Ulvac C15T, Instruction Manual, Page: 25 / 63

Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 3-1
3. INSTALLATION
3.1 Installation ............................................................................................... 3-1
3.2 Connecting Cooling Water Piping ........................................................... 3-2
3.3 Cooling Water ......................................................................................... 3-2
3.4 Connecting the Compressor Unit to the Cryopump ................................ 3-5
3.5 Connecting Electrical Cables .................................................................. 3-7
3.1 Installation
1. Place the compressor unit on a level floor within 5
º
.
2. The compressor unit must be operated in proper room temperature (10°C - 38°C).
Avoid dust and moist.
3. Leave the spaces as shown in Figure 3-1 for easier maintenance processes including;
・
Pressure gauge inspection.
・
Gas charge valve operation.
・
Adsorber replacement.
Figure 3-1 Maintenance Space(Unit: mm)
500
500
543
1543
332
432
50
50