RF
POWER
SUPPLY
～
RFS-03D
～
6．TROUBLESHOOTING
14
No.
Trouble symptom
Confirmation item
Possible cause
Corrective action
③
RF is ON but POWER
cannot be set.
Check the setting
of the power supply
The setting of
POWER CONT.
LOCAL/REMOTE is
inappropriate
Set it properly.(Refer to 4.1)
Internal OSC(standard)
is used
Trouble inside power
supply
There is a possibility of the
power supply breakdown
→Contact ULVAC
Purchased with
external OSC(option)
and remodeled
The cable for
external OSC is not
plugged in or
external OSC
does not operate
Check external OSC line
④
Shortly after RF is
ON, FAILURE LED
lights, and then RF is
tuned OFF
As soon as the power
switch is on again,
FAILURE LED lights
The temperature
rise inside power
supply
Check power supply
surrounding clearance and
whether FAN operates.
If the power switch is
on again, LED does
not light.
However shortly after
RF is ON, FAILURE
LED lights
Trouble inside power
supply
There is a possibility of the
power supply breakdown
→Contact ULVAC
⑤
RF output is on but
deviates from the
setting power.
Confirm external
input voltage, in case
POWER CONT is
remote controlled.
Failure of external
input voltage
Check external input voltage
and correct it.
LED inside power
supply lights
(Confirm it through
the punching hole of
the front panel.）
Cause of device
side, such as load
short-circuit
Check the load.
Trouble inside power
supply
There is a possibility of the
power supply breakdown
→Contact ULVAC
LED inside power
supply does not light
Trouble inside power
supply
There is a possibility of the
power supply breakdown
→Contact ULVAC
