Output Signal
The capacitance manometer output appears at pins 2 and 12 of the
manometer connector.
The output signal is linear and the output is 10 volts on the full scale.
Example
）
Gauge with CCMT-10D,measureing signal Vout=6V
P=(6/10)×10×(101325/760=133.3224
・・・
)
=799.9344 (Pa)
Zero Adjustment
We recommend performing a zero adjustment, when the gauge is operated
for the first time.
Outputs from this unit vary slightly with ambient temperature variation.
Model CCMT-D: 0.005%/°C of the full scale
Also the zero point may drift due to power variation immediately after
power is turned on or deterioration or mounting orientation or contamination
of the detector. In that event, make zero adjustment.
1. Measure the stability of the indicated value after waiting for more than two
hours of turning on power. If automatic zero point correction is being
made by the controller, reset it.
2. Make zero adjustment after pumping down the manometer to below
pressure.
CCMT-1000D
：
6.65 Pa or less
CCMT- 100D
：
6.65 x10
-1
Pa or less
CCMT- 10D
：
6.65 x10
-2
Pa or less
CCMT- 1D
：
6.65 x10
-3
Pa or less
3. Push the <ZERO> button with a pin (max. ø1.1 mm). The zero adjustment
runs automatically. The <RUN> LED flashes until the adjustment is
completed.
The <RUN> LED flashes if the signal output is negative.
4.
LED will flash when the range of zero adjustment rise the
range.
Fig.2 <ZERO> button location
!
CAUTION
Operating conditions
When you do zero point adjustment, please use the
attached
pin(max.φ1.1mm)
.
The influence to the pressure indication by mounting
orientation
Due to the influence of gravity, the mounting orientation
and the barrier membrane displacement is changed. Table below
states the impact of the vertical direction with respect to
the horizontal direction of brand new capacitance manometer.
Model
Estimated deviation range
CCMT-1000D
Around 2mV
（
26.7Pa
）
CCMT-100D
Around 10mV
（
13.3Pa
）
CCMT-10D
Around 50mV
（
6.7Pa
）
CCMT-1D
Around 300mV
（
4.0Pa
）
Warranty
This product was shipped after rigid company inspection. However, in
case any failure occurs under ULVAC’s responsibility, such as defect in
manufacturing and damage during transportation, Buyer shall inform ULVAC,
Inc. or the local ULVAC representatives. ULVAC will repair or exchange it
at free of charge.
Warrantable Items: Capacitance Manometer delivered to the customer
Duration of guarantee: One (1) year after shipping date from ULVAC
Warrantee scope
1)
Domestic business in Japan: Product, which has damage, caused by a
failure on delivery.
2)
Direct export transaction: Product, which has damage, caused by a failure
on delivery. The warrantee scope shall confirm to the new
INCOTERMS.
3)
Products not satisfying meet the standard specifications although the
product is used under the normal service conditions such as temperature
range and power etc.
Response procedure
1)
Domestic business in Japan: ULVAC send a replacement or Buyer return
the defective items to ULVAC, Inc. or to the local ULVAC representatives
for repair. If field service is required, Buyer shall ask ULVAC, Inc. or
the local ULVAC representatives.
2)
Direct export transaction: ULVAC send a replacement or Buyer return the
defective items to ULVAC, Inc. or to the local ULVAC representatives
for repair. Return charge shall be paid by Buyer.
Disclaimer
1)
Failure occurred after expiration of warranty period
2)
Failure caused by force majeure, such as fire, storm and flood damage,
earthquake, lightning strike, war etc
3)
Failure occurred due to carelessness handling or faulty usage
4)
Products remodeled, disassembled or repaired without ULVAC’s
acceptance
5)
Failure occurred under abnormal environment, such as intense
electromagnetic field, radiation, high-temperature, high-humidity,
flammable gases, corrosive gases, dust etc.
6)
Failure occurred by noise
7)
Product deficiency or secondary damnification occurred to Buyer, from
law suit to ULVAC by third party for patent infringement.
8)
Sensor head being used (expiration of life, measurement error, etc.)
9)
Sensor head cable being used (cable burnout due to improper installation,
poor contact, etc.)
Others
1)
In case, special agreement or memorandum for specifications is made
individually, the descriptions are prior to this article “13 Product
Warranty”.
2)
Buyer shall inform ULVAC when this product is exported out of Japan.
In the meantime, Buyer shall take necessary procedures according to
Foreign Exchange and Foreign Trade Law.
3)
As for the question and consultation, Buyer shall check the model and
serial number and ask the local representative or ULVAC, Inc.
4)
The content of this document is subject to change without notice in future.
Troubleshooting
Symptom: This unit remains at about 10.5 volts and does not change when
pressure has changed.
Pressure is still higher than the measurement range.
→Normal
Considered the possibility of breakdown.
→To be inspected and repaired by ULVAC.
Symptom
：
Manometer output value is obviously unnatural.
Contamination or deterioration of the manometer
→
Replace the manometer
Temperature in the place where the manometer is installed deviates
greatly from 25°C or temperature variation is high.
→Change the install location. (Select a clean, well ventilated pla
ce not
blown with direct draft.)
Zero point is shifted.
→Make zero adjustment again.
Symptom
：
Manometer output does not indicate a constant value.
Pressure is actually changing.
→Normal
Contamination or deterioration of this unit.
→Replace the
manometer with a new one.
There is a leak in this unit or area where this unit is installed.
→Normal
There is a leak in this unit or area where this unit is installed.
→Leak in the manometer .
→
Leak in others .Stop the leak.
The is a vibration
→
Install the manometer to nor vibrate.
Symptom
：
The zero adjustment function does not work.
Pressure of chamber is high.
→
Pump down the chamber pressure under of the indicated
pressure (Refer to Zero Adjustment).
RUN LED flashes after the zero point adjustment
→
It is exceeding the zero point adjustment range.
Replace the manometer.
Network
ULVAC,Inc: http://www.ulvac.co.jp/eng/index.html
Service Centers: http://www.ulvac.co.jp/eng/support/service/index.html
Sales Offices: http://www.ulvac.co.jp/eng/support/sales_office/index.html
Contamination Certificate
This form is a contamination certificate to be presented to ULVAC before requesting ULVAC to make
repair/inspection of ULVAC components.
Please fill in this certificate and forward it to your local ULVAC representative along with
component(s)when requesting repair or others.
Regarding components used in toxic gas or components deposited with reactive products, contact your
local ULVAC representative before shipping component(s).
Name of product:
Model name :
Serial No. :
Application :
Request to ULVAC ___________________________________
Trouble symptom ___________________________________
Note ____________________________________
Contaminant (Check
□ whichever applicable)
□ We certify that the product above is not contaminated with toxic substance(s).
□ The product above is contaminated with the following toxic substance(s).
Name of contaminant (molecular form)
Characteristics
1
2
3
4
5
To: ULVAC, Inc.
,
Name of personnel in charge: ____________
Division : _______________
Name of your company : ______________
Phone : ______________
Fax
: _______________
: _______________
*
The responsibility for accidents that may be caused by contaminant in transit to
ULVAC lies with the user (shipper). So be careful in packing. ULVAC may decline your request for
repair depending on the type of contaminant and degree of contamination and return it to you.
By ULVAC, Inc.
MSDS request: yes/no
Signed by
ULVAC job No.
China RoHS
This mark is applied to the electronic information product sold in the
People's Republic of China. The figure at the center of the mark is
the validity date of environmental protection. This product does not
influence the environment, the human body and the property during
the period reckoning the manufacturing date as long as the cautions
for safe use regarding the products are observed.
*The environmental protection validity date is not the product
warranty period.
Table1. Making format for names and contents of hazardous substances or elements
Name of parts
Hazardous substances or elements
Pb
Hg
Cd
Cr
6+
PBB
PBDE
Printed Circuit Board
×
○
○
○
○
○
Frame
○
○
○
○
○
○
Connector
×
○
○
○
○
○
Label
○
○
○
○
○
○
○: indicating that content of the
hazardous substance or element in all homogeneous
materials of the part does not exceed the requirements for concentration limits
specified by SJ/T11363-2006.
×: indicating that content of the hazardous substance or element in, at least one kind
of, homogeneous materials of the part exceeds the requirements for concentration
limits specified by SJ/T11363-2006. Producer may further explain the technical
excuse to the items marked with “X” perspecific conditions here.
ULVAC, Inc.
Components Division,
http://www.ulvac.co.jp/
0
10
20
30
40
50
60
70
80
90
100
0
1
2
3
4
5
6
7
8
9
10
A
ga
in
st sc
ale(
%
)
Capacitance manometer output(V)
P=(Vout/10) * P(F.S.)
ZERO
RUN
Outside Dimensional Drawing
113
69
4
（28
.4
）
φ55
