Ulvac C15T, Instruction Manual

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Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1-1
1. COMPRESSOR UNIT DESCRIPTION
1.1 General ................................................................................................... 1-1
1.2 Specifications .......................................................................................... 1-1
1.1 General
The compressor unit supplies and circulates helium continuously in the cryopump system
for operation of the refrigerator unit (coldhead).
The C15T compressor unit consists of: 1) compressor motor, 2) cooling system, 3) oil
separation system and 4) adsorber.
See Table 1-1 for the standard compressor specifications.
1.2 Specifications
Table 1-1 Compressor Unit Standard Specifications
◆
Model :
C15T
Power
Source
Voltage x Phase x Frequency
190 - 220VAC x 3
Φ
x 50Hz
200 - 230VAC x 3
Φ
x 60Hz
Power (in normal operation)
(*1)
3.3kW / 4.1kW(50Hz/60Hz)
Cooling Type Water cooled
Cooling Water Requirement
(See Fig.3-2)
Temperature : 5 - 32°C
Flow Rate : 2 - 6L/min
Pressure Drop : 0.04 - 0.17MPa
Ambient Temperature 10 - 38°C
Compressor Winding Resistance 1.63
Ω
,
Adsorber Replacement Cycle 30,000 hours
Current (normal operation) 13A (200V, 60Hz)
Weight 100kg
Cooling Water Inlet/Outlet Rc3/8 female
Helium Gas SUPPLY/RETURN
Connector
1/2B self-sealing coupling
(*1) T
he power consumption shows the figure when flexible hose of 3m is used and
helium charge pressure is 1.60MPaG. The power consumption is higher by 10%
for 5 minutes from the startup.