Ulvac GP-1000G Instruction Manual Download

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Fig. 13-2

Dimensional drawing for measuring unit GP-H

Fig. 13-3

Dimensional drawing for measuring unit GP-BH

Summary of Contents for GP-1000G

Page 1: ...EL GP 1000G Pa Torr PIRANI VACUUM GAUGE INSTRUCTION MANUAL This manual is for the following vacuum gauges Serial Nos T7000G and higher Read this manual before operation and keep it at your hand for immediate reference ULVAC Inc ...

Page 2: ...fety Symbols Safety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when failure to comply with DANGER results in serious personal injury or death The work ignoring this warning will lead to serious damage to human life or factory facility including this eq...

Page 3: ... damaged or it will pop out from the connector causing injury to the surrounding including human body If the pressure exceeds atmospheric pressure provide an isolation valve so that the pressure in the sensor head does not exceed atmospheric pressure Don t use cables above rating The rating of the supplied power cable is 125 V 7 A If the power exceeds the rating use another power cable Use above t...

Page 4: ...alist in disposal Connection The contact output capacity is 100VAC 0 5A 24VDC 1A resistance load If power higher than this is opened closed do not use the contact of the vacuum gauge but use a large capacity switch in conjunction Note Maintenance Aluminum electrolytic capacitor and relays is used for the electric circuit in the sensor controller Generally the life expectancy of the aluminum electr...

Page 5: ...ment Pressure Range 13 3 4 Relay Setpoint Output 14 4 EXTERNAL INPUTS OUTPUTS 15 4 1 External Input Output Connector Assignment 15 4 2 BCD Output 16 4 3 Strobe Signal 17 5 RECORDER OUTPUTS 18 5 1 Linear Output 1 0 10 3 Pa 1 0 10 1 Torr f s 18 5 2 Linear Output 1 0 10 2 Paf s 19 5 3 Dummy Log Output Each Range 1V 20 5 4 Non Linear Output 21 6 HOW TO USE COMMUNICATION RS 232C 24 6 1 Specifications 2...

Page 6: ... Pa 3 0 10 3 Torr 1 0 10 1 Pa 7 6 10 2 Torr 50 1 0 10 1 Pa 7 6 10 2 Torr 5 1 10 1 Pa 3 8 10 1 Torr 30 5 1 10 1 Pa 3 8 10 1 Torr 7 6 10 2 Pa 5 7 10 0 Torr 15 7 6 10 2 Pa 5 7 10 0 Torr 1 0 10 3 Pa 7 6 10 0 Torr 30 1 0 10 3 Pa 7 6 10 0 Torr 2 7 10 3 Pa 2 0 10 1 Torr 50 Recorder output 1 Linear output 1 0 10 3 Pa f s 0 to 10 V 2 Linear output 1 0 10 2 Pa f s 0 to 10 V 3 Dummy log output Each range 2 V...

Page 7: ...side IEC60320 C13 3m long 1pc Input output connector D sub 37 socket M2 6 screw 1 pc Quick manual This manual 1 copy Instruction manual CD 1 pc 1 The rating of the supplied power cable is 125 V 7 A If the power exceeds the rating use another power cable Use above the rating will damage the gauge 1 3 Option 1 3 1 Sensor head Sensor head WP 01 WP 02 WP 03 WP 16 WPB 10 WPB 10 034 Connecting flange WP...

Page 8: ...r head Therefore if the type of sensor head is changed after delivery re adjustment will be required Before operation check the conditions at the time of shipment from the factory type of sensor head that are indicated on the measuring unit 1 3 3 Sensor head cable Sensor head cable 2 5 10 15 20 30 50 100m Weight kg 0 2 0 4 0 7 1 0 1 3 1 9 3 9 7 7 1 3 4 Others Test results certificate Calibration c...

Page 9: ...re indicator Displays the indicated pressure value unit of pressure set pressure value of each setpoint and relay status of each setpoint Refer to 1 3 3 LCD panel for more information Setpoint ADJ Sets the pressure for pressure setting signal The setpoint relay action is described in 3 4 Relay Setpoint Output ...

Page 10: ...g of the supplied power cable is 125 V 7 A If the power exceeds the rating use another power cable Use above the rating will damage the gauge Check line voltage Prior to turning ON the power make sure that the vacuum gauge operating voltage and the supply voltage are in agreement Connection of incorrect power can cause damage to the vacuum gauge and fire Check connection For safety reasons ground ...

Page 11: ...d pressure Pressure exponent part Indicates the exponent part of the measured pressure Setpoint pressure set value Indicates the pressure set value of each setpoint Setpoint relay status Indicates the relay status of each setpoint When the setpoint relay is actuated a frame will be displayed around SET N2 Ar gas display Indicates N2 or Ar Refer to 3 2 How to Set the DIP Switch for changeover ...

Page 12: ...ndicate a normal value either Keep out foreign matter If foreign matter like metal fragments or combustibles are admitted into the vacuum gauge through the air vents or other openings remove them Otherwise the vacuum gauge may be damaged Operating environment Do not use the vacuum gauge in a place where it may be splashed with water If it is splashed with water failure earth leakage or fire can re...

Page 13: ... Note that if the sensor head is subjected to vibration heat radiation high intensity magnetic field or intense radiation correct pressure measurement may not be made Because of its principles of operation the Pirani vacuum gauge indication is affected by the ambient temperature of the sensor head Be careful that the ambient temperature deviates considerably from the calibrating temperature about ...

Page 14: ... connection after installing components Fix the cable by taking care not to exert undue force to the connection between the sensor head and sensor head cable and the connection between the controller and sensor head cable Lay the sensor head cable away from power lines if possible Noise may occur Moving the sensor head cable will generate frictional electricity between conductor and insulator whic...

Page 15: ... to GP H to a sensor head By the kind of the sensor head installation methods are different For sensor head WP 01 02 For sensor head WP 03 16 It is inserted a screw for fixation by the vent side of the sensor head Tighten a screw for fixation in the main body of GP H and please fix it Insert a screw for fixation from the connector side of the sensor head Please insert it diagonally like a figure ...

Page 16: ...ed to a chemically active gas or highly adsorptive gas its characteristics may change In such a case fill the chamber with nitrogen or inert gas with the sensor head energized with power and then evacuate it Repeat this purging operation The sensor head may be restored to the condition before the characteristics changed At this time do not blow gas toward the opening plane of the sensor head even ...

Page 17: ...Sets dummy log output non linear output linear output of recorder output ON dummy log output or non linear output OFF linear output JSW6 7 Sets the baud rate of RS 232C JSW8 Used in system setting Used on OFF Table 3 1 Setting dip switch JSW ON OFF 1 Torr Pa 2 N2 Ar 3 Each range 2V of dummy log Each range 1V of dummy log 4 Linear output 1 0 10 3 Pa f s Linear output 1 0 10 2 Pa f s Dummy log outpu...

Page 18: ...of the measurement pressure range is displayed as follows 1 When pressure is lower than 4 0 10 1 Pa Displayed as 0 0 10 1 Pa 2 When pressure is higher than 2 7 03 Pa Blinks at 2 7 103 Pa 2 The following display appears if the sensor head filament burns out Pressure indicator corresponding to the burnt out sensor head blinks at E E 10E ...

Page 19: ...LCD display panel Normally When actuated SET1 5 0 10 1 SET1 5 0 10 1 The relay setpoint is not actuated for about three seconds after power is turned ON even if the measured pressure is lower than the set pressure But after three seconds the relay setpoint is actuated in a moment The relay setpoint is not actuated under setpoint adjustment and just after adjustment 3 4 2 Error The error relay setp...

Page 20: ...part A 1 OUTPUT N2 Lo SHORT 22 Mantissa part A 2 OUTPUT N2 Hi OPEN 23 Mantissa part A 4 OUTPUT 3 24 Mantissa part A 8 OUTPUT 4 GND 25 Mantissa part B 1 OUTPUT 5 Symbol OUTPUT 26 Mantissa part B 2 OUTPUT Lo 27 Mantissa part B 4 OUTPUT Hi 28 Mantissa part B 8 OUTPUT 6 Strobe 29 RS 232C SD 7 Exponent part C 1 OUTPUT 30 RS 232C RD 8 Exponent part C 2 OUTPUT 31 9 Exponent part C 4 OUTPUT 32 SETPOINT 1 ...

Page 21: ...B and C is as shown below SYMBOL 10 EXPONENT PART C MANTISSA PART B MANTISSA PART A The above are outputs during measurement The following are outputs at other displays 1 When 0 0 10 1 Pa is displayed 0 0 10 1 When 0 0 10 3 Torr is displayed 0 0 10 3 2 When 2 7 103 Pa is displayed by blinking F F 10 F When 2 0 10 1 Torr is displayed by blinking F F 10 F 3 When E E 10E is displayed by blinking E E ...

Page 22: ...ll of the strobe signal is 1 5 ms Interval of strobe signal The interval of strobe signals is 200 ms The BCD outputs and strobe signals are TTL level open collector outputs The maximum rating of the output terminal is 80 VDC 50 mA Following figure shows the equivalent circuit Controller interior Fig 4 2 Equivalent circuit Strobe Data ...

Page 23: ...sure Torr Voltage V 1 0 10 0 0 01 1 0 10 2 1 0 1 0 10 2 0 01 1 0 10 0 1 0 2 0 10 0 0 02 2 0 10 2 2 0 2 0 10 2 0 02 2 0 10 0 2 0 4 0 10 0 0 04 4 0 10 2 4 0 4 0 10 2 0 04 4 0 10 0 4 0 8 0 10 0 0 08 8 0 10 2 8 0 8 0 10 2 0 08 8 0 10 0 8 0 1 0 10 1 0 10 9 9 10 2 9 9 1 0 10 1 0 10 9 9 10 0 9 9 2 0 10 1 0 20 1 0 10 3 10 0 2 0 10 1 0 20 1 0 10 1 10 0 4 0 10 1 0 40 4 0 10 1 0 40 8 0 10 1 0 80 8 0 10 1 0 8...

Page 24: ...10 8 0 10 1 8 0 1 0 10 2 0 10 8 0 10 1 8 0 2 0 10 0 0 20 9 9 10 1 9 9 2 0 10 2 0 20 9 9 10 1 9 9 4 0 10 0 0 40 1 0 10 2 10 0 4 0 10 2 0 40 1 0 10 0 10 0 8 0 10 0 0 80 8 0 10 2 0 80 9 9 10 0 0 99 9 9 10 2 0 99 Convert pressure using the following equation Pa P 1 10 2 V 10 V 10 P 1 10 2 P Pressure Pa V Output voltage V Torr P 1 10 0 V 10 V 10 P 1 10 0 P Pressure Torr V Output voltage V Voltage value...

Page 25: ...0 10 2 3 20 2 0 10 2 1 20 2 0 10 0 3 20 4 0 10 0 1 40 4 0 10 2 3 40 4 0 10 2 1 40 4 0 10 0 3 40 8 0 10 0 1 80 8 0 10 2 3 80 8 0 10 2 1 80 8 0 10 0 3 80 9 9 10 0 1 99 9 9 10 2 3 99 9 9 10 2 1 99 9 9 10 0 3 99 1 0 10 3 4 10 1 0 10 1 4 10 2 7 10 3 4 27 2 0 10 1 4 20 The dummy log outputs of the recorder can be converted into pressure by using the following equation Given that the output voltage value...

Page 26: ...V Pressure Pa Voltage V Pressure Torr Voltage V Pressure Torr Voltage V 4 0 10 1 0 15 1 0 10 2 4 00 3 0 10 3 0 15 1 0 10 0 4 52 2 0 10 0 0 35 2 0 10 2 5 31 1 0 10 2 0 27 2 0 10 0 5 91 5 0 10 0 0 65 4 0 10 2 6 70 5 0 10 2 0 83 3 0 10 0 6 70 1 0 10 1 1 10 6 0 10 2 7 46 1 0 10 1 1 30 4 0 10 0 7 26 2 0 10 1 1 70 8 0 10 2 7 94 2 0 10 1 2 02 6 0 10 0 7 94 4 0 10 1 2 53 1 0 10 3 8 29 4 0 10 1 2 97 8 0 10...

Page 27: ...u tp u t Vo l ta g e V Pressure Pa Fig 5 1 Recorder output voltage graph Linear output 1 0 10 3 Pa f s 0 1 2 3 4 5 6 7 8 9 10 11 0 0E 00 2 0E 01 4 0E 01 6 0E 01 8 0E 01 1 0E 02 1 2E 02 Ou tp u t Vo l ta g e V Pressure Pa Fig 5 2 Recorder output voltage graph Linear output 1 0 10 2 Pa f s ...

Page 28: ... 1 0E 01 1 0E 02 1 0E 03 Ou t p u t Vo l t age V Pressure Pa Fig 5 3 Recorder output voltage graph Dummy LOG output 0 1 2 3 4 5 6 7 8 9 10 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Ou t p u t Vo l t age V Pressure Pa Fig 5 4 Recorder output voltage graph Non Linear output ...

Page 29: ...commended interval 0 2seconds or more This controller has updated pressure data every 0 2 seconds 6 2 Connecting the Communication Cable Use the I O connector D sub 37 pin on the rear panel of the controller The table below shows the connection Table 6 1 RS 232C Communication Cable Connection I O connector Signal direction PC side standard connector pin No Dsub 9P Pin No Symbol Meaning 29 SD Send ...

Page 30: ...R X CR CR Error output 1 Error 0 Normal 1 Communication cannot be activated except in the remote status 2 ab c when pressure is a b 10 c 3 1 ON is outputted when pressure is lower than the relay setpoint set value or when in error 6 4 Action 1 If the filament has burnt out and the display E E 10E is blinking will be returned against pressure value loading 2 If the pressure display is blinking scal...

Page 31: ...A is a coefficient referred to as free molecule thermal conductivity m3 K 1 and its value varies with the type of gas α is a coefficient that corrects the imperfectness of exchange of amount of energy at the time of collision of gas molecules and is referred to as an accommodation coefficient which is defined as follows α Tg To T To 2 where T is the filament temperature To is the temperature of ga...

Page 32: ...endent on Cν and is in inverse proportion to MT In a high pressure region the number of molecules that carry heat energy increases while the free path of molecule becomes short so that the amount of transport per molecule decreases in effect and the change of the indication due to the type of gas measured becomes complex Since the Pirani gauge measurement region is an intermediate region between m...

Page 33: ...1 9E 1 5 1E 1 1 0E 2 2 0E 2 5 0E 2 1 0E 3 1 1 2 5 6 7 1 3E 1 2 9E 1 8 5E 1 1 9E 2 3 7E 2 1 3E 3 8 0E 3 5 3E 1 1 0 1 8 4 3 8 0 1 7E 1 5 1E 1 1 1E 2 2 3E 2 8 5E 2 8 0E 3 5 9E 1 1 2 2 3 5 3 1 1E 1 2 1E 1 5 2E 1 1 1E 2 2 1E 2 5 3E 2 1 0E 3 3 7E 1 8 2E 1 1 7 4 7 9 8 2 1E 1 4 0E 1 9 0E 1 2 4E 2 2 0E 3 7 4E 1 1 1 2 0 4 1 7 4 1 5E 1 4 0E 1 9 6E 1 3 3E 2 2 0E 1 6 0E 1 1 2 2 9 5 6 1 2E 1 3 7E 1 1 2E 2 4 3E ...

Page 34: ...ent Temperature 0 10 20 30 40 50 1 10 100 1k 10k Ｐ５ＰａＰ１０ＰａＰ２０ＰａＰ５０ＰａＰ１００ＰａＰ２００ＰａＰ５００ＰａＰ１０００ＰａＰ２０００Ｐａピラニ真空計指示値Ｐａ周囲温度 Fig 7 2 Change of Indications with Ambient Temperature Indication of Pirani gauge Pa Ambient Temperature ...

Page 35: ...ptom The display remains blinking at E E 10E Possible cause Corrective action The sensor head filament has burnt out 1 Check the filament for continuity referring to Fig 13 5 Sensor head filament connection diagram The filament resistance value is about 13 ohms under atmospheric pressure Replace the sensor head if the filament has burnt out Do not energize the filament with a current of 10 mA or m...

Page 36: ...e has been adjusted at 25 C 1 Change the place of installation Install in a clean well ventilated place not blown with draft Symptom Pressure display does not show a constant value Possible cause Corrective action The pressure is changing 1 Normal The type of sensor head differs from the specified one 1 Change it with the specified one Or re adjust and re calibrated the one currently in use The se...

Page 37: ... local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and flood damage earthquake lightning strike war etc 3 Failure occurred due to carelessness handling or faulty usage 4 Products remodeled disassembled or repaired without ULVAC s acceptance 5 Failure occu...

Page 38: ... 33 10 CE DECLATION OF CONFORMITY ...

Page 39: ...mat for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Chassis Connector AC DC Converter Label Detection Unit Gauge Head Cable indicating that content of the hazardous substance or element in all homogeneous materials of the part does not exceed the requirements for concentration limits specified by ...

Page 40: ... 35 12 Certificate of Decontamination ...

Page 41: ... 36 13 RELATED DRAWINGS Panel cut dimensonal drawing Space for power cable and sensor head cable Fig 13 1 Dimensional drawing for GP 1000G ...

Page 42: ... 37 Fig 13 2 Dimensional drawing for measuring unit GP H Fig 13 3 Dimensional drawing for measuring unit GP BH ...

Page 43: ...t size dia Filament material Case material WP 01 φ 18 Pt φ 25µ BS Ni plating WP 02 φ 15 18 Pt φ 25µ BS Ni plating WP 03 φ 3 8 Pt φ 25µ BS Ni plating WP 16 NW 16 φ 30 Pt φ 25µ BS Ni plating WPB 10 034 UFC 034 Pt φ 25µ SUS304 Fig 13 4 Sensor heads compatible with GP 1000G ...

Page 44: ... 13 5 Sensor head filament connection diagram 2 5 10 15 20 30 50 100m Pin No Use 1 5 V 2 15 V 3 V 4 V 5 AG Cover FG Fig 13 6 Sensor head cable GP 1000G side GP 1000 cable side Fig 13 7 Conversion connector from GP 1000 to GP 1000G ...

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