RF
POWER
SUPPLY
～
RFS-03D
～
INTRODUCTION
i
INTRODUCTION
Thank you for purchasing our product.
This manual is intended to serve as a guide for safe and efficient use of this product. It contains important
information, such as cautions and operating, inspecting and maintenance procedures that are required in using
this product. Carefully read this manual and fully understand them before operation to prevent accidents and
troubles.
Read this manual before operation and fully understand operating, inspecting and maintaining
procedures.
Do not operate this product before you fully understand them.
Read this manual until you fully understand it and can operate the product correctly.
Carefully read and fully understand
Safety Cautions
and
Safety
.
Keep this manual at your hand for immediate reference.
If this product is moved to other location, attach this manual to it.
The contents of this manual are subject to change without notice for improvement.
If you come up with any question or trouble, contact your local ULVAC representative or
ULVAC,Inc. .
Always use the product safely and take care of it correctly.
The contents of this manual are subject to change without notice for improvement.
All contents on this instruction manual are the copyright of ULVAC inc. .
Copying some or all of this instructions manual is forbidden without permission of ULVAC
Inc.
It is forbidden to use this instruction manual for other product or without agreement of
ULVAC Inc.
No part of this instruction manual is copied or reproduced for use by a third party without
ULVAC consent
