Ulvac GP-1000G, Instruction Manual

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10 -1 10 0 10 1 10 2 10 3 10 4
10 -1
10
0
10 1
10
2
10 3
10
4
Ｈ
２
Ｈ ｅ
Ｎ
２
Ｏ
２
Ａ ｒ
Ｃ Ｏ
２
P
res
su
re (
P
a)
Indication of Pirani gauge (Pa)
Indication of
Pirani gauge
(Pa)
Absolute pressure of Gas (Pa)
H
2
He N
2
O
2
Ar CO
2
CO SF
6
CC1
2
F
2
CC1
4
NH
3
0.5
1
2
5
10
20
50
100
200
500
1000
3.1E-1
1.0
1.8
5.3
9.3
1.7E+1
3.5E+1
5.6E+1
8.2E+1
1.3E+2
1.9E+2 9.7E-1
1.9
3.3
7.7
1.5E+1
2.7E+1
6.0E+1
1.1E+2
1.8E+2
3.3E+2
4.4E+2 -
7.8E-1
1.7
5.1
9.4
2.0E+1
5.1E+1
1.0E+2
2.0E+2
5.0E+2
1.0E+3 5.3E-1
1.0
1.8
4.3
8.5
1.9E+1
5.1E+1
1.0E+2
2.0E+2
5.0E+2
1.0E+3 -
1.1
2.5
6.7
1.3E+1
2.9E+1
8.5E+1
1.9E+2
3.7E+2
1.3E+3
8.0E+3 5.3E-1
1.0
1.8
4.3
8.0
1.7E+1
5.1E+1
1.1E+2
2.3E+2
8.5E+2
8.0E+3 5.9E-1
1.2
2.3
5.3
1.1E+1
2.1E+1
5.2E+1
1.1E+2
2.1E+2
5.3E+2
1.0E+3 3.7E-1
8.2E-1
1.7
4.7
9.8
2.1E+1
4.0E+1
9.0E+1
2.4E+2
2.0E+3
- 7.4E-1
1.1
2.0
4.1
7.4
1.5E+1
4.0E+1
9.6E+1
3.3E+2
-
- 2.0E-1
6.0E-1
1.2
2.9
5.6
1.2E+1
3.7E+1
1.2E+2
-
-
- 4.3E-1
8.2E-1
1.6
3.7
7.2
1.9E+1
4.5E+1
8.0E+1
1.3E+2
3.5E+2
5.9E+2
(Fron 12)
Remarks: Sensor head: WP-01, Controller: GP-2T.
The absolute pressure was measured by a diaphragm gauge.
The indication of the Pirani gauge was calibrated with dry air.
Fig. 7-1 Indications of various types of gas