Page 1: ...RF0024E 03 INSTRUCTION MANUAL RF POWER SUPPLY MODEL RFS 03D 3rd version 2023 07 01 ULVAC Inc Read this manual before operation this product Keep this manual at your hand for immediate reference...
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Page 3: ...Carefully read and fully understand Safety Cautions and Safety Keep this manual at your hand for immediate reference If this product is moved to other location attach this manual to it The contents of...
Page 4: ...on or inadequate maintenance or inspection Never try to operate the product before you read sections on operation inspection and maintenance and fully understand them Safety denotations are used throu...
Page 5: ...eg ree of injury or of serious damage to the product If you disagree with this caution it is possible that operator receives a minor injury or that this product comes down or needs adjustment Although...
Page 6: ...ill be repaired Return shipping expenses are borne by the customer Warranty disclaimer 1 A system that has exceeded the warranty period 2 Malfunction or failure caused by natural disasters like fire w...
Page 7: ...tanding or misjudgment and allow us to take quick actions for repair If you encounter any trouble or come up with any question please contact your local ULVAC representative In your service call pleas...
Page 8: ...3 SPECIFICATION OF POWER SUPPLY MAIN BODY 4 ASSIGNMENT OF EXTERNAL CONTROL TERMINAL PINS 5 PREPARATION 6 ACCESSORIES 6 NAME AND FUNCTION OF THE PRODUCT PARTS 6 INSTALLATION THE PRODUCT 7 OPERATION 10...
Page 9: ...from a power supply used when operating the product is danger enough to endanger human lives Take great care for handling If perchance human touch such voltage serious accident is led Take great care...
Page 10: ...er supply is inscribed the serial number of the power supply See to it that it is always legible Figure Location of warning labels and nameplate CONTACT INFORMATION If you encounter any trouble come u...
Page 11: ...ystem include the following All solid state type Featuring small size and high reliability by quartz crystal oscillation Cooling water is not needed because of air cooling COFIGURATION This system con...
Page 12: ...ut Power monitor accuracy Within 5 of the rated output Maximum reflected power 50 W RF output connector BNC connector External OSC Input impedance 50 Input level 10 3dBm Input connector UM QR connecto...
Page 13: ...ut When INTLOCK is released when RF ON is available contact point closes 7 8 FAILURE When ALARM is output contact point closes 10 9 Pf monitor Pf power monitor Voltage DC 0 to 10V 0 to rated Pf power...
Page 14: ...witch that starts this power supply RF ON OFF REMOTE LOCAL switching Switch that selects whether REMOTE external control or LOCAL power supply front panel for RF ON OFF Lights green when REMOTE mode i...
Page 15: ...pins 14 15 MBX connector Connect the CONTROL connectors on the matching box MBX002M EXT OSC IN connector Connector for input of signal from external OSC option Fan Cools the power supply interior INST...
Page 16: ...e power supply See Fig 3 4 below Also provide a clearance for air intake around the power supply And when using rack mount enable to ventilate enough in order that the temperature in a rack does not e...
Page 17: ...nect the wiring referring to Fig 2 1 and Fig 3 6 2 Wiring of input power WARNING First connect the connector of the supplied input cable to the RF power supply and then connect the other end Turn OFF...
Page 18: ...K LED lights Meanwhile confirm whether FAN turns If doesn t light efer to Chapter 6 troubleshooting Turn on RF ON OFF switch Green lights when RF is ON If the POWER SET switch is turned gradually cloc...
Page 19: ...ION 11 Fig 4 1 Power supply switch position Table 4 1 Switch names Name POWER switch RF ON OFF REMOTE LOCAL switching POWER CONT REMOTE LOCAL switching RF ON OFF switching POWER SET Pf MONITOR Pr MONI...
Page 20: ...cover of the power supply in power distribution Voltage generated from a power supply used when operating the product is danger enough to endanger human lives If perchance human touch such voltage se...
Page 21: ...is not applied Check AC input line Nothing wrong with AC input line Trouble inside power supply There is a possibility of the power supply breakdown Contact ULVAC RF cannot be turned ON INTERLOCK LED...
Page 22: ...emperature rise inside power supply Check power supply surrounding clearance and whether FAN operates If the power switch is on again LED does not light However shortly after RF is ON FAILURE LED ligh...
Page 23: ...RF POWER SUPPLY RFS 03D 7 ATTACHED MATERIALS 15 ATTACHED MATERIALS Following materials are attached with this manual RFS 03D outside drawing RFS 03D inside connecting wires char...
Page 24: ...RF POWER SUPPLY RFS 03D 7 ATTACHED MATERIALS 16 RFS 03D outside rawing...
Page 25: ...RF POWER SUPPLY RFS 03D 7 ATTACHED MATERIALS 17 RFS 03D inside connecting wires char...
