Ulvac FR-E720, Instruction Manual

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Inverter Instruction Manual
1. Descriptions
The inverter is used to change the cold head motor rotation to the frequency different
from that of the power supply in order to improve performance, reduce vibration and
cooldown time, and optimize cryopumps, cold traps and refrigerators.
(Please refer to the specifications or external drawings for the information on the set
frequency.)
2. Specifications
Model
：
FR-E720 – 0.4K
……
for C30VR, C30PVRT, C15R, C10
：
FR-E720 – 0.75K
……
for C30MVR, C30MVRT
Manufacturer
：
Mitsubishi Electric Corporation
Default
：
Settings will be done by Ulvac Cryogenics Inc. based on the
customers’ specifications.
3. Protective Function (Refer to the manufacturer’s instruction manual for
details.)
Table 1 shows the functions to protect the inverter itself. These functions may also
be activated by a failure of the inverter. For information on functions other than
listed below, please refer to the instruction manual of the manufacturer.
Table 1 Protective Functions
Name
Description
Indication
Overcurrent
shut-off
When the inverter output current reaches
or exceeds approximately 230% of the
rated current during constant speed,
acceleration or deceleration, the
protective circuit is activated to stop the
inverter output.
During acceleration
E.OC1(OC1)
During constant
speed
E.OC2(OC2)
During deceleration
E.OC3(OC3)
Regenerative
overvoltage
shut-off
If regenerative energy causes the
inverter’s internal main circuit DC voltage
to reach or exceed the specified value,
the protective circuit is activated to stop
the inverter output. It may also be
activated by a surge voltage generated in
the power supply system.
During acceleration
E.OV1(OV1)
During constant
speed
E.OV2(OV2)
During deceleration
E.OV3(OV3)
NOTE: When the protective function is activated, a cryopump(cold head motor), a cold trap, or a
refrigerator stops operation and the output signal of the compressor unit remains ON mode.
ULVAC CRYOGENICS INCORPORATED 1