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6.5 Trouble check list
Table 5 Trouble check list
Problem Cause
Measures
Reference
①
The pump is not connected to the
power supply.
①
Connect the pump to the power
supply.
3.4
②
The power switch is not turned on.
②
Turn on the power switch.
4.2
③
Problem with power supply voltage
③
Set the power supply voltage to
within
±
10% of the rated voltage.
3.5
④
The overload protector has
actuated.
④
Press the reset button.
0.5
⑤
The motor malfunctions.
⑤
Replace the motor.
⑥
Low ambient temperature has
increased the oil viscosity.
⑥
Increase the ambient temperature to
7
℃
or more.
4.4
⑦
The entrance of foreign matter into
the pump caused the rotor to burn
out.
⑦
Overhaul (replace the cylinder and
rotor).
6.2
⑧
Moisture or solvents were sucked
in, forming rust inside the pump.
⑧
Overhaul (replace the cylinder and
rotor).
6.2
⑨
Reaction product accumulated in
the pump when the pump stops
after exhausting reactive gas.
⑨
Overhaul (clean the pump inside
and remove reaction products).
The pump
does not rotate.
⑩
Components inside the pump have
burnt out.
⑩
Overhaul (replace the damaged
components).
①
Problem with power supply voltage
①
Set the power supply voltage to
within
±
10% of the rated voltage.
3.5
②
Defective wiring to the pump
②
Perform wiring to the pump again.
3.4
③
Low ambient temperature has
increased the oil viscosity.
③
Increase the ambient temperature to
7
℃
or more.
4.4
The pump’s
rotation is
unstable.
④
Foreign matter has entered the
pump.
④
Disassemble and clean the pump to
eliminate foreign matter.
①
The pump is too small for the
volume of the vacuum chamber.
①
Select another pump.
5.2
②
The pressure measurement method
is not correct.
②
Measure the pressure correctly.
5.1
③
The vacuum gauge is not suitable.
③
Measure with a calibrated vacuum
gauge suitable for the pressure
range.
④
The pipe connected to the inlet port
is small, or the piping distance is
long.
④
Use pipes having a diameter larger
than the inlet port diameter, or
reduce the distance from the
vacuum chamber.
5.1
The pressure
does not
decrease.
⑤
The wire mesh at the inlet port is
clogged.
⑤
Remove the piping from the upper
section of the inlet port, and clean
the wire mesh.
6.2
