Ulvac FR-E720, Instruction Manual

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Inverter Instruction Manual
ULVAC CRYOGENICS INCORPORATED 11/12
2
6
5
3
4
CN6
1
2
7
8
5
6
3
4
CN4
1
12
17
20
19
18
14
13
16
15
2
7
10
11
8
9
5
6
3
4
CN7
1
4
5
6
2
3
1
CN8
6
9
8
7
1
4
5
3
2
CN3
3
4
2
1
CN9
4
2
3
CN3
1
2 1 3 4
4
5
6
2
3
CN1
1
3
1
CN1
2
1
3
4
CN2
1 2
C
N
5
1
3
8
9
6
7
4
5
2
10
1
10
15
16
13
14
11
12
8
9
6
7
3
5
4
2
PS1
RELAY BOARD CPU BOARD
HOUR METER
TB1
CN2
CN1
CP1
MC
E1 E4
NO
COM
LINE
LOAD
5 6 7 8
9 10 11 12
14
13
1 2 3 4
MV2 MV1
MV2
MV1
CR
A1
A2
CP2
E1
5
1
2
4
3
5
RD WT BK
BK
WT
RD
RD
WT
BK
BK
WT
YW/GN
RD
WT
BK
BK
RD
RD
RD
BK
BK
YW/GN
RD
BK
RD
BK
BK
YW
BE
BE
YW
BE
YW
BE
YW
BE
YW
UL1007 #20
UL1007 #18
UL1007 #18
UL1007 #24
UL1007 #24
UL1007 #18
UL1015 #10
UL1015 #10
RD WT BK YW/GN
UL1007 #18
UL1007 #18
RD
RD
BK
BK
UL1007 #24
UL1007 #24
UL1007 #18
UL1007 #18
BE
YW
YW
BE
YW
BE
YW
BE
BE
YW
UL1015 #14
R S T E
R
D
B
K
E4
YW
BE
BE
BE
YW
YW
YW
BE
RD
BK
UL1007 #18
Y
W
/
G
N
G
N
UL1007 #16YW/GN
FG
AC200V 3φ
R
D
W
T
B
K
B
K
W
T
R
D
2
4
FG BAR
4
3
2
1
YW/GN UL1007 #16
×2
UL1015 #24
RD
7
8
9
14
15
13
12
11
16
1
2
3
4
YW/GN
RD
WT
BK
E5
E5
43
44
14
13
ＣＮ1
１ ２
１ ２
UL1007 #24
UL1007 #24
UL1007 #24
M
COMPRESSOR MOTER
U V W
TB3
No.1
Cold Head No.1
COLD HEAD
POWER
VR2
V
VR1
V
VR3
V
TB1
INPUT POWER
TS3
LPS
CONNECTOR CN6
TS2
TS1
REMOTE RESPONSE
CN5
COMPRESSOR
COMPRESSOR
COMPRESSOR
COMPRESSOR
Magnetic Valve
YW/GN
UL1015 #10
UL1007 #18
Y
W
/
G
N
OL1
95
96
RD WT BK
21
22
UL1015 #10
5 6 9 8 4 3 2 1 7 10
TB2
INV
R S T
U V W
E
MRS
SD
W
T
R
D
B
K
RY1
UL1007 #18
(C30PVRT＋INVERTER)
ON Command
OFF Command
ON/OFF Command
Substrate mounting hole (TH)
26-core flat cable
Substrate mounting hole (TH)
7. SCHEMATIC DIAGRAM
Answer back output
C20 mode
ALARM output
Female side
Male side