Table of Contents
ORDER PAGE
1. GENERAL CONSTRUCTION
1.1 GENERAL 4
1.2 CONSTRUCTION 4
1.3 SPECIFICATION
5
1.4 PIPING PROGRAM 6
1.5 PURGES 6
2. HANDLING PROCEDURE
2.1 ASSEMBLY OF PIPING 8
2.2 PIPING WORK 8
2.3 LINKAGE
9
2.4 PREPARATION FOR OPERATION 9
2.5 OPERATION 9
2.6 STOPPING 10
2.7 LUBRICATION
10
3. MAINTENANCE AND INSPECTION
3.1 GENERAL 11
3.2 PERIODICAL INSPECTION 11
3.3 GUARANTEE 19
4. TROUBLE SHOOTING 20
5. VACUUM SYSTEM CHECK LIST 21
6. SPARE PARTS 22
7. PARTS ASSEMBLY DRAWING
