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Contents
Page
Prior to Use .......................................................................................................................................... i
Safety Symbols ..................................................................................................................................... i
Safety Cautions ................................................................................................................................... ii
1.
OVERVIEW ............................................................................................................................... 1
1.1.
Specifications ....................................................................................................................... 1
1.2.
Options ................................................
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1.3.
Description of Components .................................................................................................. 4
1.3.1.
Front panel ................................................................................................................... 4
1.3.2.
Rear panel ..................................................................................................................... 5
1.3.3.
LCD panel .................................................................................................................... 6
2.
INSTALLING THE PIRANI VACUUM GAUGE .................................................................. 7
2.1.
Preliminary Operation .......................................................................................................... 7
2.2.
Installation ............................................................................................................................ 7
2.2.1.
Installing the controller ................................................................................................ 7
2.2.2.
Installing the sensor head ............................................................................................. 8
2.2.3.
Electrical connection .................................................................................................... 9
2.2.4.
A sensor head installation method to GP-H ............................................................... 10
3.
OPERATING PROCEDURE ................................................................................................. 11
3.1.
Cautions in Handling .......................................................................................................... 11
3.2.
How to Set the DIP Switch ................................................................................................ 12
3.3.
Display of Pressure out of Measurement Pressure Range .................................................. 13
3.4.
Relay Setpoint Output ........................................................................................................ 14
4.
EXTERNAL INPUTS/OUTPUTS .......................................................................................... 15
4.1.
External Input/Output Connector Assignment ................................................................... 15
4.2.
BCD Output ....................................................................................................................... 16
4.3.
Strobe Signal ...................................................................................................................... 17
5.
RECORDER OUTPUTS ......................................................................................................... 18
5.1.
Linear Output 1.0
×
10
+3
Pa(1.0
×
10
+1
Torr)f.s. ................................................................. 18
5.2.
Linear Output 1.0
×
10
+2
Paf.s. .......................................................................................... 19
5.3.
Dummy Log Output Each Range 1V ................................................................................. 20
5.4.
Non-Linear Output ............................................................................................................. 21
6.
HOW TO USE COMMUNICATION (RS-232C) .................................................................. 24
6.1.
Specifications ..................................................................................................................... 24
6.2.
Connecting the Communication Cable .............................................................................. 24
6.3.
Communication Commands ............................................................................................... 25
6.4.
Action ................................................................................................................................. 25
7.
APPENDIX ............................................................................................................................... 26
7.1.
Principles of Operation....................................................................................................... 26
7.2.
Types of Gas Measured and Indication .............................................................................. 27
7.3.
Change of Indication with Ambient Temperature .............................................................. 29
8.
TROUBLESHOOTING ........................................................................................................... 30
9.
WARRANTY ............................................................................................................................ 32
10.
CE DECLATION OF CONFORMITY .............................................................................. 33
11.
China RoHS Declaration ..................................................................................................... 34
12.
Certificate of Decontamination ........................................................................................... 35
13.
RELATED DRAWINGS ..................................................................................................... 36