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Revision History

ULVAC CRYOGENICS INCORPORATED

R-1

Revision History

Date

Revision No.

Contents

2006-06-22

2007-09-04

2009-06-08

2013-11-08

2014-04-02

2017-06-21

2018-03-06

2006.06

2007SR01

2009JE02

2013NR03

2014AL04

2017JE05

2018MH06

First edition

Addition of disposal consideration. (P.IW-1)

“Introduction” has revised.

UCN address has changed.

“SERVICE NETWORK” has revised.

“Introduction” has revised.

“SERVICE NETWORK” has revised.

Full-fledged revision

“2. Specifications”

Model description has been modified.

“SERVICE NETWORK” has been revised.

Summary of Contents for FR-E720

Page 1: ...NICS INCORPORATED INVERTER Instruction Manual Export Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when expo...

Page 2: ......

Page 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Page 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Page 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Page 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Page 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 9: ...ordinance etc When it seems that the cryopump or refrigerator has been used to evacuate a toxic or dangerous material you must contact a safety supervisor before discarding and discard it after removi...

Page 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 11: ...2 Specifications 1 CHAPTER 3 Protective Functions 1 CHAPTER 4 Setting the Inverter 2 CHAPTER 5 Dimensions 4 CHAPTER 6 External View 5 CHAPTER 7 Schematic Diagram 7 FIGURES TABLES Figure 1 Dimensions 4...

Page 12: ...Inverter Instruction Manual ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 13: ...han listed below please refer to the instruction manual of the manufacturer Table 1 Protective Functions Name Description Indication Overcurrent shut off When the inverter output current reaches or ex...

Page 14: ...ing acceleration CAUTION Since the inverter is mounted on outside of the compressor unit parameter input should be disabled to avoid modification after installation at customers sites CAUTION When the...

Page 15: ...Turn the dial to change the value in this case select 60 11 Press SET key again to blink P6 and 60 alternately 5 Select the parameter write inhibit setting 12 Display parameter P77 in flash 13 Press S...

Page 16: ...Inverter Instruction Manual 4 ULVAC CRYOGENICS INCORPORATED 56 68 5 D D1 4 118 128 5 5 5 5 Dimensions Unit mm Figure 1Dimensions Capacity D D1 0 4K 0 75K 113 133 42 62 5 hole Holes for wiring...

Page 17: ...l View When mounted on a C30VR series compressor 344 75 585 510 680 607 73 453 Side View Rear View INVERTER C30VR C30PVRT 0 4kW C30MVR C30MVRT 0 75kW 207 76 120 130 57 160 Front View Figure 2External...

Page 18: ...Inverter Instruction Manual 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 19: ...L1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 Cold Head No 1 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW BE YW BE YW BE BE YW BK BK RD...

Page 20: ...10 UL1015 10 Cold Head No3 Cold Head No 2 Cold Head No 1 UL1007 24 UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW YW BE BE YW BE YW BE BE YW BE YW BK BK RD BK RD YW GN...

Page 21: ...18 RD RD BK BK UL1007 24 UL1007 24 UL1007 18 UL1007 18 BE YW YW BE YW BE YW BE BE YW UL1015 14 R S T E RD BK E4 YW BE BE BE YW YW YW BE RD BK UL1007 18 YW GN GN UL1007 16YW GN FG AC200V 3 RD WT BK BK...

Page 22: ...7 24 UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW YW BE BE YW BE YW BE BE YW BE YW BK BK RD BK RD YW GN YW GN YW BE BK BK RD RD RD BK BK WT RD YW GN WT BK BK WT RD RD...

Page 23: ...Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Che...

Page 24: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 25: ...8 03 06 2006 06 2007SR01 2009JE02 2013NR03 2014AL04 2017JE05 2018MH06 First edition Addition of disposal consideration P IW 1 Introduction has revised UCN address has changed SERVICE NETWORK has revis...

Page 26: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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