk of significant damage to equipment and or facilities a risk of per sonal injury or even loss of life Make sure that air gas intake through the gas ballast valve can never...

Page 49: ...eases the solvent recovery rate at the exhaust waste vapor condenser In case of condensation In case of condensation Check the liquid lev el in the catchpots during operation Check the liquid level in...

Page 50: ...run at atmo spheric pressure for a few minutes Has the pump been exposed to media which may damage the pump materials or form deposits Check and clean pump heads if necessary Has the pressure transdu...

Page 51: ...preselected function and the pressure reading Attention Do not assemble or remove plug connections off axis Orient the plug correctly before inserting To connect additional components use VACUU BUS Y...

Page 52: ...nge of value and to reach further parameters or to leave the set up menu Pump down Vac control Auto mode only with NT VARIO pump Program VACUULAN Configuration Selected function displayed in the upper...

Page 53: ...NT VARIO pump Pump down continuous pumping Process runtime only if process control is running 5 In line valve switched on Level sensor activated catchpots need to be emptied Peltronic emission conden...

Page 54: ...re chosen appropriately it is possible to start imme diately if similar operating conditions are desired The controller features five functions and one configuration menu see section Menu guide Each o...

Page 55: ...ntrol pump based on time and pressure preselections or Auto mode Coolant valve Venting valve VACUULAN Use continuous speed control to manage NT VARIO pumps based on pressure and time preselections Coo...

Page 56: ...c Back Function Pump down Vac control Auto mode Program VACUULAN Configuration Back MODE Menu guide Configuration Adjustment 743 Torr RS 232 Sensors Display Autostart Off Defaults Cancel Back VACUULAN...

Page 57: ...ration Off Graphic Back Function Pump down Vac control Auto mode Program VACUULAN Configuration Back Program Edit Open 0 Store 0 Delay Off Graphic Back 1013 2 Auto mode mbar Auto mode Sensitivity norm...

Page 58: ...Minimum is adjustable in a range of 1 795 Torr 1 1060 mbar or can be set to Off A preset Duration process time has no effect if the process is stopped due to a preset Minimum before Duration is reache...

Page 59: ...key The controller switches to Vac control function the current vacuum is used as set value Pressing MODE key again switches to Auto mode function The controller adapts the boiling pressure starting f...

Page 60: ...of 1 100 or can be set to HI The selection HI recommended provides the optimum pumping speed of the pump and therefore an optimum ultimate vacuum Maximum An upper pressure limit can be preselected The...

Page 61: ...ction knob twice to return to the standard display Temporarily switching from Vac control to Auto mode while pro cess control is running Press MODE key The controller switches to Auto mode and adapts...

Page 62: ...vacuum can be fine adjusted by turning the selection knob while process is running Turn the selection knob A full turn causes a change of the set vacuum of 9 Torr 12 mbar Turning the knob one detent...

Page 63: ...meters determined during the pro cess Only in case of very sensitive processes is it advisable to reduce the maximum speed Minimum If the vacuum value reaches Minimum the process is stopped Use Minimu...

Page 64: ...DE key The controller switches to Vac control The cur rent pressure value is used and held as new set point The preset function of the controller does not change due to this tem porary switching When...

Page 65: ...fast as possible to the preset vacuum level As soon as the vacuum level is reached the time meter starts running Auto Auto indicates that the system will search for a boiling point automatically and w...

Page 66: ...r and the step number in that program along with the vacuum setting the actual current pressure and the actual runtime are displayed across the top The timeline in the diagram adapts automatically to...

Page 67: ...anges in the boiling point The following step starts either 1 once the cumulative process time reaches the set limit 1 hour 60 minutes even if the preset pressure 2 Torr mbar hPa has not been reached...

Page 68: ...in the range of 1 795 Torr 1 1060 mbar Switch on the higher switching value If the pressure exceeds this pressure pumping down starts again The Switch on pressure is adjustable in the range of 2 795 T...

Page 69: ...00 VACUULAN Set vacuum 19 Torr Switch on 150 Torr Delay 15 min Graphic Back 00 00 00 When selecting Graphic the display shows a pressure vs time curve The timeline in the diagram adapts automatically...

Page 70: ...vent Start process by pressing START STOP key alternatively Select Vac control function Set Set vacuum to a value which does not lead to evaporation of the solvent If necessary set value for Speed hig...

Page 71: ...ommended Select Auto mode Start process by pressing START STOP key The Auto mode allows a fully automatic distillation even if the boiling vacuum is unknown In case of solvent mixtures the vacuum is r...

Page 72: ...tion knob Pressing MODE key a second time switches to Auto mode causing the vacuum level to be automatically adapted to changes of the boiling pressure alternatively Select Vac control function Set a...

Page 73: ...also know as a rough ing pump or backing pump for a high vacuum pump e g turbo molec ular with high fore vacuum tolerance Use Pump down function with Speed set to HI or Use Vac control function with...

Page 74: ...t is possible Torr is displayed RS 232 Configuration of the interface setting of parameters and com mands see section Interface Baud rate can be set to 19200 9600 4800 or 2400 parity on 8 N 1 7 O 1 or...

Page 75: ...rovide appropriate safety measures If necessary the user has to check prior to starting the process if the option Autostart is enabled Defaults If Defaults is set to Load the controller is reset to fa...

Page 76: ...nce Speed controlled chemistry diaphragm pumps and chemistry pumping units Instructions for use Technology for Vacuum Systems ME 16C NT VARIO MV 10C NT VARIO MD 12C NT VARIO PC 3010 NT VARIO PC 3012 N...

Page 77: ...ps 26 Gas inlet temperatures 29 Wetted parts 31 Abbreviations 32 Pump parts 32 Use and operation 36 Installation 36 Vacuum connection inlet 37 Separator AK at the inlet 38 Connecting the outlet 39 Exh...

Page 78: ...Setting of the interface 84 Read commands CVC 2000 85 Write commands CVC 2000 86 Read commands CVC 3000 88 Write commands CVC 3000 90 Accessories Spare parts 93 Troubleshooting 96 Replacing the device...

Page 79: ...Torr 20 to 700 mbar no adjustment is possible Torr is displayed NOTICE Adjustment at atmospheric pressure An adjustment at atmospheric pressure is only possible if the pressure is higher than 525 Torr...

Page 80: ...adjustment under vacuum to a pres sure 0 1 Torr mbar adjustment to a pre cisely known reference pressure within the range of 0 15 Torr 20 mbar is possible Evacuate the measurement connection of the CV...

Page 81: ...r D K 15154 01 The DAkkS is signatory to the multilateral agreements of the European cooperation for Accreditation EA and of the International Laboratory Ac creditation Cooperation ILAC for the mutual...

Page 82: ...me Observe all regulations concerning usage and disposal of sol vents Drain the solvent and dispose of in accordance with regulations Repeat cleaning if necessary Rinse the measurement chamber several...

Page 83: ...ctrically isolated from the measuring circuit The controller is fully operable via the serial interface Measuring results preselections and the status of the controller can be read at any time The fac...

Page 84: ...rol ler to Remote off in menu configuration Switch off the controller Then switch the controller back on and press the selection knob within 2s A maximum of ten commands per second is possible Read co...

Page 85: ...aloperation mode pressure transducer last command to interface incorrect IN_STAT status of process control 0XXX 1XXX X0XX X1XX XX00 XX01 XX02 XX03 XX10 XX11 XX20 XX21 XX22 XX23 XX30 XX31 XX32 XX33 coo...

Page 86: ...lection see respective function for parameter range OUT_SP_V set vacuum with venting XXXX unit mbar Torr hPa according to pre selection see respective function for parameter range OUT_SP_2 set frequen...

Page 87: ...cted the user has to ensure that no dangerous status of the system can occur due to the change of the mode of operation and must take appropriate safety precautions especially if selecting remote oper...

Page 88: ...X XXXXXXXXX0XXXXXX XXXXXXXXX1XXXXXX XXXXXXXXXX0XXXXX XXXXXXXXXX1XXXXX XXXXXXXXXXX0XXXX XXXXXXXXXXX1XXXX XXXXXXXXXXXX0XXX XXXXXXXXXXXX1XXX XXXXXXXXXXXXXyXX XXXXXXXXXXXXXXyX XXXXXXXXXXXXXXX0 XXXXXXXXXXX...

Page 89: ...XXXXXX X1XXXXXXX XX0XXXXXX XX1XXXXXX XXX0XXXXX XXX1XXXXX XXXX0XXXX XXXX1XXXX XXXXX0XXX XXXXX1XXX XXXXXX0XX XXXXXX1XX XXXXXXX0X XXXXXXX1X XXXXXXXX0 XXXXXXXX1 no fault at pump fault at pump no fault at...

Page 90: ...0 9 venting valve in program step y 0 9 IN_SP_P4y Step 0 1 no Step in program step y 0 9 Step in program step y 0 9 IN_SP_P5y Auto 0 1 no Auto in program step y 0 9 Auto in program step y 0 9 IN_PV_S...

Page 91: ...9 OUT_SP_P1y time XX XX XX XX XX XX total runtime until program step y 0 9 or time for program step y 0 9 additive OUT_SP_P2y pressure XXXX pressure at program step y 0 9 unit according to preselecti...

Page 92: ...ion interferes with a locally operated active process With command ECHO 1 a return value can be activated at write com mands A return value is only given if the command is performed cor rectly After b...

Page 93: ...able RS 232C 9 pin Sub D 637837 Installation set CVC 3000 clips and screws 636593 Level sensor control of liquid level in catchpots 699908 VACUU BUS Digital I O Module 636228 e g fault indicator remot...

Page 94: ...e DN 15 mm PP 662808 Adapter small flange KF DN 25 2x connection for PTFE tube I D 3 8 O D 5 16 10 8 mm PP incl centring ring with FEP coated seal ring 667052 PTFE hose KF DN 25 1000mm 686033 Vacuum v...

Page 95: ...om Vacuum distribution The VACUU LAN modules allow process ori ented flexible and cost effective connections according to your requirements One vacuum pump can support several workstations Con tact VA...

Page 96: ...Check current draw of the connected devices Short circuit at connect ed valves Replace valves Short circuit at the RS 232 plug Check plug and cable Other than above men tioned causes Contact local di...

Page 97: ...valve or use new valve or reconfigure with out valve Warning triangle and pump symbol are flashing six blips NT VARIO pump and VMS Vacuum Man agement System con nected Remove VMS Restart controller F...

Page 98: ...its ultimate vacuum or usual pumping speed Centring ring at small flange connection not correctly positioned or leak in the pipeline or vacuum system Check pump directly connect CVC 3000 di rectly at...

Page 99: ...ping disc loose Perform maintenance Other than above men tioned causes Contact local distributor Pump seized Contact local distributor A service manual with exploded view drawings spare parts list and...

Page 100: ...ns two fuses of the same type Replace the defective fuse by a fuse of the same type see Technical data pg 26 Insert the fuse holder into the housing until it snaps Switch off the pump Disconnect the e...

Page 101: ...ors to discharge Ensure that the pump cannot be operated accidentally Note The pump might be contaminated with the pro cess chemicals that have been pumped during opera tion Ensure that the pump is de...

Page 102: ...ing circumstances it may be efficient to check and clean the pump heads on a regular basis In normal use the lifetime of the diaphragms and valves is typically 15 000 operating hours Prevent internal...

Page 103: ...3 of 152 Tools required metric Torx driver T10 T20 3 4 5 mm wide Allen key 2 5 mm wide slotted screwdriver Flat pliers Phillips screwdriver size 1 2 Diaphragm key width 66 mm Disassembling the pump ho...

Page 104: ...page 104 of 152 2 3 size 1 2x 4...

Page 105: ...page 105 of 152 6 5 7 4 4x...

Page 106: ...page 106 of 152 9 8 1 2 2 5 mm 2 5 mm 10 ME 16C NT VARIO MD 12C NT VARIO MV 10C NT VARIO...

Page 107: ...page 107 of 152 11 9A 2 5 mm Emission condenser Peltronic Emission condenser Peltronic 4 2x 10A...

Page 108: ...page 108 of 152 12 Emission condenser Peltronic 4 4x 11A 13 4 2x...

Page 109: ...page 109 of 152 15 14 4 4x Don t loosen this screw 15A 16...

Page 110: ...page 110 of 152 16 17 5 2x 15A 1 2 3 1 4 1 4 3 2x 5...

Page 111: ...page 111 of 152 19 20 18 5 2x...

Page 112: ...Position Component 1 Clamping bracket 2 Disc spring 3 Valve head 4 O rings 5 Valves 6 Head cover 7 Diaphragm clamping disc with square head screw 8 Diaphragm Position Component 9 Diaphragm support dis...

Page 113: ...page 113 of 152 21 2 5 mm Replacing the diaphragms 22 23 696867 696839 Clean 5 8x...

Page 114: ...page 114 of 152 24 25 26 1 2...

Page 115: ...page 115 of 152 27 3 28 29 Pay attention to number of washers...

Page 116: ...page 116 of 152 30 31 32 1 2 Pay attention to number of washers 4 4 ft lbf 6 Nm It is recommended to use a torque wrench Attach torque wrench to diaphragm key hexagonal bolt 6 mm wide...

Page 117: ...page 117 of 152 33 34 35 Replacing the valves 5 8x Screw in diagonally at first slightly then tighten 8 9 ft lbf 12 Nm T20 4x...

Page 118: ...page 118 of 152 36 37 38 Clean...

Page 119: ...page 119 of 152 39 40 41 IN IN EX EX 696867 696839 4x...

Page 120: ...page 120 of 152 42 43 44 IN EX T20 4x 2 2 ft lbf 3 Nm...

Page 121: ...page 121 of 152 45 46 47 Maintain all pump heads in the same way...

Page 122: ...page 122 of 152 48A 48B 48C ME 16C NT VARIO PC 3016 NT VARIO MD 12C NT VARIO PC 3012 NT VARIO MV 10C NT VARIO PC 3010 NT VARIO...

Page 123: ...page 123 of 152 48D ME 16C NT VARIO MD 12C NT VARIO MV 10C NT VARIO PC 3016 NT VARIO PC 3012 NT VARIO PC 3010 NT VARIO...

Page 124: ...f 152 1B ME 16C NT VARIO MD 12C NT VARIO MV 10C NT VARIO size 2 2x Replacing the valve at the distributor not ME 16C NT VARIO PC 3016 NT VARIO 1 2 5 mm 1A 2 5 mm ME 16C NT VARIO MD 12C NT VARIO MV 10C...

Page 125: ...page 125 of 152 2 size 2 2x 3 4A Version A valve 24 4 mm...

Page 126: ...page 126 of 152 5A 696839 24 4 mm 26 mm 4B 5B 696839 37 mm 40 mm Version B valve 37 mm...

Page 127: ...page 127 of 152 6 7 size 2 2x 7A ME 16C NT VARIO MD 12C NT VARIO MV 10C NT VARIO size 2 2x...

Page 128: ...page 128 of 152 8 9 Do not operate the pump without pump housing Danger due to freely rotating fan Risk of overheating due to missing cooling air guide...

Page 129: ...page 129 of 152 49 Assembling the pump housing 50 51 5 2x 8 9 ft lbf 12 Nm...

Page 130: ...page 130 of 152 52 53 54 5 2x 8 9 ft lbf 12 Nm...

Page 131: ...page 131 of 152 55 55A 1 2 3 3 2x 55A 56...

Page 132: ...page 132 of 152 56 4 4x 3 7 ft lbf 5 Nm 58 4 4x 3 7 ft lbf 5 Nm 57 4 2x 3 7 ft lbf 5 Nm...

Page 133: ...page 133 of 152 59 60 61...

Page 134: ...page 134 of 152 Emission condenser Peltronic 59A 60A Emission condenser Peltronic 4 2x Emission condenser Peltronic 61A...

Page 135: ...page 135 of 152 62 63 4 4x 3 7 ft lbf 5 Nm 64...

Page 136: ...page 136 of 152 65 66 67 size 1 2x...

Page 137: ...page 137 of 152 68 69...

Page 138: ...this does not change after the break in period Check hose connectors at pump heads for leaks If necessary recheck valve seats and pump chambers Checking the ultimate vacuum After any intervention at...

Page 139: ...page 139 of 152 Replacing the overpressure safety relief device at the exhaust waste vapor condenser 1 2 T20 4x size 1 4x 3...

Page 140: ...page 140 of 152 4 638821 638821 5 6...

Page 141: ...page 141 of 152 7 T20 4x size 1 4x 8...

Page 142: ...ired Also decontaminated devices must not returned to VACUUBRAND due to a residual risk The same conditions apply to on site work No repair maintenance return or calibration is possi ble unless the co...

Page 143: ...ce parts for cosmetic reasons at your request and at your expense Before returning the device Pack the device properly if necessary please order origi nal packaging materials at your costs Mark the pa...

Page 144: ...ormal wear and tear of wearing parts such as diaphragms seals valves vanes condensers oil and the breakage of glass or ceramic parts for the consequences of chemical electrochemical or electrical infl...

Page 145: ...for reason of appearance repaint and replacement at customer s expense yes no 12 Legally binding declaration We assure for the returned device that all substances which have been in contact with the...

Page 146: ...e rating plate Voir plaque signal tique Angewandte harmonisierte Normen Harmonized standards applied Normes harmonis es utilis es DIN EN 12100 2011 DIN EN 61010 1 201 IEC 61010 1 2010 Ed 3 DIN EN 1012...

Page 147: ...l Protection Use Period EPUP EPUP defines the period in years during which the hazardous substances contained in electrical and electronic products will not leak or mutate under normal operating condi...

Page 148: ...disclosures in the above table the subassemblies are not intentionally manufactured or formulated with lead Pb mercury Hg cadmium Cd hexavalent chromium Cr VI polybrominated biphenyls PBB and polybrom...

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Page 151: ...page 151 of 152...

Page 152: ...efore strictly the users responsibil ity to very carefully check the application of these data to their specific requirements No claims arising from the information provided in this lit erature will c...

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