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RF
POWER
SUPPLY
~
RFS-03D
~
3.PREPARATION
9
■WIRING OF SYSTEM
1)Connecting cables
Before connecting the RF power supply and matching box, check the names of connectors and
cables for exclusive use and connect the wiring referring to Fig. 2.1. and Fig. 3.6.
2)Wiring of input power
WARNING
First, connect the connector of the supplied input cable to the RF power supply and then connect
the other end. Turn OFF your main breaker before making wiring arrangement of input power.
*Connect the input connector pins as shown below
Fig 3.6 Wiring of power input terminals
①
②
③
Single phase AC100V
E
GND
RF power supply